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Young Ho Kim

Young Ho Kim, Gangnam-Gu KR

Patent application numberDescriptionPublished
20130028957PHARMACEUTICAL COMPOSITION FOR TREATING CANCER - The present invention provides a pharmaceutical composition for treating cancer, comprising at least one selected from deoxyribonucleic acids (DNA) for encoding small interfering RNA (siRNA) which complementarily binds to the base sequence of the transcript (mRNA transcript) of the FLJ25416 gene, represented by sequence number 3, sequence number 5, and sequence number 7 to inhibit the intracellular expression of the FLJ25416 gene, antisense RNA which inhibits expression of the FLJ25416 gene, and short hairpin RNA (shRNA) which inhibits expression of the FLJ25416 gene. As the siRNA, which is complementary to the base sequence of the transcript (mRNA transcript) of the FLJ25416 gene, the antisense RNA, and the shRNA, according to the present invention, inhibit expression of the FLJ25416 gene which is known to be expressed in cancer cells, and thus kill cancer cells, the composition of the present invention can be used as a novel anti-cancer agent.01-31-2013

Young Ho Kim, Daegeon KR

Patent application numberDescriptionPublished
20110098239NOVEL DIARYL HEPATONOID-BASED COMPOUNDS AND USE THEREOF - The present invention relates to a diaryl hepatonoid-based compound of formula (1) having viral inhibitory activity; its pharmaceutically acceptable salt; or a hydrate, a solvate or a prodrug of any of the foregoing, and a pharmaceutical composition comprising the same, and the use thereof therapeutic agents. The diaryl hepatonoid-based compounds according to present invention have an excellent effect of inhibiting viral activity, and thus will be useful as therapeutic agents against virus-related diseases.04-28-2011

Young Ho Kim, Taejeon-Si KR

Patent application numberDescriptionPublished
20090022822EXTRACT OF OGALPI, ERECTILE DYSFUNCTION FANNING HEALTHY FOOD AND ERECTILE DYSFUNCTION TREATING AGENT CONTAINING THE SAME - The present invention relates to an alcohol extract of ogalpi, erectile dysfunction improving health food and a treating agent containing the same, more precisely, an alcohol extract of ogalpi having an effect of improving erectile dysfunction, erectile dysfunction improving health food and an erectile dysfunction treating agent containing the same. The alcohol extract of ogalpi of the present invention has a promoting effect of penile erectility, so that it can be effectively used for the improvement of erectile dysfunction.01-22-2009

Patent applications by Young Ho Kim, Taejeon-Si KR

Young Ho Kim, Gyeongsangbuk-Do KR

Patent application numberDescriptionPublished
20110211155COUPLING METHOD AND STRUCTURE FOR COUPLING UNIT OF RIMLESS EYEGLASSES - A coupling method and a structure for a coupling unit of rimless eyeglasses. The coupling method and the coupling structure can not only increase the coupling force of a coupling member but also prevent damage to or defects of the coupling unit, wherein the coupling member is coupled to end pieces and a bridge to be coupled with lenses of the rimless eyeglasses. The coupling structure includes fixing pieces extended and formed from respective nose poles or separately fabricated; a fixing unit configured to fix coupling members to the fixing pieces; and an assembly unit configured to connect the coupling members, coupled to the fixing pieces by means of the fixing unit, to endpieces or a bridge or both.09-01-2011

Young Ho Kim, Chungcheongbuk-Do KR

Patent application numberDescriptionPublished
20110240456PRYOLYTIC ENERGY RECOVERY SYSTEM - Provided is a pyrolytic energy recovery system for pyrolyzing wastes to obtain oil, the system including: a recovery furnace; a heat plate for dividing an inner space of the recovery furnace; a heating chamber disposed under the heat plate; a pyrolysis chamber disposed over the heat plate; a heating pipe line installed inside the front and rear surfaces of the recovery furnace; a rotary means constituted by a plurality of rotaries installed in the pyrolysis chamber to evenly distribute recyclable materials introduced through the recyclable material inlet port; a residual discharge means having primary residual conveyance screws longitudinally installed along the valley of the heat plate, a residual hopper installed at a separate space in the heating chamber such that the residual conveyed to a center part of the heat plate through the primary conveyance screws is lowered to be gathered, and a secondary residual conveyance screw installed from the residual hopper to the exterior of the recovery furnace and discharging the residual accumulated in the residual hopper to the exterior of the recovery furnace; and a condensing means separately installed at the exterior of the recovery furnace and receiving vaporized extracts generated through pyrolysis of the recyclable material in the pyrolysis chamber to exchange heat with the extracts to extract liquefied recovery oil.10-06-2011

Young Ho Kim, Suwon KR

Patent application numberDescriptionPublished
20120170320METHOD AND APPARATUS FOR GENERATING CURRENT COMMAND VALUE FOR TRACKING MAXIMUM POWER POINT IN SOLAR ENERGY GENERATING SYSTEM - There are provided a method and an apparatus for generating a current command value for tracking the maximum power point of a solar energy generating system. The apparatus includes: a voltage detector detecting a voltage input into the flyback power converter; a first calculator calculating an output power from the detected input voltage; a second calculator calculating a power variation based on the calculated output power and a voltage variation of the input voltage; and a current command value generator generating a current command value for tracking the maximum power point of the solar cell module from the calculated voltage variation and the calculated power variation. Accordingly, a current command value after calculating an output power may be generated with only a voltage detector, without a current detector, thereby reducing the costs of a solar energy generating system by decreasing the costs for a high-priced current detector, and simplifying circuit.07-05-2012
20120327558CONDUCTIVE PASTE COMPOSITION FOR INTERNAL ELECTRODE AND MULTILAYER CERAMIC CAPACITOR INCLUDING THE SAME - A conductive paste composition for an internal electrode, and a multilayer ceramic capacitor (MLCC) including the same are provided. The conductive paste composition for an internal electrode includes: 100 parts by weight of metal powder particles; and 0.1 to 10 parts by weight of carbon nano-tubes (CNTs). The conductive paste composition for an internal electrode may control sintering shrinkage of metal powder particles.12-27-2012
20130009515CONDUCTIVE PASTE COMPOSITION FOR INTERNAL ELECTRODES AND MULTILAYER CERAMIC ELECTRONIC COMPONENT INCLUDING THE SAME - There are provided a conductive paste composition for an internal electrode and a multilayer ceramic electronic component including the same. The conductive paste composition includes: 100 moles of a metal powder; 0.5 to 4.0 moles of a ceramic powder; and 0.03 to 0.1 mole of a silica (SiO01-10-2013

Young Ho Kim, Whasung-Si KR

Patent application numberDescriptionPublished
20120291580AUTOMATED MANUAL TRANSMISSION CONTROL APPARATUS - An automated manual transmission control apparatus may include a cam rotatably provided on a center shaft, first power transmission assembly for transmitting power generated by rotational displacement of the cam to a shift lever as power to drive the shift lever, and second power transmission assembly for transmitting power generated by the rotational displacement of the cam to a release lever as power to drive the release lever.11-22-2012

Young Ho Kim, Gyeonggi-Do KR

Patent application numberDescriptionPublished
20080305636METHOD OF FORMING FINE PATTERN EMPLOYING SELF-ALIGNED DOUBLE PATTERNING - There are provided a method of forming a fine pattern employing self-aligned double patterning. The method includes providing a substrate. First mask patterns are formed on the substrate. A reactive layer is formed on the substrate having the first mask patterns. The reactive layer adjacent to the first mask patterns is reacted using a chemical attachment process, thereby forming sacrificial layers along outer walls of the first mask patterns. The reactive layer that is not reacted is removed to expose the sacrificial layers. Second mask patterns are formed between the sacrificial layers adjacent to sidewalls of the first mask patterns facing each other. The sacrificial layers are removed to expose the first and second mask patterns and the substrate exposed between the first and second mask patterns. The substrate is etched using the first and second mask patterns as an etching mask.12-11-2008
20080308875MASK ROM DEVICE, SEMICONDUCTOR DEVICE INCLUDING THE MASK ROM DEVICE, AND METHODS OF FABRICATING MASK ROM DEVICE AND SEMICONDUCTOR DEVICE - A mask read-only memory (ROM) device, which can stably output data, includes an on-cell and an off-cell. The on-cell includes an on-cell gate structure on a substrate and an on-cell junction structure within the substrate. The off-cell includes an off-cell gate structure on the substrate and an off -cell junction structure within the substrate. The on-cell gate structure includes an on-cell gate insulating film, an on-cell gate electrode and an on-cell gate spacer. The on-cell junction structure includes first and second on-cell ion implantation regions of a first polarity and third and fourth on-cell ion implantation regions of a second polarity. The off-cell gate structure includes an off-cell gate insulating film, an off-cell gate electrode and an off-cell gate spacer. The off-cell junction structure includes first and second off-cell ion implantation regions of the first polarity and a third off-cell ion implantation region of the second polarity.12-18-2008
20090312413Composition Comprising Tanshinone Compounds Isolated From The Extract Of Salviae Miltiorrhizae Radix For Treating Or Preventing Cognitive Dysfunction And The Use Thereof - A composition comprising tanshinone compounds selected from the group consisting of miltirone, 1,2-didehydromiltirone, tanshinone IIA, tanshinone I and dihydrotanshinone I isolated from 12-17-2009
20100197685NOVEL BENZOFURAN TYPE DERIVATIVES, A COMPOSITION COMPRISING THE SAME FOR TREATING OR PREVENTING COGNITIVE DYSFUNCTION AND THE USE THEREOF - The present invention relates to the novel benzofuran derivatives, the preparation thereof and the composition comprising the same. The benzofuran derivatives of the present invention showed potent inhibiting activity of beta-amyloid aggregation and cell cytotoxicity resulting in stimulating the proliferation of neuronal cells as well as recovering activity of memory learning injury caused by neuronal cell injury using transformed animal model with beta-amyloid precursor gene, therefore the compounds can be useful in treating or preventing cognitive function disorder.08-05-2010
20100285641MASK ROM DEVICE, SEMICONDUCTOR DEVICE INCLUDING THE MASK ROM DEVICE, AND METHODS OF FABRICATING MASK ROM DEVICE AND SEMICONDUCTOR DEVICE - A mask read-only memory (ROM) device, which can stably output data, includes an on-cell and an off-cell. The on-cell includes an on-cell gate structure on a substrate and an on-cell junction structure within the substrate. The off-cell includes an off-cell gate structure on the substrate and an off-cell junction structure within the substrate. The on-cell gate structure includes an on-cell gate insulating film, an on-cell gate electrode and an on-cell gate spacer. The on-cell junction structure includes first and second on-cell ion implantation regions of a first polarity and third and fourth on-cell ion implantation regions of a second polarity. The off-cell gate structure includes an off-cell gate insulating film, an off-cell gate electrode and an off-cell gate spacer. The off-cell junction structure includes first and second off-cell ion implantation regions of the first polarity and a third off-cell ion implantation region of the second polarity.11-11-2010
20110055623SOLID STATE STORAGE SYSTEM WITH IMPROVED DATA MERGING EFFICIENCY AND CONTROL METHOD THEREOF - The presented solid state storage system provides an efficient manner of processing read and write operations in a memory block that has a faulty page of memory within it. The solid state storage system includes a flash memory area and a memory controller. The memory controller stores link information into a buffer, allocates a first temporary physical block to resume operations of the bad block past the first bad page, updates and stores mapping information associated with the remaining portions of the bad block past the first bad page, and merges together those valid pages from among the bad block into a final physical block by merging together all prior successfully operated valid pages from among the bad block with any subsequently successfully operated valid pages which are associated with successful operations subsequently to the failure in the first bad page of the bad block.03-03-2011
20110107016SOLID STATE STORAGE SYSTEMS AND METHODS FOR FLEXIBLY CONTROLLING WEAR LEVELING - Solid-state storage systems and methods are provided for controlling a wear leveling process for uniform use of the memory cells that replaces worn memory blocks with less frequently used memory blocks. The wear leveling process is performed by changing the physical locations of the storage cells within each memory zone or plane. Reference values of target memory block erase counts and worn memory block erase counts are used for searching target memory blocks to be used as replacements.05-05-2011
20120245165NOVEL BENZOFURAN TYPE DERIVATIVES, A COMPOSITION COMPRISING THE SAME FOR TREATING OR PREVENTING COGNITIVE DYSFUNCTION AND THE USE THEREOF - The present invention relates to the novel benzofuran derivatives, the preparation thereof and the composition comprising the same. The benzofuran derivatives of the present invention showed potent inhibiting activity of beta-amyloid aggregation and cell cytotoxicity resulting in stimulating the proliferation of neuronal cells as well as recovering activity of memory learning injury caused by neuronal cell injury using transformed animal model with beta-amyloid precursor gene, therefore the compounds can be useful in treating or preventing cognitive function disorder.09-27-2012
20120245225NOVEL BENZOFURAN TYPE DERIVATIVES, A COMPOSITION COMPRISING THE SAME FOR TREATING OR PREVENTING COGNITIVE DYSFUNCTION AND THE USE THEREOF - The present invention relates to the novel benzofuran derivatives, the preparation thereof and the composition comprising the same. The benzofuran derivatives of the present invention showed potent inhibiting activity of beta-amyloid aggregation and cell cytotoxicity resulting in stimulating the proliferation of neuronal cells as well as recovering activity of memory learning injury caused by neuronal cell injury using transformed animal model with beta-amyloid precursor gene, therefore the compounds can be useful in treating or preventing cognitive function disorder.09-27-2012
20120259006NOVEL BENZOFURAN TYPE DERIVATIVES, A COMPOSITION COMPRISING THE SAME FOR TREATING OR PREVENTING COGNITIVE DYSFUNCTION AND THE USE THEREOF - The present invention relates to the novel benzofuran derivatives, the preparation thereof and the composition comprising the same. The benzofuran derivatives of the present invention showed potent inhibiting activity of beta-amyloid aggregation and cell cytotoxicity resulting in stimulating the proliferation of neuronal cells as well as recovering activity of memory learning injury caused by neuronal cell injury using transformed animal model with beta-amyloid precursor gene, therefore the compounds can be useful in treating or preventing cognitive function disorder.10-11-2012

Patent applications by Young Ho Kim, Gyeonggi-Do KR

Young Ho Kim, Changwon City KR

Patent application numberDescriptionPublished
20090172913DUST SEPARATION APPARATUS OF VACCUM CLEANER - A distribution unit for a dust separating apparatus of a vacuum cleaner is provided. The distribution unit distributes air and dust to the dust separation unit includes a body having an inlet for introducing the air and dust to the body, a plurality of branch passages for distributing the air introduced into the body to the dust separation unit, and a main passage for connecting the inlet with the branch passages, and wherein a passage cross-sectional area of the main passage at the branch passage is greater than a passage cross-sectional area of the inlet.07-09-2009
20090293224VACUUM CLEANER AND DUST SEPARATING APPARATUS THEREOF - A dust separating apparatus for a vacuum cleaner is provided. The dust separating apparatus includes a cyclone configured to provide a plurality of cyclone airflows therein and a dust container provided separate from the cyclone. The cyclone includes a first air inlet configured to receive an airflow containing dust and a dust outlet configured to discharge dust separated by the plurality of cyclone airflows. The dust outlet is located in a central portion of the cyclone. The dust container is removably placeable into communication with the dust outlet to collect dust separated in the cyclone. A vacuum cleaner including the dust separating apparatus is also provided.12-03-2009
20100263161VACUUM CLEANER - A dust separating device for a vacuum cleaner is provided. The dust separating device includes a dust separating unit including a first main body movably connected to a second main body. The second main body includes a plurality of sub bodies coupled together. A vacuum cleaner is also provided. The vacuum cleaner includes a main vacuum cleaner body and a dust separating device including a dust separating unit and a filter unit. The dust separating device is detachably mounted to the main body and includes a plurality of main bodies.10-21-2010

Young-Ho Kim, Hwaseong-Si KR

Patent application numberDescriptionPublished
20090065845Embedded semiconductor device and method of manufacturing an embedded semiconductor device - Provided are an embedded semiconductor device and a method of manufacturing an embedded semiconductor device. In a method of manufacturing the embedded semiconductor device, layers of at least one cell gate stack may be formed in a cell area of a substrate. A logic gate structure may be formed in a logic area of the substrate. First source/drain regions may be formed adjacent to the logic gate structure, and metal silicide patterns may be formed on the logic gate structure and the first source/drain regions. At least one hard mask may be formed on the layers of the at least one cell gate stack, and a blocking pattern may be formed to cover the logic gate structure and the first source/drain regions. The at least one cell gate stack may be formed in the cell area by etching the layers of the at least one cell gate stack using the at least one hard mask as an etching mask. A memory transistor in the cell area may have an increased integration degree and a logic transistor in the logic area may have an increased response speed and a decreased resistance.03-12-2009
20090246938SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of forming a semiconductor device includes forming a first chip region, a second chip region, and a scribe lane region between the first and second chip regions in a wafer, the wafer having a first surface and a second surface facing the first surface, and forming a penetrating extension hole and a scribe connector in the scribe lane region, the penetrating extension hole penetrating the wafer from the first surface to the second surface and extending along the scribe lane region, wherein the scribe connector connects the first and second chip regions spaced apart from each other by the penetrating extension hole.10-01-2009
20100059888Mask ROM and method of fabricating the same - A mask read-only memory (ROM) includes a dielectric layer formed on a substrate and a plurality of first conductive lines formed on the dielectric layer. A plurality of diodes are formed in the first conductive lines, and a plurality of final vias are formed for a first set of the diodes each representing a first type of memory cell, with no final via being formed for a second set of diodes each representing a second type of memory cell. Each of a plurality of second conductive lines is formed over a column of the diodes.03-11-2010
20100167487MASK ROM DEVICES AND METHODS FOR FORMING THE SAME - A mask read only memory (MROM) device includes first and second gate electrodes formed at on-cell and off-cell regions of a substrate, respectively. A first impurity region is formed at the on-cell region of the substrate so as to be adjacent the first gate electrode. A second impurity region including the same conductivity type as that of the first impurity region is formed at the off-cell region of the substrate so as to be spaced apart from a sidewall of the second gate electrode. A fourth impurity region is formed at the off-cell region to extend from the second impurity region and to overlap with the sidewall of the second gate electrode. The fourth impurity region has a conductivity type opposite to that of the second impurity region and a depth greater than that of the second impurity region.07-01-2010
20100320574SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A method of forming a semiconductor device includes forming a first chip region, a second chip region, and a scribe lane region between the first and second chip regions in a wafer, the wafer having a first surface and a second surface facing the first surface, and forming a penetrating extension hole and a scribe connector in the scribe lane region, the penetrating extension hole penetrating the wafer from the first surface to the second surface and extending along the scribe lane region, wherein the scribe connector connects the first and second chip regions spaced apart from each other by the penetrating extension hole.12-23-2010

Patent applications by Young-Ho Kim, Hwaseong-Si KR

Young-Ho Kim, Changwon-Si KR

Patent application numberDescriptionPublished
20110209303VACUUM CLEANER - A vacuum cleaner is provided. The vacuum cleaner includes a cleaner body including a suction motor, a dust separation device communicated with the cleaner body, the dust separation device separating dusts, a dust container separably mounted on the cleaner body, the dust container including a dust storage part storing the dusts separated by the dust separation device, a compressing member compressing the dusts stored in the dust storage part, a magnetic member seat part disposed at the dust container, a magnetic member seated on the magnetic member seat part, a cover coupled to the magnetic member seat part to cover the magnetic member, and a magnetism detection unit disposed at the cleaner body to detect magnetism of the magnetic member.09-01-2011

Young-Ho Kim, Paju-Si KR

Patent application numberDescriptionPublished
20100157159Method and apparatus for processing video data of liquid crystal display device - A video processing method and apparatus for a liquid crystal display (LCD) device is disclosed. The video processing method for the LCD device includes detecting noise by comparing data of a previous frame with data of a current frame, if the noise is detected, removing the noise from the current frame data, and outputting the resultant current frame data having no noise together with the previous frame data, and comparing the previous frame data with the resultant current frame data having no noise in a lookup table, selecting overdriving data corresponding to the comparison result, and outputting the selected overdriving data.06-24-2010
20100164852LIQUID CRYSTAL DISPLAY DEVICE - Disclosed herein is a liquid crystal display device in which an image can be correctly seen even though a screen is rotated. The liquid crystal display device includes a storage unit for storing a plurality of screen change signals, and a timing controller for dividing image data of one horizontal line externally supplied thereto into k odd sub-image data and k even sub-image data, and sequentially outputting the k odd sub-image data and sequentially outputting the k even sub-image data.07-01-2010
20110141153LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF DRIVING THE SAME - A liquid crystal display device includes: a liquid crystal panel that displays images using a plurality of pixels each including red, green and blue sub-pixels; a gate driving portion that supplies a gate signal to the liquid crystal panel; a data driving portion that supplies a data signal to the liquid crystal panel; and a timing control portion that compares difference of gray level between image signals corresponding to the red, green and blue sub-pixels with a first threshold value and compares difference of gray level between the image signals corresponding to the red, green and blue sub-pixels of neighboring pixels of the plurality of pixels in order to judge type of the image signals, and drives the data driving portion in different methods according to the type of the image signals.06-16-2011
20120146966Driving Circuit for Liquid Crystal Display Device and Method for Driving the Same - A driving circuit for a liquid crystal display device includes a liquid crystal panel comprising a plurality of pixel areas to display an image; a data driver configured to drive data lines of the liquid crystal panel; a gate driver configured to drive gate lines of the liquid crystal panel; and a timing controller configured to generate an internal enable signal in an initial driving where an external power is applied, to control the gate and data drivers, and configured to control the gate and data drivers based on synchronization signals, after controlling the driving of the gate driver to be stopped for one frame period when at least one synchronization signals are input from outside.06-14-2012
20120146967LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF DRIVING THE SAME - The liquid crystal display device includes a display panel for displaying a picture thereon, first to (n)th upper data drive ICs for supplying pixel voltages to one side of each data line in the display panel, first to (n)th bottom data drive ICs for supplying pixel voltages to the other side of each data line, a first timing controller for generating an upper data control signal and for controlling operation of the upper data drive ICs, and a second timing controller for generating a bottom data control signal and for controlling operation of the bottom data drive ICs wherein at least one of the first and second timing controllers analyzes the picture data applied thereto and controls the polarities of the pixel voltages to be forwarded from the upper data drive ICs and the bottom data drive ICs with reference to the result of the analysis.06-14-2012

Patent applications by Young-Ho Kim, Paju-Si KR

Young-Ho Kim, Daejon KR

Patent application numberDescriptionPublished
20090160558RF AMPLIFIER - Provided is a radio frequency (RF) amplifier. The RF amplifier includes an amplification circuit amplifying an RF signal, a bias voltage generation circuit supplying a bias voltage of the amplification circuit, and a first bias resistor connected between the amplification circuit ad the bias voltage generation circuit, and having a predetermined resistance allowing the bias voltage to be affected by the RF signal.06-25-2009
20100141344REFERENCE BIAS GENERATING CIRCUIT - A reference current bias circuit includes a self-bias circuit configured to provide a bias current to an amplifier; a basic bandgap circuit coupled to inputs of the amplifier; a startup circuit configured to support an initial operation of the amplifier; a temperature compensator configured to include a first mirroring unit for mirroring current according to a positive temperature coefficient characteristic from the basic bandgap circuit; and a second mirroring unit for mirroring current according to a negative temperature coefficient characteristic from the basic bandgap circuit, and to provide a reference current by combining the current of the first mirroring unit and the current of the second mirroring unit; and a reference current mirroring unit configured to generate reference current biases based on the reference current from the temperature compensator.06-10-2010

Patent applications by Young-Ho Kim, Daejon KR

Young-Ho Kim, Kyunggi-Do KR

Patent application numberDescriptionPublished
20100028875METHOD FOR DIAGNOSING CANCER BY DETECTING THE METHYLATION OF TRANSITIONAL ZONES - The present invention relates to a method for diagnosing cancer and predicting metastasis or prognosis by measuring the methylation of transitional zones and a primer for detecting the methylation. According to the present invention, a novel transitional zone is understood and a primer for detecting the methylation of the zone is provided, indicating that the present invention contributes to increase accuracy and liability of cancer prediction by measuring the methylation of transitional zones and chromosomal loss at the same time.02-04-2010

Young-Ho Kim, Seongnam-Si KR

Patent application numberDescriptionPublished
20120064463Method of Forming Micropatterns - Provided is a method of forming micropatterns, in which a line-and-space pattern is formed using a positive photoresist, and a spin-on-oxide (SOX) spacer is formed on two sidewalls of the line-and-space pattern and used in etching a lower layer, thereby doubling a pattern density. Accordingly, all operations may be performed in single equipment (lithography equipment) without taking a substrate out, and thus a high throughput is obtained, and concerns about pollution are very low. Moreover, as the line-and-space pattern is formed using a wet method by using a negative tone developer, line-width roughness (LWR) of the micropatterns may be improved compared to when a dry etching method is used.03-15-2012
20120064724Methods of Forming a Pattern of Semiconductor Devices - Methods of forming a pattern of a semiconductor device including performing a double patterning process without using an atomic layer deposition (ALD) oxide film are provided. The methods may include forming a mask pattern on a substrate; forming a chemical attach process (CAP) material layer covering at least a portion of the mask pattern; forming a CAP adhesive layer by adhering at least a portion of the CAP material layer to the mask pattern by using a first baking process and a first development process; forming an interlayer covering at least a portion of the mask pattern and the CAP adhesive layer; and removing the mask pattern and the interlayer while allowing the CAP adhesive layer to remain by using a second baking process and a second development process.03-15-2012