Patent application number | Description | Published |
20100148456 | STABILIZER CONTROL APPARATUS - A stabilizer control apparatus includes a stabilizer bar including both ends supported by right and left wheels of a vehicle, respectively, and an intermediate portion supported to a vehicle body by first and second supporting members, and a switching device arranged between one of the first and second supporting members and the vehicle body and including a cylinder member, a tubular piston member, a spring member, and an engaging/disengaging mechanism. The switching device switches over the spring member from an extendable/retractable position to a neutral position and vice versa. The engaging/disengaging mechanism allows the piston member to axially move relative to the cylinder member when the spring member is in the extendable/retractable position and prevents the piston member from axially moving relative to the cylinder member when the spring member is retained in the neutral position. | 06-17-2010 |
20120199413 | VEHICULAR REAR WHEEL STEERING DEVICE - A vehicular rear wheel steering device includes a housing, a rod being non-turnable with respect to the housing and movably supported in an axial direction of the rod, and a conversion mechanism arranged between the rod and the housing to convert a rotation of a rotational drive device to a drive force in the axial direction. The housing includes a tubular first bush disposed at a first end and a tubular second bush at a second end. Each bush is slidably engaged to an outer periphery of the rod and supports the rod to be movable in the axial direction. A rod supporting rigidity of the first bush is lower compared to that of the second bush. The first bush is arranged with an elastic body that deforms in a radial direction of the rod. The second bush is arranged with an inner periphery protrusion at which the rod tilts. | 08-09-2012 |
20140353066 | REAR WHEEL STEERING APPARATUS FOR VEHICLE - A rear wheel steering apparatus for a vehicle includes a housing, an electric motor, a planetary gear mechanism, a linear motion mechanism including a nut member and a rod threadedly engaged with the nut member, the housing including a cylindrical body which includes a lock portion provided at an inner surface of the cylindrical body, the housing including a connection cover, a cylindrical holding member holding a ring gear within the cylindrical body in a state where the ring gear is prevented from rotating, and a bearing, wherein the bearing and the cylindrical holding member are disposed and held between the lock portion and the connection cover, and the cylindrical holding member is held to be non-rotatable relative to the cylindrical body. | 12-04-2014 |
20140353067 | REAR WHEEL STEERING APPARATUS FOR VEHICLE - A rear wheel steering apparatus for a vehicle includes a housing including a cylinder portion and a connection cover, an electric motor housed in the housing, a speed reduction mechanism housed in the housing, a linear motion mechanism including a nut member and a rod for converting a rotation of the nut member to a linear motion of the rod, the cylinder portion including a stopper portion provided at an inner surface of thereof between the electric motor and the speed reduction mechanism, a cylindrical holding member holding the speed reduction mechanism in the cylinder portion, and a bearing supporting the nut member for allowing the nut member to rotate relative to the cylindrical holding member. The bearing and the cylindrical holding member are sandwiched between the stopper portion and the connection cover and the cylindrical holding member is retained so as not to rotate relative to the cylinder portion. | 12-04-2014 |
Patent application number | Description | Published |
20120107920 | METHOD OF PRODUCING SUGAR SOLUTION AND SACCHARIFICATION DEVICE - To achieve efficient use of enzyme in obtaining a sugar solution through a reaction of the enzyme and biomass containing cellulose. In obtaining a sugar solution through a reaction of enzyme and biomass containing cellulose, the biomass and the enzyme are caused to react in a first reaction tank, whereby a sugar solution in which the enzyme is dispersed and a residue containing the unreached biomass adsorbing the enzyme are generated, these sugar solution and residue are next separated, a pH adjusting solution is supplied to the residue in a second reaction tank to prepare a dilute solution whose sugar concentration is lower than that of the sugar solution, and in this dilute solution, a sugar solution is generated through a reaction between the residue and the enzyme adsorbed to the residue. | 05-03-2012 |
20120270276 | METHOD FOR PRODUCING SACCHARIDES CONTAINING GLUCOSE AS MAIN COMPONENTS - Provided is a method for producing saccharides containing glucose as the main components which can increase the generated amount of saccharides containing glucose as the main components even when an enzymatic saccharification reaction is performed with a small amount of enzyme. A method for producing saccharides containing glucose as the main components is provided which includes mixing biomass containing cellulose and/or hemicellulose and an aqueous enzyme solution, and then performing an enzymatic saccharification reaction with an enzyme contained in the aqueous enzyme solution while maintaining the state where the mixture of the biomass containing cellulose and/or hemicellulose and the aqueous enzyme solution is allowed to stand still in a reaction vessel. | 10-25-2012 |
20150010959 | METHOD FOR PRODUCING SACCHARIDES CONTAINING GLUCOSE AS MAIN COMPONENT - A method for producing saccharides containing glucose as a main component is described, including degrading cellulose and/or hemicellulose with a cellulase, wherein an additive containing a protein and an amino acid and/or a yeast lysate solution is added to the cellulose and/or hemicellulose and the cellulase is used to cause an enzymatic saccharification reaction of saccharifying the cellulose and/or hemicellulose. | 01-08-2015 |
Patent application number | Description | Published |
20140012515 | CHROMATOGRAPH MASS SPECTROMETRY DATA PROCESSING DEVICE - When an analyst designates an arbitrary component on a component table displayed in a component table display area, an EIC of the characteristic mass in the vicinity of the retention time of the component is created and is displayed in a chromatogram display area. In addition, an actual measurement mass spectrum at the retention time of the designated component and a pure standard mass spectrum of the component are aligned vertically in the same mass axis scale and displayed in a mass spectrum display area. Further, when the mass axis of one of the mass spectra is magnified/reduced by a dragging operation of a mouse or by a magnification/reduction button, the mass axis of the other mass spectrum is concurrently magnified/reduced. | 01-09-2014 |
20140116111 | GAS CHROMATOGRAPH MASS SPECTROMETER - A gas chromatograph mass spectrometer including: an oven for gas chromatography, a mass spectrometry part, a sample vaporization chamber, a gas supply part, and a control part. When the replacement operation of a septum or a glass insert begins, the control part controls the gas supply part so that the flow rate of a carrier gas has a constant pressure and then controls heaters so that temperature is equal to or less than a temperature at which replacement is possible. When temperature becomes equal to or less than the temperature at which replacement is possible and the replacement operation of the septum or the glass insert is completed, the control part controls the heaters so that the temperature is an analysis temperature and controls the gas supply part to employ the same control method for the flow rate of the carrier gas as that before the replacement operation is begun. | 05-01-2014 |
20160025691 | CHROMATOGRAPHY/MASS SPECTROMETRY DATA PROCESSING DEVICE - Using the intensity ratio of peaks on a standard mass spectrum of the target compound and peaks with the same m/z on the measured mass spectrum near the retention time of said compound, a scale factor waveform close to the chromatogram shape based on the target compound alone is computed, and m/z candidates for quantitation are extracted based on the correlation between the measured mass chromatogram of the target compound and the scale factor waveform. Furthermore, an intensity ratio is determined with reference to the m/z peaks showing the greatest scale factor on the measured mass spectrum at the measurement time point showing the greatest scale factor in the scale factor waveform, and m/z candidates for quantitation/confirmation are narrowed down based on whether they fall within an allowable range based on peak intensity ratio on the standard mass spectrum. | 01-28-2016 |
Patent application number | Description | Published |
20100225135 | REAR FLOOR STRUCTURE IN VEHICLE BODY REAR PART - A rear floor structure in a vehicle body rear part has a spare tire placing panel having an inclined surface inclined downward toward the vehicle front provided above a rear floor, and a spare tire tiltingly mounted on the spare tire placing panel. In the rear floor structure, in an intermediate portion in the front and rear direction of the spare tire placing panel, a convex part directed upward is provided so as to extend along the vehicle width direction; between the rear floor and the spare tire placing panel in the vertical direction, a space for disposing a jack, being a rigid member, is formed; and on the vehicle front side of the axis center of the jack on the rear floor, a projecting part extending in the vehicle width direction is provided. | 09-09-2010 |
20100244473 | AUTOMOBILE BUMPER STRUCTURE - An automobile bumper structure reduces damage to a vehicle body in an offset collision by having a bumper member in an offset collision area formed by a separate member. | 09-30-2010 |
20100253028 | Lower Part Structure in Vehicle Body Rear Part - A lower part structure in a vehicle body rear part has a rear suspension frame disposed in rear of a fuel tank and in front of a spare tire and has a mechanism for causing jump up of the rear part of the spare tire under load application from the vehicle rear. The lower part structure is configured so that the center in the vertical direction of the front part of the spare tire is located so as to lap on the extension line of vertical width of a frame in the vehicle width direction of the rear suspension frame, and when the spare tire is moved to the vehicle front by a load applied from the vehicle rear, the spare tire comes into contact with the rear suspension frame directly or indirectly, whereby the rear part of the spare tire is pushed up with the rear suspension frame side being the center, and is turned in the longitudinal direction. | 10-07-2010 |
Patent application number | Description | Published |
20090197456 | SERVICE PLUG - A service plug includes: a base member in which a circuit terminal adapted to be connected to an electric circuit is provided and an open hole is formed in such a manner as to face the circuit terminal; a plug body comprising a short-circuit terminal adapted to be inserted into the circuit terminal; and a restricting member provided in the vicinity of the open hole of the base member for restricting movement of the plug body in a direction which intersects an inserting direction of the short-circuit terminal. | 08-06-2009 |
20100175940 | BATTERY POSITIONING STRUCTURE FOR ELECTRIC VEHICLE - A battery positioning structure reliably positions battery modules on a vehicle chassis even when battery modules have different sizes and heights. The battery positioning structure includes a bracket having at opposite ends not only check plates which are configured to be positioned on a body of the electric vehicle but also locks at opposite side edges of the bracket, the bracket being configured to be attached to outer surfaces of the battery modules and to unite the battery modules, and bands configured to extend across the bracket, and linked to the locks at opposite ends of the bracket. The battery modules and the bracket are positioned on the body of the electric vehicle. | 07-15-2010 |
20120073888 | BATTERY POSITIONING STRUCTURE OF ELECTRIC VEHICLE - A battery positioning structure reliably positions battery modules on a vehicle chassis even when battery modules have different sizes and heights. The battery positioning structure includes a bracket having at opposite ends not only check plates which are configured to be positioned on a body of the electric vehicle but also locks at opposite side edges of the bracket, the bracket being configured to be attached to outer surfaces of the battery modules and to unite the battery modules, and bands configured to extend across the bracket, and linked to the locks at opposite ends of the bracket. The battery modules and the bracket are positioned on the body of the electric vehicle. | 03-29-2012 |
20120270081 | BATTERY UNIT - A battery unit includes a plurality of battery cells and a cooling substrate. The battery cells are disposed so as to hold the cooling substrate therebetween. A face of the battery cell other than a terminal face thereof where terminals are provided is attached to a cooling surface of the cooling substrate so as to transfer heat between the cooling surface and the face attached thereto. | 10-25-2012 |
Patent application number | Description | Published |
20100149166 | DISPLAY, METHOD OF DRIVING DISPLAY, AND ELECTRONIC DEVICE - A display includes a pixel array section having pixels in a matrix, each pixel including an electro-optical device, a writing transistor writing a video signal, a storage capacitor retaining the video signal, and a driving transistor driving the electro-optical device based upon the video signal; scan lines for respective rows of the unit providing a scanning signal to the writing transistor; power supply lines for respective rows of the unit selectively providing a first potential and a second potential, lower than the first potential, to a drain electrode of the driving transistor; and signal lines for respective columns of the unit selectively providing the video signal and a video signal reference potential to the writing transistor; wherein a potential setting period is provided from when the pixels are turned off until the first potential is provided to the power supply line. | 06-17-2010 |
20100230681 | Display unit - A display unit with which lowering of long-term reliability of a transistor is decreased is provided. The display unit includes a display section having a plurality of organic EL devices with light emitting color different from each other and a plurality of pixel circuits that are singly provided for every said organic EL device for every pixel. The pixel circuit has a first transistor for writing a video signal, a second transistor for driving the organic EL device based on the video signal written by the first transistor, and a retentive capacity, and out of the first transistor and the second transistor, a third transistor provided correspondingly to a second organic EL device adjacent to a first organic EL device is arranged farther from the first organic EL device than a first retentive capacity provided correspondingly to the second organic EL device out of the retentive capacity. | 09-16-2010 |
20100271347 | Display unit - A display unit with which diffraction reflection is able to be decreased is provided. The display unit includes a display section having an organic EL device and a pixel circuit for every pixel. The pixel circuit has a first transistor for writing a video signal and a second transistor for driving the organic EL device based on the video signal written by the first transistor. The second transistor has a gate, a source and a drain. The organic EL device has an anode, an organic layer, and a cathode. An upper face of the source or the drain is formed at least in a region opposed to the anode or the cathode. | 10-28-2010 |
20110273491 | IMAGE DISPLAY DEVICE AND METHOD FOR REPAIRING SHORT CIRCUIT FAILURE - The present invention relates to an image display device and a method for repairing a short circuit failure. The present invention is applicable to, for example, an active matrix type image display device using an organic EL device, and a short circuit location between wiring patterns is able to be repaired. In a scanning line WSL or a signal line DTL, a bypass wiring pattern BP for bypassing a region where the signal line DTL and the scanning line WSL intersect with each other is provided. By using the bypass wiring pattern BP, a short circuit location between wiring patterns is repaired. | 11-10-2011 |
20140028642 | DISPLAY UNIT - A display unit with which diffraction reflection is able to be decreased is provided. The display unit includes a display section having an organic EL device and a pixel circuit for every pixel. The pixel circuit has a first transistor for writing a video signal and a second transistor for driving the organic EL device based on the video signal written by the first transistor. The second transistor has a gate, a source and a drain. The organic EL device has an anode, an organic layer, and a cathode. An upper face of the source or the drain is formed at least in a region opposed to the anode or the cathode. | 01-30-2014 |
20140054575 | DISPLAY UNIT - A display unit with which lowering of long-term reliability of a transistor is decreased is provided. The display unit includes a display section having a plurality of organic EL devices with light emitting color different from each other and a plurality of pixel circuits that are singly provided for every said organic EL device for every pixel. The pixel circuit has a first transistor for writing a video signal, a second transistor for driving the organic EL device based on the video signal written by the first transistor, and a retentive capacity, and out of the first transistor and the second transistor, a third transistor provided correspondingly to a second organic EL device adjacent to a first organic EL device is arranged farther from the first organic EL device than a first retentive capacity provided correspondingly to the second organic EL device out of the retentive capacity. | 02-27-2014 |
20140183510 | DISPLAY UNIT HAVING AN ARRANGEMENT OF A RETENTIVE CAPACITOR AND AN EL DEVICE OF EACH PIXEL WITH RESPECT TO ADJACENT PIXEL FOR LOW LIGHT LEAKAGE AMONG ADJACENT PIXELS - A display unit with which lowering of long-term reliability of a transistor is decreased is provided. The display unit includes a display section having a plurality of organic EL devices with light emitting color different from each other and a plurality of pixel circuits that are singly provided for every said organic EL device for every pixel. The pixel circuit has a first transistor for writing a video signal, a second transistor for driving the organic EL device based on the video signal written by the first transistor, and a retentive capacity, and out of the first transistor and the second transistor, a third transistor provided correspondingly to a second organic EL device adjacent to a first organic EL device is arranged farther from the first organic EL device than a first retentive capacity provided correspondingly to the second organic EL device out of the retentive capacity. | 07-03-2014 |
20140346490 | DISPLAY UNIT - A display unit with which lowering of long-term reliability of a transistor is decreased is provided. The display unit includes a display section having a plurality of organic EL devices with light emitting color different from each other and a plurality of pixel circuits that are singly provided for every said organic EL device for every pixel. The pixel circuit has a first transistor for writing a video signal, a second transistor for driving the organic EL device based on the video signal written by the first transistor, and a retentive capacity, and out of the first transistor and the second transistor, a third transistor provided correspondingly to a second organic EL device adjacent to a first organic EL device is arranged farther from the first organic EL device than a first retentive capacity provided correspondingly to the second organic EL device out of the retentive capacity. | 11-27-2014 |
20150138052 | IMAGE DISPLAY DEVICE AND METHOD FOR REPAIRING SHORT CIRCUIT FAILURE - The present invention relates to an image display device and a method for repairing a short circuit failure. The present invention is applicable to, for example, an active matrix type image display device using an organic EL device, and a short circuit location between wiring patterns is able to be repaired. In a scanning line WSL or a signal line DTL, a bypass wiring pattern BP for bypassing a region where the signal line DTL and the scanning line WSL intersect with each other is provided. By using the bypass wiring pattern BP, a short circuit location between wiring patterns is repaired. | 05-21-2015 |
20150179709 | DISPLAY UNIT - A display unit with which lowering of long-term reliability of a transistor is decreased is provided. The display unit includes a display section having a plurality of organic EL devices with light emitting color different from each other and a plurality of pixel circuits that are singly provided for every said organic EL device for every pixel. The pixel circuit has a first transistor for writing a video signal, a second transistor for driving the organic EL device based on the video signal written by the first transistor, and a retentive capacity, and out of the first transistor and the second transistor, a third transistor provided correspondingly to a second organic EL device adjacent to a first organic EL device is arranged farther from the first organic EL device than a first retentive capacity provided correspondingly to the second organic EL device out of the retentive capacity. | 06-25-2015 |
20160071917 | DISPLAY UNIT - A display unit with which lowering of long-term reliability of a transistor is decreased is provided. The display unit includes a display section having a plurality of organic EL devices with light emitting color different from each other and a plurality of pixel circuits that are singly provided for every said organic EL device for every pixel. The pixel circuit has a first transistor for writing a video signal, a second transistor for driving the organic EL device based on the video signal written by the first transistor, and a retentive capacity, and out of the first transistor and the second transistor, a third transistor provided correspondingly to a second organic EL device adjacent to a first organic EL device is arranged farther from the first organic EL device than a first retentive capacity provided correspondingly to the second organic EL device out of the retentive capacity. | 03-10-2016 |
Patent application number | Description | Published |
20100163722 | MASS SPECTROMETRY AND MASS SPECTROMETER USED FOR THE SAME - The present invention maintains a stable emission amount from an emitter. In an embodiment of the present invention, a solid sample or a liquid sample is heated to gasify an object to be measured contained in the solid sample or the liquid sample, thereby forming a neutral gaseous molecule, and a metal ion emitted from an emitter having an oxidized surface is attached to the neutral gaseous molecule to ionize the neutral gaseous molecule, which is subjected to mass spectrometry. The solid sample or the liquid sample is a sample that emits a reducing gas by heating. The heating for gasifying the object to be measured is performed at a temperature lower than the vaporization temperature of the solid sample or the liquid sample and not less than the vaporization temperature of the object to be measured, and an oxidizing gas is provided to the emitter. | 07-01-2010 |
20110139998 | ION BEAM GENERATOR - [Objective of the Invention] An ion beam generator, a thermal distortion in a grid assembly is reduced. | 06-16-2011 |
20160086768 | OZONE SUPPLYING APPARATUS, OZONE SUPPLYING METHOD, AND CHARGED PARTICLE BEAM DRAWING SYSTEM - An ozone supplying apparatus according to an embodiment of the present invention is an ozone gas supplying apparatus which supplies an ozone gas to a vacuum apparatus. The ozone supplying apparatus includes an ozone generator configured to generate the ozone gas, a first flow controller configured to control a flow rate of the ozone gas generated by the ozone generator, a second flow controller configured to control a flow rate of the ozone gas supplied to the vacuum apparatus, and a main pipe provided on a secondary side of the first flow controller and on a primary side of the second flow controller, with the ozone gas being introduced into the main pipe at such a flow rate that an internal pressure of the main pipe is controlled to be lower than atmospheric pressure by the first flow controller. | 03-24-2016 |
Patent application number | Description | Published |
20130045601 | COMPOSITION FOR FORMING A SILICON-CONTAINING RESIST UNDERLAYER FILM AND PATTERNING PROCESS USING THE SAME - A composition for forming a silicon-containing resist underlayer film that contains: a component (A) including at least one or more compounds selected from the group consisting of a polymer having repeating units shown by the following general formulae (1-1a) and (1-1b) and being capable of generating a phenolic hydroxyl group, a hydrolysate of the polymer, and a hydrolysis-condensate of the polymer, and a component (B) which is a silicon-containing compound obtained by hydrolysis-condensation of a mixture containing, at least, one or more hydrolysable silicon compounds represented by the following general formula (2) and one or more hydrolysable silicon compounds represented by the following general formula (3). | 02-21-2013 |
20130137271 | SILICON-CONTAINING RESIST UNDERLAYER FILM-FORMING COMPOSITION AND PATTERNING PROCESS - The present invention is a silicon-containing resist underlayer film-forming composition containing a condensation product and/or a hydrolysis condensation product of a mixture comprising: one or more kinds of a compound (A) selected from the group consisting of an organic boron compound shown by the general formula (1) and a condensation product thereof and one or more kinds of a silicon compound (B) shown by the general formula (2). Thereby, there can be provided a silicon-containing resist underlayer film-forming composition being capable of forming a pattern having a good adhesion, forming a silicon-containing film which can be used as a dry-etching mask between a photoresist film which is the upperlayer film of the silicon-containing film and an organic film which is the underlayer film thereof, and suppressing deformation of the upperlayer resist during the time of dry etching of the silicon-containing film; and a patterning process. | 05-30-2013 |
20130210229 | SILICON-CONTAINING SURFACE MODIFIER, RESIST LOWER LAYER FILM-FORMING COMPOSITION CONTAINING THE SAME, AND PATTERNING PROCESS - The present invention provides a silicon-containing surface modifier containing one or more repeating units each represented by the following general formula (A), or one or more partial structures each represented by the following general formula (C): | 08-15-2013 |
20130210236 | SILICON-CONTAINING SURFACE MODIFIER, RESIST UNDERLAYER FILM COMPOSITION CONTAINING THIS, AND PATTERNING PROCESS - The present invention provides a silicon-containing surface modifier wherein the modifier contains one or more of a repeating unit shown by the following general formula (A) and a partial structure shown by the following general formula (C).The present invention has an object to provide a resist underlayer film applicable not only to a negatively developed resist pattern formed by a hydrophilic organic compound but also to a conventional positively developed resist pattern formed by a hydrophobic compound. | 08-15-2013 |
20130280912 | SILICON COMPOUND, SILICON-CONTAINING COMPOUND, COMPOSITION FOR FORMING RESIST UNDERLAYER FILM CONTAINING THE SAME AND PATTERNING PROCESS - The invention provides a silicon compound represented by the following general formula (A-1) or (A-2), | 10-24-2013 |
20140193757 | COMPOSITON FOR FORMING METAL OXIDE-CONTAINING FILM AND PATTERNING PROCESS - The invention provides a composition for forming a metal oxide-containing film comprising, as a component (A), a metal oxide-containing compound A | 07-10-2014 |
20140193975 | COMPOSITION FOR FORMING TITANIUM-CONTAINING RESIST UNDERLAYER FILM AND PATTERNING PROCESS - The invention provides a composition for forming a titanium-containing resist underlayer film comprising: as component (A), a silicon-containing compound obtained by hydrolysis and/or condensation of one or more kinds of silicon compounds shown by the following general formula (A-I) and, as component (B), a titanium-containing compound obtained by hydrolysis and/or condensation of one or more kinds of hydrolysable titanium compounds shown by the following general formula (B-I). There can be provided a composition for forming a titanium-containing resist underlayer film to form a resist underlayer film having an excellent adhesiveness in fine patterning and an excellent etching selectivity relative to a conventional organic film and a silicon-containing film. | 07-10-2014 |
20140273447 | COMPOSITION FOR FORMING TITANIUM-CONTAINING RESIST UNDERLAYER FILM AND PATTERNING PROCESS - The invention provides a composition for forming a titanium-containing resist underlayer film comprising: as a component (A), compounds selected from titanium compounds represented by the following general formulae (A-1) and (A-2) and a titanium-containing compound obtained by hydrolysis and/or condensation of the titanium compounds, as a component (B), compounds selected from titanium compounds represented by the following general formulae (B-1) and (B-2) and a titanium-containing compound obtained by hydrolysis and/or condensation of the titanium compounds, and as a component (D), solvent. There can be provided a composition for forming a titanium-containing resist underlayer film to form a resist underlayer film having favorable pattern adhesiveness and excellent etching selectivity. | 09-18-2014 |
20140273448 | COMPOSITION FOR FORMING TITANIUM-CONTAINING RESIST UNDERLAYER FILM AND PATTERNING PROCESS - The invention provides a composition for forming a titanium-containing underlayer film comprising: as a component (A), a titanium-containing compound obtained by reacting a divalent or a trivalent alcohol represented by the following general formula (A-2) to one or more kinds of compounds selected from a titanium compound represented by the following general formula (A-1) and a titanium-containing compound obtained by hydrolysis and/or condensation of the titanium compound and as a component (C), solvent. There can be provided a composition for forming a titanium-containing underlayer film that is excellent in storage stability without changes in characteristics, pattern adhesiveness relative to a fine pattern, and etching selectivity relative to conventional organic film and silicon-containing film. | 09-18-2014 |
20160064220 | METHOD FOR PRODUCING SEMICONDUCTOR APPARATUS SUBSTRATE - A method for producing a semiconductor apparatus substrate includes steps of: forming silicon-containing film having silicon content of 1% by mass or more and 30% by mass or less on an organic under layer film formed on an substrate; forming a resist film on silicon-containing film; forming a resist pattern by exposing and developing resist film; transferring pattern to silicon-containing film using resist pattern as a mask; transferring pattern to organic under layer film using silicon-containing film as a mask to leave part or all of silicon-containing film on organic under layer film; implanting ions into substrate using organic under layer film as a mask; and peeling organic under layer film used as mask for ion implantation on which part or all of silicon-containing film remains, with peeling liquid. | 03-03-2016 |
20160096977 | COMPOSITION FOR FORMING A COATING TYPE SILICON-CONTAINING FILM, SUBSTRATE, AND PATTERNING PROCESS - A composition for forming a coating type silicon-containing film, containing one or more silicic acid skeletal structures represented by the formula (1) and one or more silicon skeletal structures represented by the formula (2), wherein the composition contains a coupling between units shown in the formula (2). There can be provided a composition capable of forming a silicon-containing film that has excellent adhesiveness in fine patterning, and can be easily wet etched by a removing liquid which does not cause damage to a semiconductor substrate and a coating type organic film or a CVD film mainly of carbon which is required in the patterning process. | 04-07-2016 |
20160096978 | COMPOSITION FOR FORMING A COATING TYPE BPSG FILM, SUBSTRATE, AND PATTERNING PROCESS - A composition for forming a coating type BPSG film, containing one or more silicic acid skeletal structures represented by formula (1), one or more phosphoric acid skeletal structures represented by formula (2), one or more boric acid skeletal structures represented by formula (3), and one or more silicon skeletal structures represented by formula (4), wherein the composition contains a coupling between units in formula (4). The composition is capable of forming a BPSG film that has excellent adhesiveness in fine patterning, can be easily wet etched by a removing liquid which does not cause damage to a semiconductor substrate and a coating type organic film or a CVD film mainly consisting of carbon which is required in the patterning process, can maintain the peelability even after dry etching, and can suppress generation of particles by forming it in the coating process. | 04-07-2016 |
Patent application number | Description | Published |
20090314312 | CLEANING APPARATUS AND CLEANING METHOD - A cleaning apparatus for cleaning an object to be cleaned by allowing a cleaning medium caused to fly by an air flow to collide with the object to be cleaned is provided. The cleaning apparatus includes a cleaning tank in which the cleaning medium is caused to fly by the air flow and which has an opening to allow the object to be cleaned to pass through; a cleaning medium accelerating part provided at a bottom part of the cleaning tank and to inject the air flow to cause the cleaning medium to fly; a hollow elongated member having substantially the same inner diameter as a diameter of the opening, connected outside the opening, and configured to form a movement path for the object to be cleaned; and a cleaning medium returning part to return the cleaning medium stagnant in the hollow elongated member into the cleaning tank. | 12-24-2009 |
20100307535 | CLEANING DEVICE AND CLEANING METHOD - A cleaning device ( | 12-09-2010 |
20110067731 | CLEANING DEVICE AND CLEANING METHOD - A cleaning device for removing a deposit adhering to an object to be cleaned is disclosed. The cleaning device includes a cleaning chamber forming a space for housing multiple cleaning media shaped like flakes; a circulating air-flow generating unit configured to generate a circulating air flow to cause the cleaning media to fly and repeatedly collide with the object in the cleaning chamber and thereby to remove the deposit adhering to the object; and a cleaning medium recycling unit configured to suction and remove the deposit adhering to the cleaning media that have collided with the object and thereby to recycle the cleaning media. The pencil hardness of the cleaning media is greater than the pencil hardness of the deposit. | 03-24-2011 |
20120117749 | DRY-TYPE CLEANING CHASSIS AND DRY-TYPE CLEANING DEVICE - A dry-type cleaning chassis includes a chassis part including an opening part in contact with a cleaning target, an air inlet duct provided to blow external air into the internal space; a suction port provided for generating a circulating air flow in the internal space by suctioning air having been introduced into the internal space via the air inlet duct; a porous unit configured to pass objects removed from the cleaning target to a suction port side; and a path limiting member formed of a cylindrical shape extended in an axis center direction of the circulating air flow and configured so that an inside of the cylindrical shape is in communication with the suction port as a suction path. | 05-17-2012 |
20130180552 | DRY TYPE CLEANING HOUSING AND DRY TYPE CLEANING APPARATUS - A dry type cleaning housing which causes a cleaning medium to fly with an air flow and places the cleaning medium on a cleaning object to clean the cleaning object is disclosed. The dry type cleaning housing includes an inner space which causes the cleaning medium to fly; an opening which abuts the cleaning medium against the cleaning object to collide the cleaning medium with the cleaning object; a ventilation path which passes air from outside into the inner space; a suction opening which suctions the air introduced into the inner space via the ventilation path to generate a revolving air flow in the inner space; a porous unit which passes removed matter removed from the cleaning object to the suction opening side; and a revolving air flow adjusting unit which arbitrarily reduces or stops the revolving air flow. | 07-18-2013 |
20130192018 | DRY TYPE CLEANING CASE AND DRY TYPE CLEANING DEVICE - A dry type cleaning case is for cleaning an object with a medium that flies by a revolving airflow. The dry type cleaning case includes a case unit and a leakage prevention unit. The case unit includes a space in which the medium flies, an opening that contacts the object so that the medium collides with the object, a ventilation path through which air flows into the space from outside, a suction opening that suctions the air that has been guided into the space through the ventilation path, to generate the revolving airflow in the space, and a porous unit through which a substance removed from the object is passed to the suction opening. The leakage prevention unit prevents the medium from leaking outside through the opening from the space, by causing outer air to flow in when the case unit is separated from the object. | 08-01-2013 |
20140020713 | DRY-TYPE CLEANING CHASSIS, DRY-TYPE CLEANING DEVICE, AND DRY-TYPE CLEANING METHOD - A dry-type cleaning chassis includes an internal space in which cleaning media are flown, an opening part configured to be in contact with a cleaning object, an air inlet duct configured to introduce external air into the internal space, a suction port that vacuums the air introduced into the internal space from the air inlet duct and causes a circulating air flow to be generated in the internal space, a flow path limiting member that regulates a circulating axis of the circulating air flow within the internal space, a cleaning media discharge outlet that is in communication with an exterior of a circulating flow path of the circulating air flow and is configured to discharge the cleaning media from the circulating flow path to the exterior, and a cleaning media guide member that guides the cleaning media to the cleaning media discharge outlet. | 01-23-2014 |
20150101143 | DRY CLEANING CASING, DRY CLEANING APPARATUS AND ATTACHMENT METHOD OF SCREEN PLATE - A dry cleaning casing of a dry cleaning apparatus includes a casing body including an internal space for flying a cleaning member, an opening to which a cleaning target is contacted to collide the cleaning member to the cleaning target, and an air introduction route to introduce external air to the internal space, by sucking air from the internal space while the opening is closed by the cleaning target, to generate rotating air flow for flying the cleaning member; a flow restriction member to define a rotation axis of the rotating air flow in the internal space; and a screen plate made of a porous plate to block movement of the cleaning member while passing through substance removed from the cleaning target. | 04-16-2015 |