Patent application number | Description | Published |
20090026067 | Droplet Removing Device and Method in Plasma Generator - There is provided a device for removing droplets in a plasma generator by which droplets can be surely separated from a plasma traveling from an arc discharge section and can be certainly removed, so that it can be prevented for the droplets to reach an article being processed. A tubular traveling passage ( | 01-29-2009 |
20100018859 | Radially enlarged type plasma generating apparatus - Intended is to provide a plasma generating apparatus, which can remove such a droplet efficiently as might otherwise migrate into a plasma and which can constitute a droplet removing portion simply and inexpensively thereby to improve a, surface treating precision such as a filming with a highly pure plasma. In a plasma advancing path ( | 01-28-2010 |
20100059369 | PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PERIPHERY OF PLASMA GUN - There is provided a plasma generating apparatus having a plasma gun which can remove droplets mixed with plasma efficiently without reducing the effective amount of plasma generated by vacuum arc discharge and in which a droplet removing portion can be constituted easily and inexpensively, and precision of surface treatment of films by high purity plasma can be enhanced. Periphery of a cathode ( | 03-11-2010 |
20110068004 | PLASMA GENERATING APPARATUS AND PLASMA PROCESSING APPARATUS - Provided is a plasma generating apparatus by which droplets mixed in plasma can be efficiently removed and surface processing precision can be improved in film formation wherein high purity plasma is used. A plasma processing apparatus using such plasma generating apparatus is also provided. A droplet removing portion arranged in a plasma advancing path is composed of a straight plasma straightly advancing tube (P | 03-24-2011 |
20110109227 | Target Exchange Type Plasma Generating Apparatus - The objective of the present invention is to provide a target exchange type plasma generating apparatus in which the positions of two targets can be adjusted independent of each other. A target exchanging mechanism ( | 05-12-2011 |
20110180403 | Insulator Interposed Type Plasma Processing Apparatus - Electrically charged droplets and neutral droplets mixed with plasma are removed with better efficiency, and an improvement in the surface treatment precision of film formation by high purity plasma is sought. | 07-28-2011 |
20120031337 | DIVIDED ANNULAR RIB TYPE PLASMA PROCESSING APPARATUS - A plasma stream-derived deposited matter formed on an annular rib for droplet capture in a plasma processing apparatus is prevented from falling into a plasma generation portion and causing a short circuit. The annular rib for the droplet capture is divided into multiple rib segments. Thus, from the beginning of the formation of the deposited matter on the annular rib due to the aggregation of the material in the plasma stream, it is possible to reduce the size of the deposited matter. By reducing the size of this deposited matter, when a piece of the deposited matter falls into the plasma generation portion, the piece of the deposited matter gets into a groove portion provided between a cathode and a wall surface of the plasma generation portion, thereby preventing the electrical short circuit between the cathode and the wall surface. | 02-09-2012 |
20120037504 | Multiply Divided Anode Wall Type Plasma Generating Apparatus and Plasma Processing Apparatus - An object of the present invention is to provide a multiply divided anode wall type plasma generation apparatus, wherein a short circuit between the cathode and the anode is not caused even if deposited matter adhering and depositing on the inner wall of the anode by diffusion plasma detach and fall. Also, an object is to provide a plasma processing apparatus using the same. | 02-16-2012 |