Patent application number | Description | Published |
20080220270 | Fabricating Tall Micro Structures - A micro structure includes a seed electrode layer on a substrate and a plurality of conductive layers on the seed electrode layer. The combined thickness of the seed electrode layer and the plurality of conductive layers can be more than 0.1 mm and the lateral dimensions of the seed electrode layer and the plurality of conductive layers vary less than 20% along the direction normal to a surface of the substrate and the micro structure has striations on an outer surface. | 09-11-2008 |
20090252186 | COHERENT LIGHT DISPLAY SYSTEM - A display system includes a coherent light source that can emit a coherent light beam, an optical component that can direct the coherent light beam to a spatial light modulator, a transport mechanism that can move the optical component to produce a movement in the coherent light beam, and a spatial light modulator having a two-dimensional array of mirrors each configured to selectively reflect the coherent light beam either toward a screen surface or away from the screen surface to form a display pixel on the screen surface. A display image is formed on the display screen by display pixels produced by the mirrors that reflect the coherent light beam toward the screen surface. | 10-08-2009 |
20090289349 | HERMETIC SEALING OF MICRO DEVICES - An encapsulated device includes a micro device on a substrate, a micro chamber that encapsulates the micro device on the substrate; and a layer of hermetic-sealing material that provides at least some degree of hermeticity on one or more outer surfaces of the micro chamber to at least partially hermetically seal the micro device in the micro chamber. | 11-26-2009 |
20090296182 | MICRO MIRRORS HAVING A MIRROR PLATE WITH INTERDIGITATED ARMS - A micro mirror device includes a first hinge supported by a substrate, a mirror plate tiltable around the first hinge and having a first set of arms facing the substrate, and a second set of arms on the substrate. The first set of arms and the second set of arms can be interdigitated when the mirror plate is tilted. The micro mirror device includes a first lateral guard on the substrate (or the mirror plate). The first lateral guard can limit movement of the mirror plate to a position in a first direction substantially parallel to an upper surface of the substrate to prevent the first set of arms from contacting the second set of arms when the arms are in the interdigitated position. | 12-03-2009 |
20100033799 | PACKAGING AND TESTING OF MULTIPLE MEMS DEVICES ON A WAFER - A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers. | 02-11-2010 |
20100067088 | REDUCING SPECKLE PATTERN IN DISPLAY IMAGES - A display system includes a coherent light source that can emit a coherent light beam, a de-speckling device configured to distort a wavefront of the coherent light beam to produce a distorted coherent light beam, and a two-dimensional array of light modulators that can selectively modulate the distorted coherent light beam to select a plurality of pixels for display. | 03-18-2010 |
20100291410 | Corrosion Protection and Lubrication of MEMS Devices - Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid. | 11-18-2010 |
20100311192 | PACKAGING AND TESTING OF MULTIPLE MEMS DEVICES ON A WAFER - A wafer containing a plurality of electro-optical devices, each device being enclosed in chamber that has a translucent cover. An X-Y matrix of pairs of interconnections on the wafer are connected to the circuitry of the electro-optical devices for addressing the electro-optical devices. The pairs of interconnections extend outside of the chambers enclosing the devices to testing areas on the periphery of the wafer. Testing is done by signals applied through the interconnections while simultaneously exposing the devices to light through the translucent covers. | 12-09-2010 |
20120134006 | METHOD FOR REDUCING SPECKLE PATTERN IN DISPLAY IMAGES - A display system includes a coherent light source that can emit a coherent light beam, a de-speckling device configured to distort a wavefront of the coherent light beam to produce a distorted coherent light beam, and a two-dimensional array of light modulators that can selectively modulate the distorted coherent light beam to select a plurality of pixels for display. | 05-31-2012 |
20120170088 | MEMS Spatial Light Modulator Driver Calibration Systems - We describe a method of compensating for long-term mechanical property changes in an analogue optical MEMS SLM. In embodiments the SLM comprises multiple piston-type actuation optical phase modulating pixels each having a mirror with a variable height determined by an analogue voltage applied to a corresponding pixel electrode. The method comprises performing initial calibrations of the analogue displacement and pixel capacitance versus analogue voltage to determine a relationship between the pixel capacitance and analogue displacement, and then updating the displacement-voltage capacitance using the initial calibration data and a later calibration of the analogue voltage-capacitance characteristic of a pixel. | 07-05-2012 |
20120170102 | Spatial Light Modulators and Fabrication Techniques - We describe a phase modulating spatial light modulator (SLM). The SLM comprises a substrate bearing multiple SLM pixels, each of the SLM pixels comprising a MEMS (micro electromechanical system) optical phase modulating structure. The MEMS optical phase modulating structure comprises: a pixel electrode; a spring support structure around a perimeter of the pixel electrode; and a mirror spring supported by the spring support structure. The mirror spring comprises a mirror support and a plurality of mirror spring arms each extending between the mirror support and the spring support structure, and a mirror mounted on the mirror support. Each mirror spring arm has a spiral or serpentine shape. A voltage applied to the pixel electrode flexes the mirror spring and causes the mirror to translate perpendicularly to the substrate substantially without tilting. | 07-05-2012 |
20120170103 | Spatial Light Modulators and Fabrication Techniques - We describe a method of fabricating an optical MEMS spatial light modulator (SLM). The method comprises providing an optical MEMS SLM wafer bearing multiple optical MEMS SLM devices and spin coating a glass wafer with an organic adhesive, in some preferred embodiments benzocyclobutene. The adhesive is patterned, preferably by uv lithography, to define multiple ring-shaped bond lines each sized to fit around one of the SLM devices, and the glass wafer is then bonded to the MEMS SLM wafer, preferably at a temperature of between 100° C. and 450° C., such that each of the ring-shaped bond lines encompasses a respective SLM device. A portion of the glass wafer adjacent an SLM device is then removed to reveal electrical connectors to the device and the devices are tested before dicing and packaging, to enable selective packaging of working devices. | 07-05-2012 |
20150011850 | MULTIPLEXED PATHLENGTH RESOLVED NONINVASIVE ANALYZER APPARATUS WITH DYNAMIC OPTICAL PATHS AND METHOD OF USE THEREOF - A noninvasive analyzer apparatus and method of use thereof is described comprising a near-infrared source, a detector, and a photon transport system configured to direct photons from the source to the detector via an analyzer-sample optical interface. The photon transport system includes a dynamically position light directing unit used to, within a measurement time period for a single analyte concentration determination, change any of: radius, energy, intensity, position, incident angle, solid angle, and/or depth of penetration of a beam of photons entering skin of a subject. | 01-08-2015 |
20150041656 | MULTIPLEXED NONINVASIVE ANALYZER APPARATUS AND METHOD OF USE THEREOF - A noninvasive analyzer apparatus and method of use thereof is described using a plurality of time resolved sample illumination zones coupled to at least one two-dimensional detector array monitoring a plurality of detection zones. Control of illumination times and/or patterns along with selected detection zones yields pathlength resolved groups of spectra. Sectioned pixels and/or zones of the detector are optionally filtered for different light throughput as a function of wavelength. The pathlength resolved groups of spectra are subsequently analyzed to determine an analyte property. Optionally, in the mapping and/or collection phase, incident light is controllably varied in time in terms of any of: sample probe position, incident light solid angle, incident light angle, depth of focus, energy, intensity, and/or detection angle. Optionally, one or more physiological property and/or model property related to a physiological property is used in the analyte property determination. | 02-12-2015 |
20150045636 | MULTIPLEXED / PATHLENGTH RESOLVED NONINVASIVE ANALYZER APPARATUS AND METHOD OF USE THEREOF - A noninvasive analyzer apparatus and method of use thereof is described using a plurality of time resolved sample illumination zones coupled to at least one two-dimensional detector array monitoring a plurality of detection zones. Control of illumination times and/or patterns along with selected detection zones yields pathlength resolved groups of spectra. Sectioned pixels and/or zones of the detector are optionally filtered for different light throughput as a function of wavelength. The pathlength resolved groups of spectra are subsequently analyzed to determine an analyte property. Optionally, in the mapping and/or collection phase, incident light is controllably varied in time in terms of any of: sample probe position, incident light solid angle, incident light angle, depth of focus, energy, intensity, and/or detection angle. Optionally, one or more physiological property and/or model property related to a physiological property is used in the analyte property determination. | 02-12-2015 |
20150085134 | Infrared Imager Readout Electronics - Readout integrated circuits placed below the suspended sensor elements detect changes of electrical resistance of sensor elements and digitize the signals with digital to analog convertor for each element. Readout electronics provides low parasitics, high signal to noise ratio, high data rate, high dynamic range and instantaneous global readout. | 03-26-2015 |