Patent application number | Description | Published |
20100036636 | DIGITAL DAMPING CONTROL OF NANOMECHANICAL TEST INSTRUMENTS - A method of damping control for a nanomechanical test system, the method including providing an input signal, providing an output signal representative of movement of a displaceable probe along an axis in response to the input signal, performing a frequency-dependent phase shift of the output signal to provide a phase-shifted signal, adjusting the phase-shifted signal by a gain value to provide a feedback signal, and adjusting the input signal by incorporating the feedback signal with the input signal. | 02-11-2010 |
20100095780 | MICRO/NANO-MECHANICAL TEST SYSTEM EMPLOYING TENSILE TEST HOLDER WITH PUSH-TO-PULL TRANSFORMER - A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure. | 04-22-2010 |
20100132441 | MICROMACHINED COMB DRIVE FOR QUANTITATIVE NANOINDENTATION - A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, the indenter tip moveable together with the probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor comprising a plurality of comb capacitors configured to drive the probe, together with the indenter tip, along a displacement axis, including in an indentation direction, upon application of a bias voltage to the actuation capacitor. The micromachined comb drive further includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe. | 06-03-2010 |
20110265559 | 2-D MEMS TRIBOMETER WITH COMB DRIVES - A microelectromechanical (MEMS) nanoindenter transducer including a body, a probe coupled to and moveable relative to the body, the probe holding a removeable indenter tip, a first micromachined comb drive and a second micromachined comb drive. The first micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a first axis, including in an indentation direction, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the first axis. The second micromachined comb drive includes an actuator comprising a plurality of electrostatic capacitive actuators configured to drive the probe along a second axis, which is perpendicular to the first axis, in response to an applied bias voltage, and a displacement sensor comprising a plurality of differential capacitive sensors having capacitance levels which together are representative of a position of the probe relative to the second axis. Each of the electrostatic capacitive actuators and the differential capacitive sensors comprises an electrode comb pair, each electrode comb pair including a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe. | 11-03-2011 |
20120266666 | MICROMACHINED COMB DRIVE FOR QUANTITATIVE NANOINDENTATION - A microelectromechanical nanoindenter including a body, a probe moveable relative to the body, an indenter tip coupled to an end of the moveable probe, and a micromachined comb drive. The micromachined comb drive includes an electrostatic actuator capacitor configured to drive the probe, along with the indenter tip. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the actuator capacitor and the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe. | 10-25-2012 |
20120292528 | MICRO ELECTRO-MECHANICAL HEATER - A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface. | 11-22-2012 |
20130098144 | MICROELECTROMECHANICAL TRANSDUCER AND TEST SYSTEM - A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe. | 04-25-2013 |
20130098145 | METHOD OF MEASURING AN INTERACTION FORCE - A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface. | 04-25-2013 |
20130247682 | MICRO/NANO-MECHANICAL TEST SYSTEM EMPLOYING TENSILE TEST HOLDER WITH PUSH-TO-PULL TRANSFORMER - A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure. | 09-26-2013 |
20140150562 | THREE DIMENSIONAL TRANSDUCER - A testing instrument for mechanical testing at nano or micron scale includes a transducer body, and a coupling shaft coupled with a probe tip. A transducer body houses a capacitor. The capacitor includes first and second counter electrodes and a center electrode assembly interposed therebetween. The center electrode assembly is movable with the coupling shaft relative to the first and second counter electrodes, for instance in one or more of dimensions including laterally and normally. The center electrode assembly includes a center plate coupled with the coupling shaft and one or more springs extending from the center plate. Upper and lower plates are coupled with the center plate and cover the center plate and the one or more springs. A shaft support assembly includes one or more support elements coupled along the coupling shaft. The shaft support assembly provides lateral support to the coupling shaft. | 06-05-2014 |
20140326707 | PROBE TIP HEATING ASSEMBLY - A heating assembly configured for use in mechanical testing at a scale of microns or less. The heating assembly includes a probe tip assembly configured for coupling with a transducer of the mechanical testing system. The probe tip assembly includes a probe tip heater system having a heating element, a probe tip coupled with the probe tip heater system, and a heater socket assembly. The heater socket assembly, in one example, includes a yoke and a heater interface that form a socket within the heater socket assembly. The probe tip heater system, coupled with the probe tip, is slidably received and clamped within the socket. | 11-06-2014 |
20140331782 | HIGH TEMPERATURE HEATING SYSTEM - A sample gripping and heating assembly includes an assembly housing and first and second heating grips coupled with the assembly housing. The first and second heating grips each include a gripping surface, and the gripping surfaces of the first and second heating grips are opposed to each other. Each of the first and second heating grips further includes a heating element adjacent to the gripping surface. Optionally, the sample gripping and heating assembly is included in a heating system including a probe heater having a probe heating element for heating of a probe. The heating system is included with a testing assembly having a stage coupled with the sample gripping and heating assembly, and a transducer assembly coupled with the probe heater. | 11-13-2014 |