Zonnevylle
Aernout Christaan Zonnevylle, Dordrecht NL
Patent application number | Description | Published |
---|---|---|
20150108350 | INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS - An apparatus for inspecting a sample, is equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa. The apparatus is accommodated with a processing unit adapted and equipped to represent an image as generated with the column and an image as generated with the microscope. The unit is further adapted to perform an alignment procedure mutually correlating a region of interest in one of the images, wherein the alignment procedure involves detecting a change in the optical image as caused by the charged particle beam. | 04-23-2015 |
Aernout Christiaan Zonnevylle, Utrecht NL
Patent application number | Description | Published |
---|---|---|
20110068276 | MULTIPLE BEAM CHARGED PARTICLE OPTICAL SYSTEM - The invention relates to a multiple beam charged particle optical system comprising: | 03-24-2011 |
20120305798 | CHARGED PARTICLE MULTI-BEAMLET APPARATUS - The invention relates to a method and a device for manipulation of one or more charged particle beams of a plurality of charged particle beamlets in a charged particle multi-beamlet apparatus. The manipulator device comprises a planar substrate comprising an array of through openings in the plane of the substrate, each of these through openings is arranged for passing the at least one charged particle beamlet there through, wherein each of the through openings is provided with one or more electrodes arranged around the through opening, and a electronic control circuit for providing control signals to the one or more electrodes of each through opening, wherein the electronic control circuit is arranged for providing the one or more electrodes of each individual through opening with an at least substantially analog adjustable voltage. | 12-06-2012 |
Aernout Christiaan Zonnevylle, Dordrecht NL
Patent application number | Description | Published |
---|---|---|
20130200262 | INSPECTION APPARATUS AND REPLACEABLE DOOR FOR A VACUUM CHAMBER OF SUCH AN INSPECTION APPARATUS AND A METHOD FOR OPERATING AN INSPECTION APPARATUS - An inspection apparatus is provided comprising in combination at least an optical microscope ( | 08-08-2013 |
20150108350 | INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS - An apparatus for inspecting a sample, is equipped with a charged particle column for producing a focused beam of charged particles to observe or modify the sample, and an optical microscope to observe a region of interest on the sample as is observed by the charged particle beam or vice versa. The apparatus is accommodated with a processing unit adapted and equipped to represent an image as generated with the column and an image as generated with the microscope. The unit is further adapted to perform an alignment procedure mutually correlating a region of interest in one of the images, wherein the alignment procedure involves detecting a change in the optical image as caused by the charged particle beam. | 04-23-2015 |
Aernout Christiaan Zonnevylle, Delft NL
Patent application number | Description | Published |
---|---|---|
20150262784 | INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS - The present invention relates to a method for mutually aligning a scanning electron microscope SEM and a light microscope LM by creating a change ( | 09-17-2015 |