Wakamizu
Shinya Wakamizu, Koshi-Shi JP
Patent application number | Description | Published |
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20090079948 | DEVELOPING METHOD AND DEVELOPING APPARATUS - A developing method is used for subjecting a light-exposed resist film disposed on a wafer W to a developing process by a developing solution and a rinsing process by a rinsing liquid. In a state where the resist film on the wafer W is wet with the developing solution or rinsing liquid before a drying process is performed on the wafer W, a chemical liquid (curing chemical liquid), which contains a resist curing aid contributory to curing of a resist film remaining on the wafer W, is supplied onto a surface of the wafer W. Then, ultraviolet rays are radiated onto a surface of the wafer to cure a resist film remaining on the wafer W by a synergistic effect of the resist curing aid and the ultraviolet rays thus radiated, so as to prevent pattern fall. | 03-26-2009 |
20110229120 | RINSING METHOD AND DEVELOPING METHOD - A rinsing method for performing a rinsing process on a substrate, after a developing process is performed on a light-exposed pattern disposed thereon, includes a step (STEP | 09-22-2011 |
Shinya Wakamizu, Kumamoto JP
Patent application number | Description | Published |
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20080274433 | Rinse Treatment Method and Development Process Method - A rinsing method for performing a rinsing process on a substrate, after a developing process is performed on a light-exposed pattern disposed thereon, includes a step (STEP | 11-06-2008 |
Yoh Wakamizu, Yokohama-Shi JP
Patent application number | Description | Published |
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20080198486 | Driving apparatus, lens barrel and camera - A driving apparatus of the present invention comprises: a lead screw which rotationally drives; and a follower section to hold a driven member L and to rectilinearly move based on rotation of the lead screw. The follower section comprises a first tooth and a second tooth that faced a side portion of the lead screw and are opposite to each other and a third tooth provided in a position different from those of the first tooth and the second tooth. When the follower section rectilinearly moves based on the rotation of the lead screw, power is transferred with the lead screw and the first tooth being engaged with each other, and the lead screw is in a non-contact state with the second tooth and the third tooth. | 08-21-2008 |
20110181967 | LENS BARREL AND OPTICAL INSTRUMENT - The present invention provides a miniaturized lens barrel and optical instrument. The lens barrel ( | 07-28-2011 |