Patent application number | Description | Published |
20090035151 | VACUUM PUMP SELF-DIAGNOSIS METHOD, VACUUM PUMP SELF-DIAGNOSIS SYSTEM, AND VACUUM PUMP CENTRAL MONITORING SYSTEM - There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages. A self-diagnosis unit is provided for calculating an integrated value or an average value of a current of a motor for rotating said rotor, and making self-diagnosis of the vacuum pump when the integrated value or average value exceeds a predetermined alarm set value. The self-diagnosis unit switches from one self-diagnosis calculation method to another or interrupts the self-diagnosis calculation based on a pressure value detected by said pressure sensor. | 02-05-2009 |
20130171919 | EXHAUST SYSTEM - An exhaust system ( | 07-04-2013 |
20130272904 | CANNED MOTOR AND VACUUM PUMP - Provided is a canned motor to be coupled to a vacuum pump and used as a rotary driving source for the vacuum pump. The canned motor includes: a stator core; a rotor provided on an inner side of the stator core; and a non-conductive can provided between the stator core and the rotor. The non-conductive can is configured to separate the stator core and the rotor from each other. The non-conductive can is made of resin, ceramic, or composite material thereof. The non-conductive can is bonded to the stator core with an adhesive. | 10-17-2013 |
20140050605 | SEALING STRUCTURE, VACUUM PUMP MOTOR INCLUDING SAME SEALING STRUCTURE, AND VACUUM PUMP - To provide a sealing structure for a vacuum pump motor which maintains the sealing properties of the vacuum pump motor in an ensured fashion, there is provided a sealing structure for a vacuum pump motor | 02-20-2014 |
20140056733 | VACUUM PUMP MOTOR AND VACUUM PUMP INCLUDING SAME - In order to provide a vacuum pump motor which is free from rotation imbalance, there is provided a vacuum pump motor | 02-27-2014 |
20140241914 | VACUUM PUMP MOTOR ROTOR, MOTOR INCLUDING SAME AND VACUUM PUMP - In order to provide a motor rotor in which a permanent magnet is prevented from corroding, wherein a motor rotor for use in a motor for driving a pump rotor rotating shaft of a vacuum pump is provided which comprises a rotor core made up of a plurality of steel plates which are laminated in an axial direction and having a through hole, a permanent magnet which is disposed in the through hole, and end plates which are attached individually to axial end portions of the rotor core, wherein an adhesive is applied to a whole surface of each of the plurality of steel plates, and the plurality of steel plates are surface joined to each other and to the end plates via the adhesive. | 08-28-2014 |
20140290919 | VACUUM PUMP WITH ABATEMENT FUNCTION - A vacuum pump has an abatement part for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump includes a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump. | 10-02-2014 |
20140295362 | VACUUM PUMP WITH ABATEMENT FUNCTION - A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member. | 10-02-2014 |
20140348717 | VACUUM PUMP WITH ABATEMENT FUNCTION - A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas. | 11-27-2014 |
20140352820 | VACUUM PUMP WITH ABATEMENT FUNCTION - A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas. | 12-04-2014 |