Patent application number | Description | Published |
20120160419 | SUBSTRATE-SUPPORTING UNIT AND SUBSTRATE-PROCESSING APPARATUS COMPRISING SAME - A substrate-supporting unit includes: a mounting board on which a substrate is disposed; and a heater installed in the mounting board to heat the substrate disposed on the mounting board, wherein the mounting board includes: a non-contact surface which faces a center portion of the substrate and is spaced apart from the center portion of the substrate; and a contact member which extends outward from the non-contact surface and is arranged along an edge portion of the substrate disposed on the mounting board to support the edge portion of the substrate. | 06-28-2012 |
20130171827 | METHOD AND APPARATUS FOR MANUFACTURING THREE-DIMENSIONAL-STRUCTURE MEMORY DEVICE - A method for manufacturing a memory device having a vertical structure according to one embodiment of the present invention comprises: a step for alternatingly laminating one or more insulation layers and one or more sacrificial layers on a substrate; a step for forming a penetration hole for penetrating the insulation layer and the sacrificial layer; a step for forming a pattern for filling up the penetration hole; a step for forming an opening for penetrating the insulation layer and the sacrificial layer; and a step for removing the sacrificial layer by supplying an etchant through the opening, wherein the step for laminating the insulation layer includes a step for depositing a first silicon oxide film by supplying to the substrate at least one gas selected from the group consisting of SiH | 07-04-2013 |
20130178066 | METHOD AND APPARATUS FOR MANUFACTURING THREE-DIMENSIONAL-STRUCTURE MEMORY DEVICE - Provided is a method of manufacturing a memory device having a 3-dimensional structure, which includes alternately stacking one or more dielectric layers and one or more sacrificial layers on a substrate, forming a through hole passing through the dielectric layers and the sacrificial layers, forming a pattern filling the through hole, forming an opening passing through the dielectric layers and the sacrificial layers, and supplying an etchant through the opening to remove the sacrificial layers. The stacking of the dielectric layers includes supplying the substrate with one or more gases selected from the group consisting of SiH | 07-11-2013 |
20140261186 | METHOD AND APPARATUS FOR MANUFACTURING THREE-DIMENSIONAL-STRUCTURE MEMORY DEVICE - Provided is a method of manufacturing a memory device having a 3-dimensional structure, which includes alternately stacking one or more dielectric layers and one or more sacrificial layers on a substrate, forming a through hole passing through the dielectric layers and the sacrificial layers, forming a pattern filling the through hole, forming an opening passing through the dielectric layers and the sacrificial layers, and supplying an etchant through the opening to remove the sacrificial layers. The stacking of the dielectric layers includes supplying the substrate with one or more gases selected from the group consisting of SiH | 09-18-2014 |
Patent application number | Description | Published |
20110170233 | Chip-type electric double layer capacitor cell and method of manufacturing the same - There is provided a chip-type electric double layer capacitor cell and a method of manufacturing the same. The chip-type electric double layer capacitor cell includes a separator folded to include first and second folded portions with first and second open portions formed in opposite directions by the first and second folded portions, and first and second electrodes inserted into the first and second open portions. The positions of the first and second electrodes are fixed by the first and second folded portions of the separator, and accordingly, the appropriate arrangement of the plurality of first and second electrodes is facilitated. A short circuit between the first and second electrodes is avoided to thereby increase the capacitance of the chip-type electric double layer capacitor cell. | 07-14-2011 |
20110170234 | Electric double layer capacitor - There is provided an electric double layer capacitor including: a multilayer electric double layer capacitor cell including first and second electrodes facing each other with an ion-permeable separator interposed therebetween; and an insulating tape with which to enclose an outer surface of the multilayer electric double layer capacitor cell and having a plurality of pores. In the electric double layer capacitor, movements between the first and second electrodes and the ion-permeable separator are minimized so that the area of the facing surfaces of the first and second electrodes increases. Accordingly, high capacitance may be achieved. In addition, the pores formed in the insulating tape facilitate the path of an electrolyte so that the impregnation of the electrolyte into the multilayer electric double layer capacitor cell is thereby facilitated. | 07-14-2011 |
20110188169 | Electric double layer capacitor cell, electric double layer capacitor package having the same, and methods of manufacturing the same - There are provided an electric double layer capacitor cell, an electric double layer capacitor package having the same, and methods of manufacturing the same. An electric double layer capacitor cell according to an aspect of the invention may include: a plurality of electric double layer capacitor unit cells stacked upon each other, wherein each of the plurality of electric double layer capacitor unit cells includes first and second current collectors having first and second lead terminal portions, respectively, first and second electrodes provided on the first and second current collectors, respectively, and a separator provided between the first and second electrodes, and the first and second electrode lead terminal portions each are combined into one to provide first and second bonding portions being connected to external terminals provided to apply electricity to the electric double layer capacitor unit cells. | 08-04-2011 |
20110197408 | Methods of manufacturing electric double layer capacitor cell and electric double layer capacitor and apparatus for manufacturing electric double layer capacitor cell - There are provided methods of manufacturing an electric double layer capacitor cell and an electric double layer capacitor and an apparatus for manufacturing an electric double layer capacitor cell. The method of manufacturing the electric double layer capacitor cell includes preparing first and second electrode sheets by printing electrode material onto conductive sheets, respectively, with the exception of regions to be provided as first and second terminal lead-out portions in the conductive sheets; punching the first and second electrode sheets so as to form a plurality of first and second unit electrodes, respectively, each first unit electrode having the first terminal lead-out portion and each second unit electrode having the second terminal lead-out portion; stacking the first and second electrode sheets with a separator interposed therebetween in order that the plurality of first and second unit electrodes are overlapped; and cutting the first and second electrode sheets being stacked into the first and second unit electrodes. | 08-18-2011 |
20120210549 | METHODS OF MANUFACTURING ELECTRIC DOUBLE LAYER CAPACITOR CELL AND ELECTRIC DOUBLE LAYER CAPACITOR - A method of manufacturing the electric double layer capacitor cell includes preparing first and second electrode sheets by printing electrode material onto conductive sheets, respectively, with the exception of regions to be provided as first and second terminal lead-out portions in the conductive sheets; punching the first and second electrode sheets so as to form a plurality of first and second unit electrodes, respectively, each first unit electrode having the first terminal lead-out portion and each second unit electrode having the second terminal lead-out portion; stacking the first and second electrode sheets with a separator interposed therebetween in order that the plurality of first and second unit electrodes are overlapped; and cutting the first and second electrode sheets being stacked into the first and second unit electrodes. | 08-23-2012 |
20140155757 | PORTABLE EXOSCOPE IMAGING DEVICE FOR THE HUMAN BODY - The present invention relates to a portable CCD camera imaging device for the human body, comprising: a handle-shaped main body ( | 06-05-2014 |