Patent application number | Description | Published |
20080231930 | OSCILLATOR DEVICE, METHOD OF DRIVING THE SAME, OPTICAL DEFLECTOR AND IMAGE DISPLAY DEVICE USING THE SAME - An oscillator device includes a first oscillator, a second oscillator configured to support the first oscillator for torsional rotation about a first rotational axis, through a first torsion spring, a supporting member configured to support the second oscillator for torsional rotation about a second rotational axis, through a second torsion spring, the second rotational axis having a predetermined angle with respect to the first rotational axis of the first oscillator, a coil disposed in relation to the second oscillator, an electric current applying member configured to apply an electric current to the coil, and a magnetic field generating member configured to apply a magnetic field to the coil, wherein the coil is localized in at least one of zones of the second oscillator being quartered by extension lines of the first and second rotational axes. | 09-25-2008 |
20100283354 | CAPACITIVE ELECTRO-MECHANICAL TRANSDUCER, AND FABRICATION METHOD OF THE SAME - A capacitive electro-mechanical transducer includes a plurality of cavities, a communicating portion for connecting the cavities to each other, and two electrodes sandwiching each of the cavities. The cavities are sealed from outside, and at least a portion of the communicating portion is closed to interrupt the communication between the cavities through the communicating portion. | 11-11-2010 |
20110073968 | ELEMENT ARRAY, ELECTROMECHANICAL CONVERSION DEVICE, AND PROCESS FOR PRODUCING THE SAME - An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode being separated for each of the elements by grooves, an insulating connection substrate being bonded to the first electrode, and a wiring being made from each of the respective first electrodes separated for each of the elements through the connection substrate to the side opposite to the first electrodes. | 03-31-2011 |
20110084570 | PROCESS FOR PRODUCING CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE, AND CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE - A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity. | 04-14-2011 |
20130256817 | ELEMENT ARRAY, ELECTROMECHANICAL CONVERSION DEVICE, AND PROCESS FOR PRODUCING THE SAME - An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes. | 10-03-2013 |
20130302934 | METHOD OF MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER - Provided is a method of manufacturing a capacitive electromechanical transducer using fusion bonding, which is capable of reducing fluctuations in initial deformation among diaphragms caused at positions having different boundary conditions such as the bonding area, thereby enhancing the uniformity of the transducer and stabilizing the sensitivity and the like. The method of manufacturing a capacitive electromechanical transducer includes: forming an insulating layer on a first silicon substrate and forming at least one recess; fusion bonding a second silicon substrate onto the insulating layer; and thinning the second silicon substrate and forming a silicon film. The method further includes, before the bonding of the second silicon substrate onto the insulating layer, forming a groove in the insulating layer at the periphery of the at least one recess. | 11-14-2013 |
20130313663 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER - Provided is a capacitive electromechanical transducer manufactured by fusion bonding, which is capable of enhancing the performance by reducing fluctuations in initial deformation among diaphragms caused at positions having difference boundary conditions such as the bonding area. The capacitive electromechanical transducer includes a device, the device including at least one cellular structure including: a silicon substrate; a diaphragm; and a diaphragm supporting portion configured to support the diaphragm so that a gap is formed between one surface of the silicon substrate and the diaphragm. The device has, in its periphery, a groove formed in a layer shared with the diaphragm supporting portion. | 11-28-2013 |
20130321039 | DRIVE UNIT FOR MEASURING DEVICE AND DRIVE METHOD THEREFOR - A measuring device comprises a plurality of variable capacitors as sensor elements. The plurality of variable capacitors are provided with a drive circuit for each pair. The first electrodes of the two variable capacitors in each pair are electrically connected to each other. The drive circuit for each pair includes a bias supply for applying two AC bias voltages relatively 90° out of phase to the second electrodes respectively of the two variable capacitors to produce an output signal at the first electrodes connected to each other, a multiplier for multiplying the output signal by two AC signals relatively 90° out of phase to produce two multiplication signals, and an integrator for integrating the two multiplication signals for each cycle of the corresponding AC bias voltages to acquire two integration signals for the two variable capacitors. | 12-05-2013 |