Patent application number | Description | Published |
20110285979 | PROJECTION OBJECTIVE WITH DIAPHRAGMS - A projection objective for imaging an object arranged in an object plane of the projection objective into an image of the object lying in an image plane of the projection objective has a multiplicity of transparent optical elements and holding devices for holding the optical elements at prescribable positions along an imaging beam path of the projection objective. Each of the optical elements has an optical useful region lying in the imaging beam path and an edge region lying outside the optical useful region. At least one holding element of the holding device assigned to the optical element acts at the edge region in the region of a contact zone. At least one of the optical elements is assigned a diaphragm arrangement with a false light diaphragm arranged directly upstream of the optical element and a second false light diaphragm arranged directly downstream of the optical element. Each of the false light diaphragms is fashioned in such a way that the false light diaphragm screens at least a part of the edge region against radiation running outside the imaging beam path. | 11-24-2011 |
20140071418 | IMAGING OPTICAL UNIT - An imaging optical unit serves for imaging an object field into an image field. An imaging beam path (AS) between the object field and the image field is subdivided into a plurality of partial imaging beam paths (TAS). The imaging optical unit is embodied such that the partial imaging beam paths (TAS) run between the object field and the image field in a manner completely separated from one another and guided by optical components (M1 to M6) of the imaging optical unit, that is to say that nowhere in the beam path between the object field and the image field do the partial imaging beam paths (TAS) impinge on identical regions of beam-guiding surfaces of the imaging optical unit. This results in an imaging optical unit in which a resolution capability, particularly in the production of micro- or nanostructured semiconductor components, is increased. | 03-13-2014 |
20150198437 | PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY COMPRISING AN OPTICAL DISTANCE MEASUREMENT SYSTEM - A projection exposure apparatus ( | 07-16-2015 |
20150316854 | PROJECTION EXPOSURE APPARATUS INCLUDING MECHANISM TO REDUCE INFLUENCE OF PRESSURE FLUCTUATIONS - The invention relates to a projection exposure apparatus for semiconductor lithography, comprising an illumination system for illuminating a mask arranged on a movable mask stage, and comprising a projection lens for imaging the mask onto a semiconductor substrate, wherein at least one means is present for at least partly decoupling at least parts of the illumination system and/or of the projection lens from the influence of pressure fluctuations in the medium surrounding the projection lens or the illuminated system, the pressure fluctuations being attributed to movements of the mask stage during the operation of the apparatus. | 11-05-2015 |
20160004174 | MICROLITHOGRAPHIC APPARATUS AND METHOD OF VARYING A LIGHT IRRADIANCE DISTRIBUTION - A microlithographic apparatus comprises an objective that comprises a transmission filter that is configured to variably modify a light irradiance distribution in a projection light path. The transmission filter comprises a plurality of gas outlet apertures that are configured to emit gas flows that pass through a space through which projection light propagates during operation of the microlithographic apparatus. The transmission filter further comprises a control unit which is configured to vary a number density of ozone molecules in the gas flows individually for each gas flow. In this manner it is possible to finally adjust the transmittance distribution of the transmission filter. | 01-07-2016 |
Patent application number | Description | Published |
20100097618 | Microscopy system, microscopy method, and a method of treating an aneurysm - A microscopy system and method allow observing a fluorescent substance accumulated in a tissue. The tissue can be observed at a same time both with visible light and with fluorescent light. It is possible to observe a series of previously recorded fluorescent light images in superposition with the visible light images. An end of the series of images may be automatically determined. A thermal protective filter may be inserted into a beam path of an illuminating system at such automatically determined end of the series. Further, the fluorescent light image may be analyzed for identifying a coherent fluorescent portion thereof. A representation of a periphery line of the coherent portion may be generated, and depths profile data may be obtained only from the coherent portion. An illuminating light beam for exciting the fluorescence may be modulated for improving a contrast of fluorescent images. | 04-22-2010 |
20120194663 | Microscopy System, Microscopy Method and a Method of Treating an Aneurysm - A microscopy system and method allow observing a fluorescent substance accumulated in a tissue. The tissue can be observed at a same time both with visible light and with fluorescent light. It is possible to observe a series of previously recorded fluorescent light images in superposition with the visible light images. An end of the series of images may be automatically determined. A thermal protective filter may be inserted into a beam path of an illuminating system at such automatically determined end of the series. Further, the fluorescent light image may be analyzed for identifying a coherent fluorescent portion thereof. A representation of a periphery line of the coherent portion may be generated, and depths profile data may be obtained only from the coherent portion. An illuminating light beam for exciting the fluorescence may be modulated for improving a contrast of fluorescent images. | 08-02-2012 |
20120249771 | MICROSCOPY SYSTEM, MICROSCOPY METHOD AND METHOD OF TREATING AN ANEURYSM - A microscopy system and a microscopy method are provided for observing a fluorescent substance accumulated in a tissue. The microscopy system comprises a filter allowing to observe the tissue at a same time both with visible light and with fluorescent light. It is possible to observe a series of previously recorded fluorescent light images in superposition with the visible light images. An end of the series of images may be automatically determined. A thermal protective filter may be inserted into a beam path of an illuminating system at such automatically determined end of the series. | 10-04-2012 |