Patent application number | Description | Published |
20090200523 | YTTRIUM OXIDE MATERIAL, MEMBER FOR USE IN SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR PRODUCING YTTRIUM OXIDE MATERIAL - A substrate of an electrostatic chuck, which is a member for use in a semiconductor manufacturing apparatus, is formed of an yttrium oxide material that contains yttrium oxide (Y | 08-13-2009 |
20090233087 | YTTRIUM OXIDE MATERIAL, MEMBER FOR SEMICONDUCTOR-MANUFACTURING APPARATUS, AND METHOD FOR PRODUCING YTTRIUM OXIDE MATERIAL - An electrostatic chuck that is a member for a semiconductor-manufacturing apparatus contains an yttrium oxide material containing first inorganic particles and second inorganic particles. The first inorganic particles form solid solutions in yttrium oxide, can be precipitated from yttrium oxide, and are present in grains of yttrium oxide. The second inorganic particles can form solid solutions in the first inorganic particles, are unlikely to form any solid solution in yttrium oxide, and are present at boundaries between the yttrium oxide grains. The first inorganic particles contain at least one of ZrO | 09-17-2009 |
20100056358 | ALUMINUM OXIDE SINTERED PRODUCT AND METHOD FOR PRODUCING THE SAME - An aluminum oxide sintered product including a layer phase containing a rare-earth element and fluorine among grains of aluminum oxide serving as a main component, or a phase containing a rare-earth element and fluorine along edges of grains of aluminum oxide serving as a main component. The product includes a phase containing a rare-earth element and a fluorine element among grains of aluminum oxide, the phase not being in the form of localized dots but in the form of line segments, when viewed in an SEM image. The product can be readily adjusted to have a volume resistivity in the range of 1×10 | 03-04-2010 |
20100104892 | ALUMINUM-NITRIDE-BASED COMPOSITE MATERIAL, METHOD FOR MANUFACTURING THE SAME, AND MEMBER FOR A SEMICONDUCTOR MANUFACTURING APPARATUS - The aluminum-nitride-based composite material according to the present invention is an aluminum-nitride-based composite material that is highly pure with the content ratios of transition metals, alkali metals, and boron, respectively as low as 1000 ppm or lower, has AlN and MgO constitutional phases, and additionally contains at least one selected from the group consisting of a rare earth metal oxide, a rare earth metal-aluminum complex oxide, an alkali earth metal-aluminum complex oxide, a rare earth metal oxyfluoride, calcium oxide, and calcium fluoride, wherein the heat conductivity is in the range of 40 to 150 W/mK, the thermal expansion coefficient is in the range of 7.3 to 8.4 ppm/° C., and the volume resistivity is 1×10 | 04-29-2010 |
20110117360 | SINTERED CERAMIC BODY, MANUFACTURING METHOD THEREOF, AND CERAMIC STRUCTURE - A manufacturing method of a sintered ceramic body mixes barium silicate with aluminum oxide, a glass material, and an additive oxide to prepare a material mixture, molds the material mixture and fires the molded object. The barium silicate is monoclinic and has an average particle diameter in a range of 0.3 μm to 1 μm and a specific surface area in a range of 5 m | 05-19-2011 |
20120186723 | Ti3SiC2 BASED MATERIAL, ELECTRODE, SPARK PLUG AND MANUFACTURING METHOD THEREOF - The present invention provides a Ti | 07-26-2012 |
20130255207 | HONEYCOMB STRUCTURE AND MANUFACTURING METHOD OF THE SAME - There is disclosed a honeycomb structure which has an excellent collecting performance of a particulate matter and in which a pressure loss during flowing of a fluid through the honeycomb structure is low. The honeycomb structure includes a honeycomb base material having porous partition walls with which a plurality of cells are formed to become through channels of a fluid, a value of a ratio of an average open frontal area diameter of pores which are open in the surfaces of the partition walls to an average pore diameter of the pores formed in the partition walls is from 0.05 to 0.45, the partition walls have a single layer structure, and preferably, an open frontal area diameter of each of the pores which are open in the surfaces of the partition walls is from 0.5 to 10 μm. | 10-03-2013 |
20130255213 | POROUS MATERIAL, MANUFACTURING METHOD OF THE SAME, AND HONEYCOMB STRUCTURE - There are disclosed a porous material having excellent heat resisting properties and an excellent resistance to heat shock. A porous material contains aggregates and an amorphous binding agent to bind the aggregates to one another in a state where pores are formed among the aggregates, the binding agent contains a rare earth element, the amorphous binding agent preferably contains magnesium, aluminum, silicon, the rare earth element and oxygen, and the amorphous binding agent preferably contains 8.0 to 15.0 mass % of MgO, 30.0 to 60.0 mass % of Al | 10-03-2013 |
20130316129 | SILICON CARBIDE MATERIAL, HONEYCOMB STRUCTURE, AND ELECTRIC HEATING TYPE CATALYST CARRIER - A silicon carbide material according to the present invention includes a substrate containing, as a main component, silicon carbide or containing, as main components, silicon carbide and metallic silicon, and a film covering at least a portion of the surface of the substrate. The film contains, as a main component, a phase including at least four elements: lithium (Li), aluminum (Al), silicon (Si), and oxygen (O). One example of such a silicon carbide material includes a substrate having a structure in which silicon carbide particles are bonded by metallic silicon, and a lithium aluminosilicate film covering at least a portion of the surface of the silicon carbide particles. Such a silicon carbide material can be used for a DPF, an electric heating type catalytic converter, or the like. | 11-28-2013 |
20140011667 | SILICON CARBIDE POROUS BODY, HONEYCOMB STRUCTURE, AND ELECTRIC HEATING TYPE CATALYST CARRIER - A silicon carbide porous body according to the present invention contains silicon carbide particles, metallic silicon, and an oxide phase, in which the silicon carbide particles are bonded together via at least one of the metallic silicon and the oxide phase. The primary component of the oxide phase is cordierite, and the open porosity is 10% to 40%. Preferably, the silicon carbide porous body contains 50% to 80% by weight of silicon carbide, 15% to 40% by weight of metallic silicon, and 1% to 25% by weight of cordierite. Preferably, the volume resistivity is 1 to 80 Ωcm, and the thermal conductivity is 30 to 70 W/m·K. | 01-09-2014 |
20140021662 | SINTERED CERAMIC BODY, MANUFACTURING METHOD THEREOF, AND CERAMIC STRUCTURE - A manufacturing method of a sintered ceramic body mixes barium silicate with aluminum oxide, a glass material, and an additive oxide to prepare a material mixture, molds the material mixture and fires the molded object. The barium silicate is monoclinic and has an average particle diameter in a range of 0.3 μm to 1 μm and a specific surface area in a range of 5 m | 01-23-2014 |
20140290195 | POROUS MATERIAL, HONEYCOMB STRUCTURE, AND METHOD OF MANUFACTURING POROUS MATERIAL - There is disclosed a porous material which has an improved thermal shock resistance. The porous material contains aggregates and a composite binder. The composite binder includes glass as a binder and mullite particles as reinforcing particles, and the mullite particles are dispersed in the glass. The aggregates are connected to each other by the composite binder in a state where pores are formed in the porous material. Preferably, a lower limit of a percentage of a content of the composite binder to a total mass of the aggregates and composite binder is 12 mass %, and an upper limit of the percentage of the content of the composite binder to the total mass of the aggregates and composite binder is 50 mass %. Preferably, the glass contains MgO, Al | 10-02-2014 |
20140296055 | HONEYCOMB STRUCTURE AND MANUFACTURING METHOD THEREOF - To provide a honeycomb structure capable of using as a catalyst carrier, which functions as a heater, and where a bonding layer is hard to break and an electrical resistance value is hard to rise; including a honeycomb segment bonded body where honeycomb segments are bonded by bonding layer, and a pair of electrode members disposed on a side surface of the bonded body, the electrode members is formed into a band shape, and in a cross section perpendicular to the cell extending direction, one electrode member is disposed on an opposite side across the center of the bonded body to another electrode member, and in at least a part of the bonding layer, inorganic fibers made of β-SiC and a metal silicide are included in a porous body where silicon carbide are bound with silicon in a state where pores are held among the particles. | 10-02-2014 |
20140370232 | POROUS MATERIAL, HONEYCOMB STRUCTURE, AND PRODUCTION METHOD FOR POROUS MATERIAL - There is disclosed a porous material containing aggregates; and a composite binding material which binds the aggregates to one another in a state where pores are formed and in which mullite particles that are reinforcing particles are dispersed in cordierite that is a binding material, and a content of metal silicon is smaller than 15 mass %. Preferably, to a total mass of the aggregates, the composite binding material and the metal silicon, a lower limit value of a content of the composite binding material is 12 mass %, and an upper limit value of the content of the composite binding material is 50 mass %. Preferably, to the total mass, a lower limit value of a content of the mullite particles is 0.5 mass %, and an upper limit value of the content of the mullite particles is 15 mass %. A porous material having a high thermal shock resistance is provided. | 12-18-2014 |
20140370233 | POROUS MATERIAL AND HONEYCOMB STRUCTURE - There are disclosed a porous material having a high thermal shock resistance and a honeycomb structure. The porous material contains main aggregates and auxiliary aggregates as aggregates, the main aggregates are silicon carbide particles, the auxiliary aggregates are at least either of mullite particles or alumina particles, the aggregates are bound to one another via a binding phase, so as to form pores, and the binding phase is at least one of an amorphous phase and a cordierite phase, and a porosity is from 40 to 90%. Furthermore, the honeycomb structure is constituted of such a porous material, and includes partition walls defining and forming a plurality of cells extending from one end face to the other end face. | 12-18-2014 |
20140378297 | SILICON CARBIDE POROUS MATERIAL, HONEYCOMB STRUCTURE AND ELECTRIC HEATING-TYPE CATALYST CARRIER - There is disclosed a silicon carbide porous material having a high thermal shock resistance. The silicon carbide porous material of the present invention includes silicon carbide particles, metal silicon and an oxide phase, and the silicon carbide particles are bonded to one another via at least one of the metal silicon and the oxide phase. Furthermore, the oxide phase includes a parent phase, and a dispersion phase dispersed in the parent phase and having a higher thermal expansion coefficient than the parent phase. Here, a lower limit value of a content ratio of the dispersion phase in the oxide phase is preferably 1 mass %, and upper limit value of the content ratio of the dispersion phase in the oxide phase is 40 mass %. Furthermore, it is preferable that the parent phase is cordierite and that the dispersion phase is mullite. | 12-25-2014 |