Patent application number | Description | Published |
20090011376 | EXPOSURE SYSTEM AND METHOD FOR MANUFACTURING DEVICE - An exposure system includes an exposure apparatus and a fluid supplying apparatus that supplies fluid to the exposure apparatus via flow channels. The fluid supplying apparatus includes a fluid sending unit, a heat exchanger, a first temperature sensor that measures the temperature of the fluid, a filter that removes unwanted substances in the fluid, and a heater disposed downstream of the filter in the fluid supplying apparatus for adjusting the temperature of the fluid. The exposure apparatus includes a second temperature sensor that measures the temperature of the fluid supplied from the fluid supplying apparatus. The heater adjusts the temperature of the fluid on the basis of the information on the temperature measured by the second temperature sensor. | 01-08-2009 |
20090090498 | TEMPERATURE REGULATING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - A temperature regulating apparatus includes a correcting operation unit configured a) to calculates a heat exchange amount of a heat exchanger, a logarithmic mean temperature difference or an average temperature in the heat exchanger, and a flow rate of a second medium, b) to calculate an overall heat transfer coefficient of the heat exchanger based on the heat exchange amount, the logarithmic mean temperature difference or the average temperature, and the flow rate of the second medium, and c) to correct a gain of a regulating operation unit based on a change in the heat exchange amount with a change in the flow rate of the second medium supplied to the heat exchanger. | 04-09-2009 |
20090218088 | REGULATING DEVICE, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD - The present invention is a regulating device configured to regulate a temperature T | 09-03-2009 |
20100004796 | TEMPERATURE REGULATING APPARATUS, EXPOSURE SYSTEM, AND DEVICE MANUFACTURING METHOD - A temperature regulating apparatus which regulates temperature includes a heater, a temperature detector configured to detect temperature, a calculator configured to calculate a manipulated value based on an error between a target temperature and the temperature detected by the temperature detector, and a power controller configured to supply power, having one of a voltage and current controlled in accordance with the manipulated value, to the heater. The calculator includes a first calculator having at least a proportional element of the proportional element, an integral element, and a derivative element, and a second calculator configured to calculate a square root. The first calculator and the second calculator are coupled in series with each other. | 01-07-2010 |
20120147382 | MEASUREMENT APPARATUS - A measurement apparatus obtains a reference signal from reference light modulated at a first frequency and a measurement signal from measurement light reflected by a target object modulated at a second frequency along with movement of the target object in addition to the modulation at the first frequency, and processes the reference signal and the measurement signal to measure a position of the target object. Synchronized detection units multiply the measurement signal by a signal synchronized with the reference signal and output signals having the second frequency and harmonic components. Decimation filters filter, at a decimation frequency, the signals output from the synchronized detection units to attenuate the harmonic components. | 06-14-2012 |
20120320381 | MEASUREMENT APPARATUS AND MEASUREMENT METHOD - A measurement apparatus obtains a reference signal from light modulated by a first frequency, obtains a measurement signal from light modulated by the first frequency and a second frequency, and measures a position of a target object by calculating a phase difference between the reference signal and the measurement signal. The apparatus includes: a demodulation unit which demodulates the measurement signal by the first frequency; a decimation filter which removes harmonic components from the signal generated by the demodulation unit; a detection unit which detects periodic error components included in the signal output from the decimation filter; a removing unit which removes the periodic error components from the signal output from the decimation filter; and a calculation unit which calculates the position of the target object based on the signal output from the removing unit. | 12-20-2012 |
20140036250 | MEASURING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD - The measuring apparatus of the present invention is a measuring apparatus that measures a position of an object based on a first phase signal and a second phase signal which are different in phase from each other. The measuring apparatus includes a generator configured to generate a difference signal indicating a difference between a delay time of the first phase signal and a delay time of the second phase signal based on a variation amount of a phase difference between the first phase signal and the second phase signal, which corresponds to a frequency of at least one of the first phase signal and the second phase signal, and the frequency; and a regulator configured to regulate a sampling timing for at least one of the first phase signal and the second phase signal based on the difference signal. | 02-06-2014 |
20140036251 | MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - A measurement apparatus is configured to measure a position of an object based on a first phase signal and a second phase signal whose phases are different from each other and includes a compensator configured to compensate for a fluctuation in a phase difference between the first phase signal and the second phase signal based on a frequency of at least one of the first phase signal and the second phase signal. | 02-06-2014 |
20140166865 | ABSOLUTE ENCODER - The present invention provides an absolute encoder including a scale on which a first mark and a second mark are arrayed, a detector configured to detect light from the scale, and to output periodic signals in which peak values, including a first peak value corresponding to the first mark and a second peak value corresponding to the second mark and smaller than the first peak value periodically appear, and a processor configured to obtain a code sequence by binarization of the first peak value and the second peak value in the periodic signals output from the detector, wherein the processor has a function of performing calibration so that the first peak value becomes larger than a threshold for the binarization and the second peak value becomes smaller than the threshold. | 06-19-2014 |
20140244196 | MEASURING APPARATUS - Provided is a measuring apparatus that measures a position or a displacement of a target object by calculating a phase difference between a reference signal and a measuring signal. The measuring apparatus includes a demodulation unit configured to demodulate the measuring signal by the first frequency to thereby generate a demodulated signal including the component of the second frequency, a cyclic error component, and a harmonic component occurred due to demodulation; a decimation filter configured to remove the harmonic component from the demodulated signal to thereby output a signal including the component of the second frequency and the cyclic error component; and a measuring signal correcting unit configured to detect and remove the cyclic error component included in the output signal from the decimation filter. | 08-28-2014 |
20140299754 | ENCODER AND METHOD OF OUTPUTTING MEASUREMENT VALUE OF POSITION OR ANGLE - An encoder for outputting a measurement value of a position or angle of a scale in accordance with a command signal transmitted with a cycle, includes: a detector configured to perform detection of a signal from the scale and output a detection signal; and a processor configured to perform generation of data representing a position or angle of the scale based on the detection signal, perform correction of the data based on a change amount of the position or angle along with movement of the scale in a delay time till receiving of a subsequent command signal after the detection, and perform outputting of the corrected data. The processor is configured to perform processing including the generation and correction in accordance with receiving of the command signal, and perform a plurality of the processing in parallel. | 10-09-2014 |
20140367561 | MEASURING APPARATUS, MEASURING METHOD, AND PROCESSING APPARATUS - A measuring apparatus for performing detection of a signal varying with displacement of an object and measurement of the displacement, includes a clock generator configured to generate, in synchronization with a request signal for requesting measurement data, a first clock signal having a cycle shorter than a cycle of the request signal; a detector configured to perform the detection with respect to each cycle of the first clock signal; an operation device configured to obtain the measurement data based on an output of the detector; and a correction device configured to obtain a displacement amount of the object per unit time based on a plurality of the measurement data, and correct the measurement data based on the obtained displacement amount and a time difference between the first clock signal relating to the measurement data and the first clock signal relating to the request signal. | 12-18-2014 |