Patent application number | Description | Published |
20090009892 | Adjustment Arrangement of an Optical Element - A arrangement serves for the adjustment of an optical element ( | 01-08-2009 |
20090015947 | APPARATUS FOR MOUNTING TWO OR MORE ELEMENTS AND METHOD FOR PROCESSING THE SURFACE OF AN OPTICAL ELEMENT - In an apparatus for mounting two or more optical elements that are each held in an individual mount or in a support structure, said optical elements are mounted in a common mount. The relative positioning of the optical elements ( | 01-15-2009 |
20090122288 | DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL ELEMENT - The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount ( | 05-14-2009 |
20090153829 | LITHOGRAPHIC PROJECTION OBJECTIVE - Projection objectives, such as projection objectives of lithography projection exposure apparatuses, as well as related systems, components and methods, such as methods of revising and/or repairing such objectives, are disclosed. | 06-18-2009 |
20090174874 | Optical Projection System - An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis. | 07-09-2009 |
20130044304 | OPTICAL PROJECTION SYSTEM - An optical projection unit comprising a first optical element module and at least one second optical element module is provided. The first optical element module comprises a first housing unit and at least a first optical element, the first optical element being received within the first housing unit and having an optically used first region defining a first optical axis. The at least one second optical element module is located adjacent to the first optical element module and comprises at least one second optical element, the second optical element defining a second optical axis of the optical projection unit. The first housing unit has a central first housing axis and an outer wall extending in a circumferential direction about the first housing axis. The first optical axis is at least one of laterally offset and inclined with respect to the first housing axis. Furthermore, the first housing axis is substantially collinear with the second optical axis. | 02-21-2013 |
20140063628 | DEVICE FOR THE LOW-DEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL ELEMENT - The invention relates to a device for the low-deformation replaceable mounting of an optical element, in particular a closure plate of an objective of a projection exposure system for microlithography for the production of semiconductor components, in a mount. The optical element is connected to the mount at least partly via an adhesive connection. This is located between the adjacent circumferential walls of mount and optical element. The mount is provided with at least three support feet distributed over the circumference, by means of which the optical element is mounted laterally and axially. The mount is connected to the housing of the objective in an at least approximately deformation-decoupled manner via three mount bearing points. | 03-06-2014 |
20140078482 | LITHOGRAPHIC PROJECTION OBJECTIVE - Projection objectives, such as projection objectives of lithography projection exposure apparatuses, as well as related systems, components and methods, such as methods of revising and/or repairing such objectives, are disclosed. | 03-20-2014 |