Patent application number | Description | Published |
20080229824 | ANGULAR RATE SENSOR AND ELECTRONIC DEVICE - An angular rate sensor includes: a piezoelectric vibration device; and a detection section, wherein the piezoelectric vibration device includes a base substrate, a vibration section having a fixed end affixed to the base substrate and a free end that does not contact the base substrate, and a driving section formed above the vibration section for generating flexural vibration of the vibration section; the vibration section has a first support section, four (first-fourth) cantilever sections supported by the first support section, and a second support section that supports the first support section and equipped with the fixed end; the first support section has two center lines that are orthogonal to each other; the first cantilever section and the second cantilever section are symmetrical to each other through one of the center lines of the first support section in a plan view; the third cantilever section and the fourth cantilever section are symmetrical to each other through the one of the center lines of the first support section in a plan view; the first cantilever section and the fourth cantilever section are symmetrical to each other through the other of the center lines of the first support section in a plan view; the second cantilever section and the third cantilever section are symmetrical to each other through the other of the center lines of the first support section in a plan view; the driving section includes a lower electrode for driving section, a piezoelectric layer for driving section formed above the lower electrode for driving section, and an upper electrode for driving section formed above the piezoelectric layer for driving section; and the detection section is formed above the vibration section for detecting an angular rate of rotation applied to the vibration section, and has a lower electrode for detection section, a piezoelectric layer for detection section formed above the lower electrode for detection section, and an upper electrode for detection section formed above the piezoelectric layer for detection section. | 09-25-2008 |
20080229826 | ACCELERATION SENSOR AND ELECTRONIC DEVICE - An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer and having a base section affixed to the vibration section forming layer and two beam sections extending from the base section, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on each of the beam sections; the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency; and the detection circuit detects a change in the frequency of vibrations of the piezoelectric vibration device which is caused by an acceleration applied in a direction in which the beam sections extend, and outputs a signal corresponding to the acceleration based on the change in the frequency. | 09-25-2008 |
20080236283 | ACCELERATION SENSOR AND ELECTRONIC DEVICE - An acceleration sensor includes: a piezoelectric vibration device; an oscillation circuit; and a detection circuit, wherein the piezoelectric vibration device includes a substrate, an insulation layer formed above the substrate, a vibration section forming layer formed above the insulation layer, a vibration section formed in a cantilever shape in a first opening section that penetrates the vibration section forming layer, a second opening section that penetrates the insulation layer and formed below the first opening section and the vibration section, and a piezoelectric element section formed on the vibration section, the oscillation circuit vibrates the piezoelectric vibration device at a resonance frequency, and the detection circuit detects a change in the frequency of vibration of the piezoelectric vibration device which is caused by an acceleration applied in a direction in which the vibration section extends, and outputs a signal corresponding to the acceleration based on the change in the frequency. | 10-02-2008 |
20080308525 | POTASSIUM NIOBATE DEPOSITED BODY AND METHOD FOR MANUFACTURING THE SAME, PIEZOELECTRIC THIN FILM RESONATOR, FREQUENCY FILTER, OSCILLATOR, ELECTRONIC CIRCUIT, AND ELECTRONIC APPARATUS - A method for manufacturing a potassium niobate deposited body includes: forming a buffer layer above a substrate composed of an R-plane sapphire substrate; forming above the buffer layer a potassium niobate layer or a potassium niobate solid solution layer that epitaxially grows in a (100) orientation in a pseudo cubic system expression; and forming an electrode layer above the potassium niobate layer or the potassium niobate solid solution layer, wherein a (100) plane of the potassium niobate layer or the potassium niobate solid solution layer is formed to tilt with a [11-20] direction vector as a rotation axis with respect to an R-plane (1-102) of the R-plane sapphire substrate. | 12-18-2008 |
20080308762 | PIEZOELECTRIC LAMINATE, SURFACE ACOUSTIC WAVE DEVICE, THIN-FILM PIEZOELECTRIC RESONATOR, AND PIEZOELECTRIC ACTUATOR - A piezoelectric laminate including a base and a first piezoelectric layer formed above the base and including potassium sodium niobate. The first piezoelectric layer is shown by a compositional formula (K | 12-18-2008 |
20100013894 | PIEZOELECTRIC LAMINATE, SURFACE ACOUSTIC WAVE DEVICE, THIN-FILM PIEZOELECTRIC RESONATOR, AND PIEZOELECTRIC ACTUATOR - A piezoelectric laminate including a base and a first piezoelectric layer formed above the base and including potassium sodium niobate. The first piezoelectric layer is shown by a compositional formula (K | 01-21-2010 |
20100194248 | PIEZOELECTRIC OSCILLATOR AND METHOD FOR MANUFACTURING THE SAME - A piezoelectric oscillator includes a substrate, a supporting section formed above the substrate, an oscillation section having one end affixed to the supporting section and another free end, and a driving section that is formed above the oscillation section and generates flexing vibration in the oscillation section. The driving section includes a first electrode, a piezoelectric layer formed above the first electrode, and a second electrode formed above the piezoelectric layer, and the oscillation section is composed of a material that is different from a material of the supporting section. The oscillation section is composed of single crystal silicon, and the supporting section is composed of polycrystal silicon or amorphous silicon. | 08-05-2010 |