Patent application number | Description | Published |
20110143053 | METHOD OF FORMING ZINC OXIDE FILM (ZNO) OR MAGNESIUM ZINC OXIDE FILM (ZNMGO) AND APPARATUS FOR FORMING ZINC OXIDE FILM OR MAGNESIUM ZINC OXIDE FILM - A method of forming a zinc oxide film or a magnesium zinc oxide film which has a high transmittance. The method of forming a zinc oxide film or a magnesium zinc oxide film includes (A) converting a solution containing zinc, or zinc and magnesium into mist, (B) heating a substrate, and (C) supplying the solution converted into mist, and ozone to a first main surface of the substrate under heating. | 06-16-2011 |
20110151619 | METHOD OF FORMING METAL OXIDE FILM AND APPARATUS FOR FORMING METAL OXIDE FILM - A method of forming a metal oxide film, which can lower a temperature of a heat treatment of a substrate and also can form a metal oxide film having a low resistance value without limiting the kind of the metal oxide film to be formed. The method of forming a metal oxide film includes (A) converting a solution containing a metal into mist, (B) heating a substrate, and (C) supplying the solution converted into mist, and ozone to a first main surface of the substrate under heating. | 06-23-2011 |
20120040083 | METHOD FOR FORMING METAL OXIDE FILM, METAL OXIDE FILM, AND APPARATUS FOR FORMING METAL OXIDE FILM - The present invention aims at providing a method for forming a metal oxide film which can further improve the production efficiency while maintaining low resistance of a metal oxide film formed thereby. In the method for forming a metal oxide film of the present invention, a solution ( | 02-16-2012 |
20120112187 | METHOD FOR FORMING METAL OXIDE FILM, METAL OXIDE FILM AND APPARATUS FOR FORMING METAL OXIDE FILM - The present method of forming a metal oxide film can increase production efficiency while maintaining the low resistance of the metal oxide film. The present method of forming a metal oxide film includes first misting a solution containing a metallic element and ethylenediamine; meanwhile, heating a substrate; and then, supplying the misted solution onto a first main surface of the substrate. | 05-10-2012 |
20130039843 | APPARATUS FOR FORMING METAL OXIDE FILM, METHOD FOR FORMING METAL OXIDE FILM, AND METAL OXIDE FILM - A film forming apparatus ( | 02-14-2013 |
20130247820 | FILM FORMATION DEVICE - An object of the present invention is to provide a film formation device that is able to prevent a size increase in a configuration around a mist jet nozzle while maintaining uniform spouting of a mist to a substrate on which a film is to be formed. The present invention includes a mist generator ( | 09-26-2013 |
20140141170 | OXIDE FILM DEPOSITION METHOD AND OXIDE FILM DEPOSITION DEVICE - The present invention provides a method for forming an oxide film by which normal formation of an oxide film is always achieved without receiving an influence of a change in the atmosphere, a metal oxide film having a low resistance can be formed, and a high efficiency of film formation is obtained. In the present invention, a raw material solution containing an alkyl compound is formed into a mist and ejected to a substrate ( | 05-22-2014 |
20150010464 | METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM - The present invention includes the steps of (A) forming a solution containing zinc into mist and spraying the solution formed into mist onto a substrate under no vacuum to form a metal oxide film on the substrate, and (B) irradiating the metal oxide film with ultraviolet rays to decrease a resistance of the metal oxide film. Further, the step (B) includes the steps of (B-1) determining, in accordance with a film thickness of the metal oxide film, wavelengths of the ultraviolet rays to be radiated, and (B-2) irradiating the metal oxide film with the ultraviolet rays having the wavelengths determined in said step (B-1). | 01-08-2015 |
20150034885 | METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM - In a method for producing a metal oxide film according to the present invention, a solution containing zinc is sprayed onto a substrate placed under non-vacuum, and then, a dopant solution containing a dopant is sprayed onto the substrate. After that, a deposited metal oxide film is subjected to a resistance reducing treatment. A molar concentration of the dopant supplied to the substrate with respect to a molar concentration of the zinc supplied to the substrate is not less than a predetermined value. | 02-05-2015 |
20150076422 | METHOD FOR PRODUCING METAL OXIDE FILM AND METAL OXIDE FILM - In the method for producing a metal oxide film according to the present invention, a solution containing an alkyl metal is sprayed onto a substrate placed under non-vacuum. Further, when the solution is sprayed, a dopant solution containing a dopant including an inorganic compound is sprayed onto the substrate. | 03-19-2015 |