Patent application number | Description | Published |
20090087081 | METHOD OF MANUFACTURING PHOTO MASK, MASK PATTERN SHAPE EVALUATION APPARATUS, METHOD OF JUDGING PHOTO MASK DEFECT CORRECTED PORTION, PHOTO MASK DEFECT CORRECTED PORTION JUDGMENT APPARATUS, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE - According to an aspect of the invention, there is provided a method comprising detecting a defect of a pattern formed on the photo mask, acquiring a pattern image of a first region on the photo mask, extracting a pattern contour from the pattern image to acquire pattern contour extracted data, producing first graphic data based on the pattern contour extracted data and a pixel size, acquiring pattern data including the first region and corresponding to a second region from design data, producing second graphic data from the pattern data, replacing the second graphic data with the first graphic data to produce third graphic data only in a region where the first graphic data is superimposed upon the second graphic data, producing transfer patterns of pattern shapes represented by the second and third graphic data, and comparing the transfer patterns to judge whether or not the defect needs to be corrected. | 04-02-2009 |
20100209829 | PHOTOMASK MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD - This invention discloses a photomask manufacturing method. A pattern dimensional map is generated by preparing a photomask in which a mask pattern is formed on a transparent substrate, and measuring a mask in-plane distribution of the pattern dimensions. A transmittance correction coefficient map is generated by dividing a pattern formation region into a plurality of subregions, and determining a transmittance correction coefficient for each of the plurality of subregions. The transmittance correction value of each subregion is calculated on the basis of the pattern dimensional map and the transmittance correction coefficient map. The transmittance of the transparent substrate corresponding to each subregion is changed on the basis of the transmittance correction value. | 08-19-2010 |
20130179846 | PHOTOMASK MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD - This invention discloses a photomask manufacturing method. A pattern dimensional map is generated by preparing a photomask in which a mask pattern is formed on a transparent substrate, and measuring a mask in-plane distribution of the pattern dimensions. A transmittance correction coefficient map is generated by dividing a pattern formation region into a plurality of subregions, and determining a transmittance correction coefficient for each of the plurality of subregions. The transmittance correction value of each subregion is calculated on the basis of the pattern dimensional map and the transmittance correction coefficient map. The transmittance of the transparent substrate corresponding to each subregion is changed on the basis of the transmittance correction value. | 07-11-2013 |
20140232032 | LITHOGRAPHY ORIGINAL CHECKING DEVICE, LITHOGRAPHY ORIGINAL CHECKING METHOD, AND PATTERN DATA CREATING METHOD - In one embodiment, a lithography original checking method includes applying resin onto a first lithography original having a first concavo-convex pattern, hardening the resin, releasing the hardened resin from the first lithography original and producing a second lithography original having a second concavo-convex pattern corresponding to the first concavo-convex pattern, enlarging the second lithography original, detecting a defect on the enlarged second lithography original, and calculating a position of a defect on the first lithography original based on the position of the detected defect. | 08-21-2014 |
Patent application number | Description | Published |
20090278793 | INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND MEDIUM RECORDING INFORMATION PROCESSING PROGRAM - To provide an information processing device, an information processing method, and a medium recording an information processing program that can be operated easily. | 11-12-2009 |
20100164865 | INFORMATION PROVIDING SYSTEM AND INFORMATION PROVIDING METHOD - An information providing system includes a display unit installed in a table and having on the table, a display screen that displays an image of a product; a detecting unit that detects placement of an object at the position of the displayed image; and a display control unit that causes content related to the product to be displayed on the display screen when placement of the object at the position of the image is detected by the detecting unit. | 07-01-2010 |
20100164961 | COMMUNICATION SYSTEM, APPARATUS, AND METHOD - A communication apparatus for communicating with a storage unit and portable display apparatus, the communication apparatus includes, a receiver for receiving an identification information from the portable display apparatus when the portable display apparatus is placed upon the board, an acquisition unit for acquiring from the storage unit the information related to the identification information which is received from the portable display apparatus, and a transmitter for transmitting to the portable display apparatus the information which is acquired by the acquisition unit. | 07-01-2010 |
20100165091 | MONITORING SYSTEM AND METHOD - A monitoring system that monitors a person, the monitoring system including: a camera that captures an image of the individual; a transmission device that transmits an image; and, a processing device that is configured to: detect a change in facial expression of the individual from an image captured by the camera; identify the individual with the change in facial expression; and, transmit to a destination associated with the identified individual an image including the change in facial expression through the transmission device. | 07-01-2010 |
20100168884 | INFORMATION PROVIDING SYSTEM AND METHOD - An information providing method includes writing to a storage area of a communication apparatus embedded in a surrounding member of a transparent panel, distribution information related to preliminarily stored content; displaying on a screen provided on the transparent panel, display information related to the content for which the distribution information has been read at the writing; and transmitting to a communication terminal near the transparent panel by wireless communication, the distribution information stored in the storage area of the communication apparatus. | 07-01-2010 |
20100168999 | COMPUTER READABLE MEDIUM FOR STORING INFORMATION DISPLAY PROGRAM, INFORMATION DISPLAY APPARATUS AND INFORMATION DISPLAY METHOD - A computer readable medium for storing information display programs causing a computer communicating with a communication apparatus provided at the entry or exit at an entrance/exit point where a user gets on or off a transportation system to perform a display method, the display method include: detecting that the user has left the exit of the current entrance/exit point through the communication between a communication apparatus; identifying the next entrance/exit point to the current entrance/exit point among the entrance/exit points within the route; acquiring map showing the route from the current entrance/exit point to the next entrance/exit point identified by the identifying the next entrance/exit point to the current entrance/exit point; and controlling a display screen of the computer so as to display the map showing the route from the current entrance/exit point to the next entrance/exit point acquired by the acquiring map. | 07-01-2010 |
20100169186 | GOODS SELECTION APPARATUS AND METHOD - A goods selection apparatus for selecting goods on the basis of displayed goods information. The goods selection apparatus includes a display unit for displaying goods information, a detector for detecting individually a plurality of potential customers in front of the display unit, a control unit for controlling the display unit to display a plurality of display areas in the display unit, each of the display areas displaying information of respective one of the goods, the number of the plurality of display areas corresponding to the number of the plurality of potential customers detected by the detector, an input unit for receiving an input designating any one of the display areas by any of the potential customers; and a selector for selecting one of the goods corresponding to the one of display areas designated by the input unit. | 07-01-2010 |
Patent application number | Description | Published |
20090162949 | METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DEVICE - The present invention provides a method of manufacturing an organic light-emitting device which is applicable to a large-screen display device. The method includes the steps of: forming, over a drive substrate, an element region including a drive transistor, and an organic electroluminescence element in which, an anode, an organic layer and a cathode are stacked in this order; and after the formation of the element region, repairing a short circuit area while setting at least the element region in an atmosphere in which an oxygen concentration is 0.1% or higher and less than 1% and a dew point is −50 degrees or less, and applying a voltage across the anode and the cathode. | 06-25-2009 |
20100097411 | DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE - A display device and a method for manufacturing the display device are provided. The display device includes an organic layer on an auxiliary wiring is removed with high precision by one operation and, thereby, the yield and the productivity are improved. A lower electrode is formed by patterning in each pixel on a substrate. An auxiliary wiring including a light absorption layer is formed between individual pixels. An organic layer is formed on the substrate while covering the lower electrodes. Laser irradiation is conducted from the organic layer side, the laser light is converted to heat in the light absorption layer exposed at a portion under the organic layer, and the organic layer portion above the light absorption layer is removed selectively. An upper electrode is formed on the organic layer and is connected to the light absorption layer portion of the auxiliary wiring. | 04-22-2010 |
20120100697 | FILM FOR SEMICONDUCTOR AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD - A film for semiconductor includes a support film, a second adhesive layer, a first adhesive layer and a bonding layer which are laminated together in this order. This film for semiconductor is configured so that it supports a semiconductor wafer laminated on the bonding layer thereof when the semiconductor wafer is diced and the bonding layer is selectively peeled off from the first adhesive layer when the diced semiconductor wafer (semiconductor element) is picked up. This film for semiconductor is characterized in that when the semiconductor wafer is laminated thereon and diced, and then adhesive strength of the obtained semiconductor element is measured, a ratio of “a (N/cm)” which is adhesive strength of an edge portion of the semiconductor element to “b (N/cm)” which is adhesive strength of a portion of the semiconductor element other than the edge portion thereof (that is, a/b) is in the range of 1 to 4. By optimizing the a/b, it is possible to reliably suppress defects such as breakage and crack which would be generated in the semiconductor element due to local impartation of a large load thereto when being picked up. | 04-26-2012 |
20120104942 | DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE - A display device and a method for manufacturing the display device are provided. The display device includes an organic layer on an auxiliary wiring is removed with high precision by one operation and, thereby, the yield and the productivity are improved. A lower electrode is formed by patterning in each pixel on a substrate. An auxiliary wiring including a light absorption layer is formed between individual pixels. An organic layer is formed on the substrate while covering the lower electrodes. Laser irradiation is conducted from the organic layer side, the laser light is converted to heat in the light absorption layer exposed at a portion under the organic layer, and the organic layer portion above the light absorption layer is removed selectively. An upper electrode is formed on the organic layer and is connected to the light absorption layer portion of the auxiliary wiring. | 05-03-2012 |
20120108012 | FILM FOR SEMICONDUCTOR AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD - A film for semiconductor includes a support film, a second adhesive layer, a first adhesive layer and a bonding layer which are laminated together in this order. This film for semiconductor is configured so that it supports a semiconductor wafer laminated on the bonding layer thereof when the semiconductor wafer is diced and the bonding layer is selectively peeled off from the first adhesive layer when the semiconductor elements obtained by the dicing are picked up. This film for semiconductor is characterized in that an average thickness of the second adhesive layer is in the range of 20 to 100 μm. This makes it possible to control cutting lines formed during the dicing so as to locate distal ends thereof within the first adhesive layer easily and reliably and to prevent defects which would be generated when the cutting lines come down to the support film. | 05-03-2012 |
20120115280 | FILM FOR SEMICONDUCTOR AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD - A film for semiconductor includes a support film, a second adhesive layer, a first adhesive layer and a bonding layer which are laminated together in this order. This film for semiconductor is configured so that it supports a semiconductor wafer laminated on the bonding layer thereof when the semiconductor wafer is diced and the bonding layer is selectively peeled off from the first adhesive layer when a chip is picked up. This film for semiconductor is characterized in that in the case where peel strength at 23° C. of the chip is defined as “F | 05-10-2012 |
20150037794 | MARKER FOR DIAGNOSING FORELIMB-GIRDLE MUSCULAR ANOMALY IN MAMMAL INDIVIDUAL, AND DETECTION METHOD USING SAME - The present invention uses an isolated polynucleotide having a part or whole of GFRA1 gene, mutant GFRA1 protein, and mRNA encoding the mutant GFRA1 protein, each of which includes a loss-of-function mutation of GFRA1, as markers for diagnosing an animal as affected by forelimb-girdle muscular anomaly or as a carrier of forelimb-girdle muscular anomaly. In addition, an isolated polynucleotide comprising one or more selected from the group consisting of MOK2630, MOK2637, SNP B, and SNP D can be used as markers for diagnosing whether a bovine animal is affected by forelimb-girdle muscular anomaly or whether a bovine animal is a carrier of forelimb-girdle muscular anomaly. | 02-05-2015 |
20150137104 | ORGANIC ELECTROLUMINESCENCE DEVICE AND METHOD OF MANUFACTURING THE SAME - Provided are an organic electroluminescence device capable of enhancing reflectance of an anode, thereby resulting in improved light-emitting efficiency and a method of manufacturing the same. An anode ( | 05-21-2015 |