Patent application number | Description | Published |
20100287768 | MEHTOD OF MANUFACTURING ELECTROSTATIC CHUCK MECHANISM - There is provided a method of manufacturing an electrostatic chuck which is free from fluctuations in performance or incomplete detachment from the beginning of use, without being influenced by the impurities that remain on the surface of, or in the inside of, a dielectric layer at the time of manufacturing thereof, in case the dielectric layer which comes into contact with an article to be held by the electrostatic chuck is made of silicone rubber or resin. Before assembling the dielectric layer into the surface of a base having disposed thereon an electrode, or after the dielectric layer has been assembled into the surface of the base, a step is performed in which a heating plate that has been heated to a predetermined temperature is pressed against the contact surface of the dielectric layer. | 11-18-2010 |
20110049921 | ROBOT HAND FOR SUBSTRATE TRANSFER - There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape. | 03-03-2011 |
20110125331 | OPERATION MONITORING SYSTEM FOR PROCESSING APPARATUS - In a processing apparatus having: moveable parts disposed to form a predetermined processing environment within a processing chamber in which a predetermined processing is performed on an object to be processed; and a control means for controlling the operation of each of the moveable parts, abnormality inclusive of deterioration with time of the moveable parts constituting the processing apparatus is made to be easily judged. There is provided a vibration detection means for detecting the waveforms of vibrations that occur accompanied by the operation of the moveable parts. When control is made from the control means in order to operate any one of the moveable parts, there are obtained event data corresponding to the control and the waveforms of vibrations of all the moveable parts that are operating simultaneously at the time in question. Each time the control corresponding to the event data is selected, or when a waveform of vibration corresponding to another event data of the same kind as that of the above-mentioned event data has been obtained, the change in the waveform is monitored. When the waveform has changed beyond a predetermined range, the processing apparatus is judged to be abnormal. | 05-26-2011 |
20110130858 | METHOD OF CONTROLLING TRANSFER ROBOT - A method of controlling a transfer robot is provided, in which method the communication time of the transfer robot can be reduced and the transfer time of a substrate can be shortened. A series of actions of the transfer robot when a substrate that is present in a processing chamber is transferred to a predetermined position in a processing chamber, are performed by a single command. The series of actions may include a swap action in which, after having taken out by a robot hand the substrate that is present in the processing chamber, a substrate that is different from the substrate is handed over by a robot hand to a predetermined position on the processing chamber. | 06-02-2011 |
20110229299 | METHOD OF DETECTING STOP OF TRANSPORT APPARATUS - There is provided a method of detecting a stop of a transport means in which the stop of the transport means after operation can be quickly and easily detected and in which the throughput and the ratio of utilization can be improved without incurring an increase in the number of parts. An apparatus is used which is provided with a drive motor and a transport arm one side of which is mounted on a rotary shaft of the drive motor. As the drive motor there is used one in which an induced electromotive force is generated when a force in the direction of rotation is applied to the rotary shaft. Then, an article S to be transported is held on the other side of the transport arm. When the above-described drive motor is operated to drive the rotary shaft by a predetermined angle of rotation and then stopped, the above-described induced electromotive force to be generated due to the vibrations of the transport arm is detected. When the detected induced electromotive force becomes smaller than a predetermined value, a judgment is made that the transport arm has stopped. | 09-22-2011 |
20120111833 | SUBSTRATE PROCESSING METHOD - There is provided a substrate processing method, in which a throughput can be improved even in case the time for recovery processing for restoring the state of a processing chamber is longer than the time for predetermined processing to be performed in the processing chamber. Substrates are alternately transferred to two processing chambers C, D, and the same film forming processing is performed on the substrates in the processing chambers C, D in parallel with each other. When the number of substrates processed in the processing chamber C has reached a predetermined number (11 substrates), dummy sputtering processing in the film forming chamber C is started and also 23rd-25th substrates of the first lot are transferred to the film forming chamber D to thereby perform film forming processing until the dummy sputtering processing is finished. | 05-10-2012 |
20130004284 | TRANSPORT METHOD - By a transport robot having a hand provided with stationary clamp members and a movable clamp member which pinches a to-be-transported object S between the movable clamp member and the stationary clamp members, after transporting the to-be-transported object-S in a horizontal posture to a transport destination, the hand is lowered in a state in which the movable clamp member is receded to an unclamped position, thereby transferring the to-be-transported object onto a plurality of supporting pins which are disposed at the transport destination. In the method mentioned above, an arrangement is made that, even if the stationary clamp members give rise to dents due to wear, the to-be-transported object is arranged to be transferred onto the supporting pins without problems. | 01-03-2013 |
Patent application number | Description | Published |
20100211210 | Position correcting apparatus, vacuum processing equipment and position correcting method - A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle α to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance. | 08-19-2010 |
20110013338 | Electrostatic chuck device - The object of this invention is to provide an electrostatic chuck device which can properly and promptly diselectrify a substrate to be processed. In an electrostatic chuck device attracting a substrate to be processed on the surface of a susceptor electrically, a diselectrifying circuit is provided which includes diselectrifying electrode means facing the surface of the susceptor, a diselectrifying potential, and a diselectrifying resistance connected between the diselectrifying electrode means and the diselectrifying potential. The resistance value of the diselectrifying resistance is established such that it is lower than that of an insulating layer of the surface of the susceptor and the diselectrifying resistance can hold the potential of the substrate during an electrostatic chuck operation, such that the diselectrifying resistance can dissipate the potential of the substrate into the ground potential when the electrostatic chuck is canceled. This structure can thus appropriately and promptly diselectrify the substrate. | 01-20-2011 |
20110014015 | SUBSTRATE TRANSFER ROBOT AND VACUUM PROCESSING APPARATUS PROVIDED WITH SAME - Provided is a substrate transfer robot which can surely eliminate adhesion, shifting, dropping and the like of a substrate at the time of transferring the substrate. A vacuum processing apparatus provided with such substrate transfer robot is also provided. The substrate transfer robot is provided with a substrate receiving section for placing the substrate; a plurality of substrate slip preventing members, which are arranged on the upper surface of the substrate receiving section at intervals and are composed of an elastic material; and a extendable/retractable arm section whereupon the substrate receiving section is arranged at the leading end. On the upper end surface of the substrate slip preventing member, a protruding section is arranged. The vacuum processing apparatus is configured as a multi-chamber vacuum processing apparatus provided with the substrate transfer robot. | 01-20-2011 |
20120103793 | VACUUM FILM-FORMING APPARATUS AND POSITION DETECTION METHOD FOR SHUTTER PLATE OF VACUUM FILM-FORMING APPARATUS - At the time of detecting a position of a shutter plate, a laser light, for instance, is radiated from a detector (an optical sensor). The radiated laser light reaches the shutter plate through a window of a chamber. Then, the laser light is reflected by the surface of the shutter plate and re-enters the detector. The detector detects the time required from the emission of the laser light to the entry of the reflected light. | 05-03-2012 |
20120116586 | TEACHING APPARATUS OF ROBOT AND TEACHING METHOD OF ROBOT - A teaching method of a robot which supports a transported matter with a hand and transports the transported matter between two or more reception spots, includes: a jig disposing process of disposing a positioning jig at the reception spot so as to have the same center axis as the transported matter when the transported matter is placed at the reception spot; and a teaching process of moving the hand to a position at which an abutting portion of the hand abuts the positioning jig at each of the reception spots and teaching the position of the hand to a controller. | 05-10-2012 |
20130092528 | FILM-FORMING DEVICE AND FILM-FORMING METHOD - A film-forming device is provided, including: a chamber in which a substrate is disposed; a target, disposed within the chamber, which contains a material from which a film is formed; a substrate-supporting table disposed inside the chamber; driving unit that rotates the substrate-supporting table; a sputtering cathode that causes sputtered particles to be incident on the substrate from an oblique direction; and a control unit that controls the driving unit by setting a rotation period so that a sputtering film formation time required to form a film having a desired thickness is an integer multiple of a rotation period of the substrate-supporting table. | 04-18-2013 |
20130343840 | TRANSPORT APPARATUS AND VACUUM SYSTEM - A transport apparatus that supports and moves a substrate by using a robot hand between a plurality of chambers includes a first detection unit that detects the substrate, in a first stop position of the robot hand, using a first detection position set on one surface of the substrate supported by the robot hand, and a second detection unit that detects the substrate, in a second stop position of the robot hand, using a second detection position set on the one surface of the substrate supported by the robot hand. | 12-26-2013 |