Patent application number | Description | Published |
20100327025 | LIQUID DISCHARGING APPARATUS - A liquid discharging apparatus in which a liquid is flowed in one direction in a circulation flow path at the time of non-discharge, and the flow path is refilled with liquid from both directions at the time of discharge. The liquid discharging apparatus includes a pressure adjustment unit that satisfies a condition “Pu>Pd, Pn>−Pd”, where Pu denotes a fluid pressure at a predetermined position on the upstream side of a discharge port, Pd denotes a fluid pressure at a predetermined position on the downstream side thereof, and Pn denotes a pressure equivalent to a capillary force of the discharge port for absorbing the liquid from the flow path into the discharge port immediately after the liquid has been discharged therefrom. | 12-30-2010 |
20120170010 | EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE - An exposure apparatus which projects a pattern of an original onto a substrate via a liquid to expose the substrate, includes a substrate stage which holds the substrate and moves, the substrate stage including a peripheral member arranged to surround a region in which the substrate is arranged, the peripheral member having a holding surface which holds the liquid, wherein a trench which traps the liquid is formed in the peripheral member, and the trench is arranged to surround the region in which the substrate is arranged, and includes a bottom portion, an inner-side surface extending from the holding surface toward the bottom portion, and an outer-side surface, the inner-side surface having a slant which increases stepwise or continuously in a direction away from the holding surface, and the outer-side surface is provided with a spattering preventing portion which prevents spattering of the liquid trapped by the trench. | 07-05-2012 |
20120199997 | IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD - An imprint apparatus of the present invention that molds and cures an imprint material on a substrate using a mold to form a pattern on the substrate. The imprint apparatus includes a supply unit configured to supply a gas into a gap between the imprint material on the substrate and the mold. The supply unit is configured to supply a mixed gas in which a permeable gas, which permeates at least one of the mold, the imprint material and the substrate, and a condensable gas, which is liquefied under a pressure generated by the molding, is mixed with each other. | 08-09-2012 |
20130045448 | POSITIONING APPARATUS, EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE - A positioning apparatus for a moving object includes: a driving unit including a stator and a movable element connected to the moving object via a connecting member; a chassis which includes an opening which allows movement of the connecting member upon driving of the movable element, and an exhaust outlet which includes end exhaust outlets arranged at first and second ends of the driving range of the movable element; an exhaust unit which exhausts a gas in the chassis; and a controller which controls the exhaust unit so that an amount of exhaust from the end exhaust outlet arranged at the first end becomes larger when the movable element is driven toward the first end on a side of the first end of the driving range than when the movable element is positioned at the center of the driving range. | 02-21-2013 |
20130106963 | INKJET HEAD UNIT AND INKJET APPARATUS | 05-02-2013 |
20140145370 | IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD - An imprint apparatus of the present invention that molds and cures an imprint material on a substrate using a mold to form a pattern on the substrate. The imprint apparatus includes a supply unit configured to supply a gas into a gap between the imprint material on the substrate and the mold. The supply unit is configured to supply a mixed gas in which a permeable gas, which permeates at least one of the mold, the imprint material and the substrate, and a condensable gas, which is liquefied under a pressure generated by the molding, is mixed with each other. | 05-29-2014 |
20150060397 | METHOD OF MANUFACTURING AN EJECTION ORIFICE MEMBER - A method of manufacturing an ejection orifice member includes: preparing a substrate including a first layer, a second layer, and a third layer, the first layer protruding in a first direction crossing a principal surface of the substrate, the second and third layers being formed on the first direction side of the first layer, the preparing a substrate including forming the second layer to follow a contour of a first direction side surface of the first layer, and then forming the third layer on a surface of the second layer which protrudes on the first direction side; performing plating using the second layer as a seed to form a fourth layer on the first direction side of the second layer; removing the third layer from the fourth layer to form a hole as the ejection orifice in the fourth layer; and thinning the fourth layer at least around the hole. | 03-05-2015 |
20150062211 | INK JET APPARATUS AND METHOD FOR CONTROLLING INK JET APPARATUS - An ink jet apparatus includes a plurality of actuators discharge a liquid from a discharge port according to a driving signal input to an input terminal; a driving selector that outputs a drive switch control signal; a plurality of drive switches connect or disconnect the input terminal of the actuator and a driving signal source according to the drive switch control signal for the actuator, and allow the driving signal to pass therethrough and input the driving signal to the input terminal when the input terminal and the driving signal source are connected; a detection circuit that detects a voltage of the input terminal when being connected to the input terminal; and a plurality of detection switches connect or disconnect the input terminal of the actuator and the detection circuit, on the basis of the drive switch control signal or the driving signal passed through the drive switch. | 03-05-2015 |