Patent application number | Description | Published |
20100148284 | MEMS DEVICE HAVING A MOVABLE ELECTRODE - A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode. | 06-17-2010 |
20100244967 | OSCILLATOR - An oscillator includes: a vibrator having a first electrode and a second electrode disposed with a gap with the first electrode; a reference voltage supply circuit adapted to supply a reference voltage; and a voltage adjustment circuit having a step-up circuit operating in response to input of clock pulses and adapted to convert the reference voltage into a voltage of a predetermined level and to output the voltage of the predetermined level, wherein the vibrator is configured so as to apply the voltage of the predetermined level, which is output from the voltage adjustment circuit, between the first electrode and the second electrode, and the clock pulses to be input into the step-up circuit are obtained using the vibrator as a source. | 09-30-2010 |
20110031564 | MEMS DEVICE AND FABRICATION METHOD THEREOF - A micro electro mechanical system (MEMS) device includes: a fixed electrode made of silicon and provided above a semiconductor substrate; a movable electrode made of silicon and arranged in a mechanically movable manner by having a gap from the semiconductor substrate; and a wiring layered part that is provided around the movable electrode, covers a portion of the fixed electrode and includes wiring. One of the fixed electrode and the movable electrode is implanted with an impurity ion and at least a part of the portion of the fixed electrode covered by the wiring layered part is silicidized. | 02-10-2011 |
20110095383 | MEMS DEVICE HAVING A MOVABLE ELECTRODE - A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode. | 04-28-2011 |
20110148537 | MEMS OSCILLATOR AND METHOD OF MANUFACTURING THEREOF - An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different. | 06-23-2011 |
20110254110 | MEMS DEVICE HAVING A MOVABLE ELECTRODE - A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode. | 10-20-2011 |
20120104519 | MEMS DEVICE HAVING A MOVABLE ELECTRODE - A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode. | 05-03-2012 |
20120268218 | VIBRATION CIRCUIT - A vibration circuit includes: a micro electro mechanical systems (MEMS) vibrator which includes a first electrode and a second electrode which are arranged with a gap therebetween; an amplification section which includes a gain section which has a first input terminal and a first output terminal and of which gain is greater than 1, and a gain restriction section which includes a second input terminal and a second output terminal and of which the gain is less than 1; and an output terminal which is connected to the first output terminal, wherein the first electrode is connected to the first input terminal, wherein the first output terminal is connected to the second input terminal, and wherein the second output terminal is connected to the second electrode. | 10-25-2012 |