Patent application number | Description | Published |
20100244631 | COMPOSITE SUBSTRATE, ELASTIC WAVE DEVICE USING THE SAME, AND METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE - In a composite substrate | 09-30-2010 |
20110041987 | METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE - A method for manufacturing a composite substrate according to the present invention includes a formation step of forming a structural element portion on a front surface of a first substrate, a grinding step of fixing the first substrate and grinding a back surface of the first substrate, and a bonding step of bonding a second substrate to the ground back surface with an adhesion layer composed of an adhesive. In such a manner, before forming the adhesion layer, the handling properties of which are affected by heating, and before grinding the first substrate, the strength of which is decreased by grinding, a process of forming the structural element portion, including a heating step, is performed. Furthermore, a piezoelectric substrate may be used as the first substrate, and a supporting substrate which supports the piezoelectric substrate may be used as the second substrate. | 02-24-2011 |
20110157673 | OPTICAL MODULATOR - An optical modulator includes an optical modulation substrate, an electrical length adjusting substrate, a package containing the substrates, and a plurality of input ports for inputting high frequency electrical signals. The optical modulation substrate includes a substrate body made of an electro-optic material, a ground electrode and a plurality of signal electrodes provided on the substrate body, optical waveguides propagating lights interacting with the signal electrodes, respectively, and electrode input ports inputting the high frequency electrical signals into the signal electrodes, respectively. The signal electrode includes an interacting part, an input end part provided between the electrode input port and interacting part, and a terminal part. The electrical length adjusting substrate includes conductive lines connected to the input ports for inputting the high frequency electrical signals, respectively. The conductive lines have electrical lengths different from each other for adjusting the phase differences among the ports. | 06-30-2011 |
20110262071 | BRANCHED OPTICAL WAVEGUIDE, OPTICAL WAVEGUIDE SUBSTRATE AND OPTICAL MODULATOR - An optical waveguide is formed on a ferroelectric substrate having a thickness of 20 μm or less by diffusion of a dopant or ion exchange. The optical waveguide has a non-branched section | 10-27-2011 |
20120086312 | COMPOSITE SUBSTRATE MANUFACTURING METHOD AND COMPOSITE SUBSTRATE - According to a composite substrate manufacturing method of the present invention, (a) a piezoelectric substrate having minute asperities formed in a rear surface thereof, and a support substrate having a smaller thermal expansion coefficient than the piezoelectric substrate are prepared, (b) a filler is applied to the rear surface | 04-12-2012 |
Patent application number | Description | Published |
20120119224 | COMPOSITE SUBSTRATE AND METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE - A metal film | 05-17-2012 |
20140145558 | Composite Substrate, Surface Acoustic Wave Device, and Method for Manufacturing Composite Substrate - In a composite substrate | 05-29-2014 |
20140191373 | Composite Wafer and Method for Manufacturing the Same - A composite wafer | 07-10-2014 |
20140210316 | Composite Substrate and Method for Manufacturing the Same - The present invention provides a composite substrate comprising a piezoelectric substrate that is a single-crystal lithium tantalate or lithium niobate substrate, a support substrate that is a single-crystal silicon substrate, and an amorphous layer containing argon and joining together the piezoelectric substrate and the support substrate. The amorphous layer includes, in order from the piezoelectric substrate toward the composite substrate, a first layer, a second layer, and a third layer. The first layer contains a larger amount of a constituent element of the piezoelectric substrate than the second and third layers, the third layer contains a larger amount of a constituent element of the support substrate than the first and second layers, and the second layer contains a larger amount of argon than the first and third layers. | 07-31-2014 |
20140210317 | Composite Substrate - A composite substrate according to the present invention includes a piezoelectric substrate that is a single-crystal lithium tantalate or lithium niobate substrate, a support substrate that is a single-crystal silicon substrate, and an amorphous layer joining together the piezoelectric substrate and the support substrate. The amorphous layer contains 3 to 14 atomic percent of argon. The amorphous layer includes, in order from the piezoelectric substrate toward the composite substrate, a first layer, a second layer, and a third layer. The first layer contains a larger amount of a constituent element (such as tantalum) of the piezoelectric substrate than the second and third layers. The third layer contains a larger amount of a constituent element (silicon) of the support substrate than the first and second layers. The second layer contains a larger amount of argon than the first and third layers. | 07-31-2014 |
20150042207 | Composite Substrate and Elastic Wave Device - A composite substrate | 02-12-2015 |
20150091416 | Composite Substrate, Piezoelectric Device, and Method for Manufacturing Composite Substrate - A composite substrate | 04-02-2015 |
20150102707 | Composite Substrate - A composite substrate | 04-16-2015 |
20150280107 | Composite Substrate, Production Method Thereof, and Acoustic Wave Device - A composite substrate production method of the invention includes (a) a step of mirror polishing a substrate stack having a diameter of 4 inch or more, the substrate stack including a piezoelectric substrate and a support substrate bonded to each other, the mirror polishing being performed on the piezoelectric substrate side until the thickness of the piezoelectric substrate reaches 3 μm or less; (b) a step of creating data of the distribution of the thickness of the mirror-polished piezoelectric substrate; and (c) a step of performing machining with an ion beam machine based on the data of the thickness distribution so as to produce a composite substrate have some special technical features. | 10-01-2015 |
Patent application number | Description | Published |
20150281503 | IMAGE SCANNING APPARATUS - An image scanning apparatus is configured to obtain a greatest gray gradation value when the light source illuminates the gray reference member at a first light quantity value, obtain a gradation value of a black signal output by the signal conversion unit when the light source is powered off, calculate a first difference value, set a second light quantity value, set a correction light quantity value, obtain a second difference value by subtracting the gradation value of the black signal from the second gradation value of a white signal, calculate a shading correction value based on a ratio of the second difference value to the first difference value, control the scanning unit to scan the image on the original sheet with controlling the light source to illuminate the original sheet in accordance with the second light quantity value, and apply the shading correction in accordance with the shading correction value. | 10-01-2015 |
20150281504 | IMAGE SCANNING APPARATUS - An image scanning apparatus is configured to obtain a greatest gray gradation value when the light source illuminates the gray reference member at a first light quantity value, set a second light quantity value such that a gray signal having the gray gradation value is output by the signal conversion unit based on the analog signal output by the photoelectric conversion element belonging to a block identified by the block information when the light source illuminates the gray reference member at the second light quantity value, calculate a shading correction value, scan the image on the original sheet with controlling the light source to illuminate the original sheet in accordance with the second light quantity value, and apply the shading correction to the digital signal output by the signal conversion unit in accordance with the shading correction value. | 10-01-2015 |
20150281517 | IMAGE SCANNING APPARATUS - A controller is configured to set a reference gradation value when a gray reference member is illuminated. When the number of pixels, of which the gradation values is equal to or greater than the reference gradation value, is a target number of pixels, both are stored in association with each other. A correction target number which is a minimum target number of pixels from among a plurality of target numbers of pixels respectively providing differences, which is less than a predetermined value, between the reference gradation values stored in association with an M-th target number and an (M+1)-th target number. The controller further determines an anomaly pixel number which is the number of anomaly pixels having gradation values which are equal to or greater than a base gradation value. The gradation values of the determined number of anomaly pixels are corrected. | 10-01-2015 |