Patent application number | Description | Published |
20080247632 | Method for Mask Inspection for Mask Design and Mask Production - The invention relates to a mask inspection method that can be used for the design and production of masks, in order to detect relevant weak points early on and to correct the same. According to said method for mask inspection, an aerial image simulation, preferably an all-over aerial image simulation, is carried out on the basis of the mask design converted into a mask layout, in order to determine a list of hot spots. The mask/test mask is analysed by means of an AIMS tool, whereby real aerial images are produced and compared with the simulated aerial images. The determined differences between the aerial images are used to improve the mask design. The inventive arrangement enables a method to be carried out for mask inspection for mask design and mask production. The use of the AIMS tool directly in the mask production process essentially accelerates the mask production, while reducing the error rate and cost. | 10-09-2008 |
20100266937 | METHOD FOR REPAIRING PHASE SHIFT MASKS - The invention relates to a method for repairing phase shift masks for photolithography in which a phase shift mask is checked for the presence of defects and, if defects are present, (i) an analysis is conducted as to which of the defects negatively affect imaging properties of the phase shift mask, (ii) said defects are improved, (iii) the imaging properties of the improved phase shift mask are analyzed and the maintenance of a predetermined tolerance criterion is checked, and (iv) the two preceding steps (ii) and (iii) are optionally repeated multiple times if the imaging properties do not meet the predetermined tolerance criterion. In such a method, the imaging properties are analyzed in that, for each defect to be improved, a test variable is determined for the defect as a function of focus and illumination, and at least one additional non-defective point on the phase shift mask in the immediate vicinity of the defect is determined, and a minimum allowable deviation between the test variable for the defect and the non-defective point is predetermined as the tolerance criterion. | 10-21-2010 |
20110016437 | METHOD AND APPARATUS FOR MEASURING OF MASKS FOR THE PHOTO-LITHOGRAPHY - The invention relates to a method and an apparatus for measuring masks for photolithography. In this case, structures to be measured on the mask on a movable mask carrier are illuminated and imaged as an aerial image onto a detector, the illumination being set in a manner corresponding to the illumination in a photolithography scanner during a wafer exposure. A selection of positions at which the structures to be measured are situated on the mask is predetermined, and the positions on the mask in the selection are successively brought to the focus of an imaging optical system, where they are illuminated and in each case imaged as a magnified aerial image onto a detector, and the aerial images are subsequently stored. The structure properties of the structures are then analyzed by means of predetermined evaluation algorithms. The accuracy of the setting of the positions and of the determination of structure properties is increased in this case. | 01-20-2011 |
Patent application number | Description | Published |
20110181483 | Electric Device - A locating device includes an LCR antenna apparatus which has an antenna unit having a first polarization direction and is configured to transmit and/or receive a measurement signal having the first polarization direction. The antenna unit has at least one second polarization direction for transmitting and/or receiving the measurement signal. | 07-28-2011 |
20130120004 | Locating Appliance - A locating appliance configured to sense an article includes a push-pull measurement bridge and a comparator. The push-pull measurement bridge is configured to actuate a first electromagnetic device and a second electromagnetic device, in each case in a variable ratio. The first electromagnetic device takes the actuation as a basis for producing an electromagnetic alternating field in a region of the article. The comparator is configured to sense the article if the variable ratio differs from a predetermined ratio by more than a predetermined amount. | 05-16-2013 |
20130134968 | Detection of a Metal or Magnetic Object - A measuring device configured to detect a metal object includes two emission coils configured to produce superimposed magnetic fields. The measuring device also includes a device configured to determine a differential voltage between the emission coils. The measuring device further includes a control device configured to supply the emission coils with alternating voltages such that the value of an AC voltage component of the differential voltage, which is time synchronized with the alternating voltage, is minimized. The control device is configured to detect the metal object when the ratio of the alternating voltages does not correspond to the ratio of the impedances of the emission coils when the metal object is not there. | 05-30-2013 |
20130193955 | Locator - A locator for detecting an article includes a push-pull measurement bridge configured to actuate a first and a second electromagnetic device in a variable ratio. Depending on the actuation the first electromagnetic device generates an alternating electromagnetic field in the region of the article. The locator further includes a comparator for detecting the article, should the variable ratio differ by more than a predetermined amount from a predetermined ratio. | 08-01-2013 |
20130193959 | Detection of a Metal or Magnetic Object - A measuring device for detecting a metal object includes two emission coils configured to produce superimposed magnetic fields, a receiving coil in the region of both magnetic fields, and a control device configured to control the emission coils such that a value of a voltage, which is clock synchronized with alternating voltages and which is induced in the emission coils, is minimized. The control device is configured to detect the metal object when a ratio of the alternating voltages does not correspond to a ratio of distances between the receiving coils and the emission coils. | 08-01-2013 |
20130204566 | Manual Positioning Device - A manual positioning device includes at least one receiver, a reference network, a first switch, and at least one second switch. The at least one second switch, together with the first switch, is configured to switch at least two different reference signal paths for determining reference signals on the reference network. | 08-08-2013 |
20130207648 | Detection of a Metal or a Magnetic Object - A measuring apparatus for detecting a metal object includes two emission coils, a magnetoresistive measuring device, and a control device. The emission coils are configured to produce superimposed magnetic fields. The magnetoresistive measuring device is in the region of both magnetic fields, and is configured to emit an output signal which is dependent on the magnetic field. The control device is configured to supply the emission coils with alternating voltages such that the value of the alternating voltage component of the output signal, which is time synchronized with the alternating voltages, is minimized. The control device is further configured to detect the object when the ratio of the alternating voltages does not correspond to the distances between the magnetoresistive measuring device and the emission coils. | 08-15-2013 |
20130207667 | Detection of a Dielectric Object - A measuring apparatus for detecting a dielectric object comprises a potential probe for determining an electric potential in an electric field, a first capacitance device, a second capacitance device, and a control device configured to supply alternating voltages to the first and the second capacitance devices. The control device is configured to amplify the alternating voltages in opposite directions to one another in order to minimize the magnitude of an AC voltage component, which is clock-synchronous with the alternating voltages, of a voltage which is recorded by means of the potential probe. The dielectric object is detected when a ratio of the alternating voltages does not correspond to a ratio of (i) a first distance of the potential probe from the first capacitance device to (ii) a second distance of the potential probe from the second capacitance device. | 08-15-2013 |
20130249539 | Detection of a Metal or Magnetic Object - A measuring device for detecting a metal object includes an emission coil configured to produce a magnetic field and a compensation network which is connected to the emission coil. A differential voltage is applied between the emission coil and the compensation network. The measuring device also includes a control device configured to supply the emission coil and the compensation network with alternating voltages such that the value of an alternating voltage component of the differential voltage, which is time synchronized with the alternating voltage, is minimized. The control device is configured to detect the metal object when a ratio of the alternating voltages does not correspond to a ratio of the flows flowing through the emission coils and the compensation network. | 09-26-2013 |
20130300401 | Sensor Apparatus, in Particular Metal Sensor, with a Field-Compensated Magnetic Field Sensor - A sensor apparatus, in particular a metal sensor, has at least two coils and a magnetic field sensor. The arrangement of coils and magnetic sensor with respect to one another and/or the number of coil turns and/or the winding sense of the coils and/or the coil current is/are selected such that the magnetic field generated by the coils approximately disappears at the location of the magnetic field sensor. A method for detecting objects, in particular a method for finding metal objects, uses at least two coils and a magnetic field sensor, particularly an AMR, GMR or Hall sensor. The arrangement of the coils and the magnetic sensor with respect to one another and/or the number of coil turns and/or the winding sense of the coils and/or the coil current is/are selected such that the magnetic field generated by the coils approximately disappears at the location of the magnetic field sensor. | 11-14-2013 |
20130300436 | Stud Detector - A stud detector has a voltage source, a first device, and a second device. The first device serves to generate a voltage that is galvanically decoupled from the voltage source. The second device serves for the potential-free transmission of a control signal. | 11-14-2013 |
20140145704 | Method for Localizing Objects Enclosed in a Medium, and Measuring Device for Carrying Out the Method - The disclosure relates to a method for localizing objects enclosed in a medium in which a measurement signal correlated to the enclosed object is generated and is used to produce a signal for transmission to a user. The signal allows at least a distinction between a first state “Object detected” and at least one second state “no object detected.” The disclosure proposes that a third state “Object close by” be provided. Furthermore, the disclosure relates to a measuring device, particularly a hand-held locating device, for carrying out the method according to the disclosure. | 05-29-2014 |
20140239981 | LOCATOR - A locator for capacitively sensing an object includes a transmission electrode to which an excitation signal can be applied, a reception electrode, a sensing region in the region of the transmission electrode and the reception electrode, and a measuring device for sensing a capacitance between the transmission electrode and the reception electrode. The locator further includes a processing device for determining the presence of the object in the sensing region if the sensed capacitance differs from a reference capacitance, and a screening electrode that is arranged in the region of the transmission electrode and the reception electrode. The screening electrode is connected to a potential so as to reduce the base capacitance between the transmission electrode and the reception electrode. | 08-28-2014 |
20140300351 | METAL SENSOR - A metal sensor includes a primary coil, a compensation coil, a first additional coil, and a magnetic field sensor. The first additional coil is configured to be excited without the primary coil and the compensation coil being excited. | 10-09-2014 |
20140340088 | Metal Sensor - A metal sensor includes a primary coil arranged in a first plane, a first compensation coil arranged in a second plane, a second compensation coil arranged in a third plane, and a magnetic field sensor arranged in a fourth plane. The first plane, the second plane, the third plane and the fourth plane are oriented parallel to one another and perpendicular to a common z-direction in each case. | 11-20-2014 |
20150015231 | Capacitive Positioning Device - A locating appliance for a capacitive detection of an object encloses in a medium. The locating appliance comprises a measurement electrode such that a first alternating current flows from the measurement electrode into the medium. The locating appliance further comprises a reception electrode where the measurement electrode forms a measurement capacitance with the reception electrode, where the measurement capacitance is based at least in part on the object. The locating appliance further comprises a reference electrode such that the reference electrode forms a reference capacitance with the reception electrode, where the reference capacitance is not based on the object. The locating appliance further comprises a first opposing electrode that is configured to introduce a first alternating current in the medium. The absolute value of the second alternating current corresponds to an absolute value of the first alternating current and is in antiphase with the second alternating current. | 01-15-2015 |
20150042343 | OBJECT FINDER - A device for detecting an object includes a coil for generating a magnetic field in the region of the coil, a first electrode for generating an electrical field in the region of the electrode, and an evaluating device for detecting the object on the basis of an influence of the magnetic field or the electrical field. The device also includes a separating device configured to suppress a current flow through the coil so as to use the coil as an electrode. | 02-12-2015 |
20150084651 | Capacitive Positioning Device - A positioning device for capacitively detecting an object enclosed in a medium comprises a measuring electrode, a reference electrode, and a receiving electrode. The measuring electrode with the receiving electrode forms a measuring capacitance, which can be influenced by the object. The reference electrode with the receiving electrode forms a reference capacitance, which cannot be influenced by the object. The positioning device further comprises an oscillator configured to supply the measuring capacitance and the reference capacitance with phase-shifted AC voltages and a control device configured to control amplitudes of at least one of the AC voltages, in order to adapt effects of electrical fields of the measuring electrode or of the reference electrode on the receiving electrode to one another. The measuring, reference, and receiving electrodes are planarly formed. The measuring electrode has a larger surface area than the reference electrode. | 03-26-2015 |