Patent application number | Description | Published |
20090320754 | INTEGRATED GAS PANEL APPARATUS - Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body ( | 12-31-2009 |
20110126930 | FLUID DEVICE - In a fluid device composed of vertical and horizontal fluid lines, for a purpose of improving a compact size and of assuring ease of assembly, a plurality of vertical fluid lines are arranged in parallel to each other, and in the fluid device where, between the adjoining vertical fluid lines, a plurality of horizontal fluid lines for connecting them are arranged in parallel, one of the horizontal fluid lines connects pipes by using a flange joint to be fastened with a coupling ring, and the other one connects pipes by using joint pipes. | 06-02-2011 |
20110127770 | COUPLING RING - A coupling ring is provided, including a series of unit members with adjacent unit members rotatably coupled to each other, and a fastener coupling unit members on both ends to each other. A concave groove provided to extend circumferentially is externally fitted into an outer circumference of each of two opposing flanges. The unit members on the both ends are coupled to each other by the fastener to be turned into an annular state. The fastener is fastened to thereby press an inclined surface. The flanges are pressure-bonded to each other by forces generated during pressing. A stopper member is provided to restrict a separation angle between the unit member on one end and an adjacent unit member to fall within a certain angle in an open state in which the unit members on the both ends are not coupled to each other provided on at least one of the unit members. | 06-02-2011 |
20110314838 | GAS SUPPLY DEVICE - The present invention relates to a gas supply device having a compact configuration that enables prevention of vaporized gas by requisite minimum heating means from being liquefied again and an installation area to be considerably reduced. The gas supply device is provided with: a tank configured to retain material liquid; and a mass flow controller that is connected to an inside of the tank through a first valve unit, and controls a flow rate of gas resulting from vaporizing the material liquid, in which inside an outer wall of the tank, an internal flow path is formed, and the internal flow path is provided with a generated gas lead-out line provided with: a first valve flow-in flow path connecting the inside of the tank and a first inlet port; and a first valve flow-out flow path connecting a first outlet port and an introduction port of the mass flow controller . | 12-29-2011 |
20120006425 | FLUID SYSTEM - In order to simplify a configuration of a fluid system without increasing the number of parts of an intermediate support body while using a common intermediate support body, the fluid system includes a fluid circuit device configured by connecting a plurality of fluid units for controlling or measuring a state of fluid using pipes and pipe joints and a holding mechanism for holding the fluid circuit device, wherein the holding mechanism includes a base member and the intermediate support body interposed between the fluid circuit device and the base member so as to couple the fluid circuit device and the base member, and wherein one end of the intermediate support body is attached to a respective pipe joint and the other end thereof is attached to the base member so that each of the pipe joints is connected to the base member. | 01-12-2012 |
20120042838 | LIQUID SOURCE VAPORIZER - The present invention is one that is intended to prevent bubbles from being recombined to suppress the bubbles from being enlarged, and also homogenize a temperature distribution of a stored liquid source, and provided with: a liquid source container; a first heater that is provided on a side wall of the liquid source container and intended to heat the stored liquid source to a predetermined temperature; a second heater that is provided in an inside central part of the liquid source container and intended to heat the stored liquid source to the predetermined temperature; a plurality of bubble generators that are immersed into the stored liquid source, provided between the second heater and the side wall, and release carrier gas into the liquid source to perform bubbling; and a gas supply pipe that supplies the carrier gas to the bubble generators. | 02-23-2012 |
20120227848 | INTEGRATED GAS PANEL APPARATUS - Provided is an integrated gas panel apparatus which has excellent responsiveness, stabilizes gas concentration, and furthermore, can keep a conventional panel shape as it is. A panel body comprises at least a main flow channel block body for forming a main flow channel, and a branch flow channel block body for forming a branch flow channel. The branch flow channel block bodies are arranged on the both right and left sides to face each other by having the main flow channel block body at the center. | 09-13-2012 |
20140319705 | VAPOR CONCENTRATION CONTROL SYSTEM, VAPOR CONCENTRATION CONTROL DEVICE AND CONTROL PROGRAM - The present claimed invention includes a first flow channel where a carrier gas or a mixed gas flows, a switch valve that is for flowing the mixed gas or the carrier gas to the first flow channel selectively, a fluid adjusting valve that adjusts a concentration of a gas flowing in the first flow channel, and a control part that conducts a feedback control on an opening degree of the fluid adjusting valve, and is characterized such that the control part initiates the feedback control by the use of an opening degree of the fluid adjusting valve at a time just before the gas flowing in the first flow channel is switched from the mixed gas to the carrier gas as an initial opening degree of the fluid adjusting valve at a time when the gas flowing in the first flow channel is again switched to the mixed gas afterward. | 10-30-2014 |