Patent application number | Description | Published |
20120107583 | BLOCK COPOLYMER SELF-ASSEMBLY METHODS AND PATTERNS FORMED THEREBY - Patterned substrates templates are provided, as well as methods comprising a combination of lithography and self-assembly techniques. The patterned substrates may comprise first and second patterns. | 05-03-2012 |
20120135159 | SYSTEM AND METHOD FOR IMPRINT-GUIDED BLOCK COPOLYMER NANO-PATTERNING - This disclosure describes a method for nano-patterning by incorporating one or more block copolymers and one or more nano-imprinting steps in the fabrication process. The block copolymers may be comprised of organic or organic components, and may be lamellar, spherical or cylindrical. As a result, a patterned medium may be formed having one-dimensional or two-dimensional patterns with a feature pitch of 5-100 nm and/or a bit density of at least 1 Tdpsi. | 05-31-2012 |
20120164389 | IMPRINT TEMPLATE FABRICATION AND REPAIR BASED ON DIRECTED BLOCK COPOLYMER ASSEMBLY - Imprinted apparatuses, such as Bit-Patterned Media (BPM) templates, Discrete Track Recording (DTR) templates, semiconductors, and photonic devices are disclosed. Methods of fabricating imprinted apparatuses using a combination of patterning and block copolymer (BCP) self-assembly techniques are also disclosed. | 06-28-2012 |
20120196089 | CHEMICALLY-MODIFIED PILLAR SURFACE TO GUIDE CYLINDER-FORMING P(S-b-MMA) BLOCK COPOLYMER ASSEMBLY - A method of self-assembling density multiplied block copolymers (BCP) structures includes applying a block copolymer (BCP) to a feature-imprinted resist layer. The BCP is thermally annealed to laterally segregate the BCP into self-assembled columns of a first polymer block surrounded by a second polymer block. | 08-02-2012 |
20130186856 | METHOD OF FABRICATING SERVO INTEGRATED TEMPLATE - The embodiments disclose a method of fabricating servo integrated templates including depositing a protective layer on servo zone resist layer patterns, patterning integrated data zone features into a substrate, depositing a protective layer on data zones and removing the servo zone protective layer and patterning integrated servo zone features into the substrate and removing the data zone protective layer creating a substrate template used in fabricating data and servo zone integrated patterned stacks. | 07-25-2013 |
20140099478 | BLOCK COPOLYMER ASSEMBLY - The embodiments disclose a block copolymer assembly structure, including a first pattern and second pattern with a first density of patterned features integrated in data and servo zones, a silicon substrate with thin film layers deposited thereon and patterned using the first density of first pattern and second pattern features and a template fabrication pattern with a second density greater than the first density created using ordered block copolymer periodic structures across a portion of the substrate. | 04-10-2014 |
20140265025 | METHOD OF SHEARED GUIDING PATTERNS - The embodiments disclose a method including depositing a resist layer using a mixture of several different length polymer strings materials spanning a range of natural periodicity, and imprinting the mixture of several different length polymer strings using sheared guiding patterns to increase flexibility. | 09-18-2014 |
20150118625 | BLOCK COPOLYMER SELF-ASSEMBLY FOR PATTERN DENSITY MULTIPLICATION AND RECTIFICATION - Provided herein is a method, including a) transferring an initial pattern of an initial template to a substrate; b) performing block copolymer self-assembly over the substrate with a density multiplication factor k; c) creating a subsequent pattern in a subsequent template with the density multiplication factor k; and d) repeating steps a)-c) with the subsequent template as the initial template until a design specification for the subsequent pattern with respect to pattern density and pattern resolution is met. | 04-30-2015 |