Patent application number | Description | Published |
20080297869 | OSCILLATOR DEVICE AND DRIVE CONTROL METHOD FOR OSCILLATION SYSTEM OF OSCILLATOR DEVICE - An oscillator device includes an oscillation system having at least one oscillator configured to oscillate, the oscillation system having a plurality of natural oscillation modes with a plurality of frequencies which frequencies are mutually in a relationship of integral-number ratio, a driving system configured to drive the at least one oscillation system, and a drive control system configured to control the driving system, wherein the drive control system applies to the driving system a driving signal in the form of a rectangular pulse based on combining a plurality of rectangular pulse signals corresponding to the plurality of natural oscillation modes, respectively. | 12-04-2008 |
20090051992 | OSCILLATOR DEVICE, OPTICAL DEFLECTING DEVICE AND METHOD OF CONTROLLING THE SAME - Disclosed is an oscillator device that includes an oscillating system having a first oscillator, a second oscillator, a first torsion spring for connecting the first and second oscillators each other, and a second torsion spring being connected to the second oscillator and having a common torsional axis with the first torsion spring; a supporting system for supporting the oscillating system; a driving system for driving the oscillating system so that at least one of the first and second oscillators produces oscillation as can be expressed by an equation that contains a sum of a plurality of time functions; a signal producing system for producing an output signal corresponding to displacement of at least one of the first and second oscillators; and a drive control system for controlling the driving system on the basis of the output signal of the signal producing system so that at least one of amplitude and phase of the time function takes a predetermined value. | 02-26-2009 |
20090067019 | SWING MEMBER DEVICE, AND OPTICAL DEFLECTOR AND IMAGE-FORMING APPARATUS EMPLOYING THE SWING MEMBER DEVICE - A swing member device comprises a swingable part supported by a supporting part to be swingable around a torsional axis on a supporting base in at least one intrinsic oscillation mode: the swing member device having a temperature-raising unit for raising the temperature of ambient atmosphere in the region of swing motion of the swingable part, the temperature-raising unit raising the temperature of the ambient atmosphere to enable decrease of an influence of an unsteady dragging force caused by the ambient atmosphere. | 03-12-2009 |
20090130857 | METHOD OF MANUFACTURING A STRUCTURE BASED ON ANISOTROPIC ETCHING, AND SILICON SUBSTRATE WITH ETCHING MASK - A method of manufacturing a structure includes a first step of forming, on a monocrystal silicon substrate having a (100) surface as a principal surface, a basic etching mask corresponding to a target shape and having at least a first structure with a projecting corner and a second structure adjoining the first structure with an opening intervening therebetween, and a correction etching mask extending from the projecting corner of an etching mask of the first structure and connected to an etching mask of the second structure, and a second step of performing anisotropic etching of the monocrystal silicon substrate having the basic etching mask and the correction etching mask to form the target shape. | 05-21-2009 |
20090135472 | METHOD OF MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT HAVING OSCILLATOR DEVICE - A method of manufacturing an oscillator based on etching a monocrystal silicon substrate, the method including a mask forming step for forming, on the monocrystal silicon substrate, an etching mask having a pattern with a repetition shape comprised of a plurality of mutually coupled oscillators each including a torsion spring between a supporting base plate and a movable member, an etching step for etching the monocrystal silicon substrate while using the etching mask as a mask, to form on the monocrystal silicon substrate a repetition shape comprised of a plurality of corresponding mutually coupled oscillators, and a dicing step for determining a width of the movable member and the supporting base plate of each of the oscillators in the repetition shape, which width is effective to determine a resonance frequency of the individual oscillators required when these are used as oscillators, and for cutting by dicing the movable member and the supporting base plate between adjoining oscillators, at the determined width. | 05-28-2009 |
20090235502 | OSCILLATOR DEVICE, OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME - An oscillator device and a method of producing the same, that enables adjustment of an inertia moment or a gravity center position of an oscillating member through wide range and at high speed, wherein the oscillating member oscillates about an oscillation axis | 09-24-2009 |
20100007933 | MOVABLE BODY APPARATUS, AND OPTICAL INSTRUMENT USING THE MOVABLE BODY APPARATUS - An apparatus includes an oscillatory system having first and second movable bodies, and first and second elastic support portions, a driving portion having a permanent magnet, and a drive controlling portion. The oscillatory system has at least two characteristic oscillation modes of first and second resonance frequencies. The drive controlling portion supplies a driving signal to the driving portion so that the movable body of the oscillatory system is swingingly rotated. The swinging rotation is performed such that a sum of time periods wherein the angular displacement of the movable body changes in one direction is different from a sum changes in its opposite direction. The drive controlling portion includes a waveform adjusting portion for adjusting the driving signal. | 01-14-2010 |
20100053716 | METHOD OF FABRICATING A STRUCTURE BY ANISOTROPIC ETCHING, AND SILICON SUBSTRATE WITH AN ETCHING MASK - In a fabrication method of fabricating a structure, a basic etching mask corresponding a target shape with a convex corner, and a correction etching mask with a first portion, a second portion and an opening portion are formed on a single-crystal silicon substrate with a (100) principal face, and the silicon substrate with the basic etching mask and the correction etching mask formed thereon is subjected to an anisotropic etching to form the silicon substrate having the target shape. The first portion extends in a <110> direction, respective ends of the first portion are connected to the basic etching mask, and at least one end of the first portion is connected to the convex corner of the basic etching mask. The second portion is connected to a side of the first portion extending in the <110> direction, the second portion includes at least one convex corner, and the opening portion extends straddling a boundary between the first portion and the second portion. | 03-04-2010 |
20100092213 | OSCILLATOR DEVICE, OPTICAL DEFLECTOR AND IMAGE FORMING APPARATUS USING THE OPTICAL DEFLECTOR - An oscillator device includes an oscillation system, a driving member and a control device, wherein the oscillation system includes a first oscillation movable element, a second oscillation movable element and a support member, the first oscillation movable element being supported by a first elastic supporting element, for torsional oscillation relative to the second oscillation movable element and around an oscillation axis, the second oscillation movable element being supported by a second elastic supporting element, for torsional oscillation relative to the support member and around the oscillation axis, wherein the oscillation system has a first natural oscillation mode of a resonance frequency f | 04-15-2010 |
20100214636 | Method of Manufacturing Oscillator Device, and Optical Deflector and Image Forming Apparatus - A method of manufacturing an oscillator device having a fixed member and an oscillation plate supported by the fixed member through a supporting member for oscillation around a torsion axis, the oscillation plate being driven at a resonance frequency around the torsion axis, includes a frequency regulating step based on an extension member for adjustment of a mass of the oscillation plate, for forming the extension member on the oscillation plate and for adjusting the mass of the oscillation plate by cutting a portion of the extension member with the irradiation of a laser beam, an oscillator assembling step for fixing the fixed member to a fixed base, and a driving member assembling step for fixing a driving member for driving the oscillation plate to the fixed base, wherein at least the driving member assembling step is carried out after the frequency regulating step based on the extension member is performed. | 08-26-2010 |
20110019256 | METHOD OF MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT WITH OSCILLATOR DEVICE BASED ON IT - A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount. | 01-27-2011 |
20110064470 | LIGHT DEFLECTOR DEVICE AND IMAGE FORMING APPARATUS - A light deflector device includes a light deflector having an oscillation system, a driving unit for driving the oscillation system and a drive controlling unit for supplying a drive signal. The oscillation system simultaneously generates a first oscillating motion of a first frequency and a second oscillating motion of a second frequency. The drive controlling unit supplies a drive signal formed by synthetically combining a first signal having the first frequency and a second signal having the second frequency to the driving unit and, at the same time, another drive signal for changing at least the amplitude of the first oscillating motion, the amplitude of second oscillating motion or the relative phase difference of the first oscillating motion and the second oscillating motion to the driving unit in order to correct an offset of scanning light deflected by the light deflector. | 03-17-2011 |
20110116145 | METHOD OF MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT WITH OSCILLATOR DEVICE - A method of manufacturing an oscillator device having first and second oscillators being driven at first and second driving resonance frequencies gf1 and gf2, the method including a first step for processing the two oscillators, wherein, when the two oscillators are going to be processed as oscillators having first and second resonance frequencies different from the two driving resonance frequencies with a certain dispersion range, the two oscillators are so processed that the first and second resonance frequencies different from the two driving resonance frequencies become equal to first and second resonance frequencies f1 and f2, respectively, which are included in adjustable resonance frequency ranges, respectively, and a second step for adjusting the first and second resonance frequencies f1 and f2 so that they become equal to the first and second driving resonance frequencies gf1 and gf2, respectively. | 05-19-2011 |
20110198966 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER - A capacitive electromechanical transducer has at least one cell. The cell includes a first electrode, a movable vibrating portion including a second electrode disposed opposite the first electrode with a space therebetween, and a supporting portion that supports the vibrating portion. In order to regulate the strength of a border portion between the vibrating portion and the supporting portion, a strength regulating portion is provided. | 08-18-2011 |
20120091543 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - An electromechanical transducer includes multiple elements each including at least one cellular structure, the cellular structure including: a semiconductor substrate, a semiconductor diaphragm, and a supporting portion for supporting the diaphragm so that a gap is formed between one surface of the substrate and the diaphragm. The elements are separated from one another at separating locations of a semiconductor film including the diaphragm. Each of the elements includes in a through hole passing through a first insulating layer including the supporting portion and the semiconductor substrate: a conductor which is connected to the semiconductor film including the diaphragm; and a second insulating layer for insulating the conductor from the semiconductor substrate. | 04-19-2012 |
20120146454 | CAPACITIVE ELECTROMECHANICAL TRANSDUCER APPARATUS AND METHOD FOR ADJUSTING ITS SENSITIVITY - A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided. | 06-14-2012 |
20120163124 | ULTRASONIC DETECTION DEVICE AND ULTRASONIC DIAGNOSTIC DEVICE - Provided is an ultrasonic detection device including: a capacitive electromechanical transducer including a cell that includes a first electrode and a second electrode disposed so as to oppose with a space; a voltage source for developing a potential difference between the first electrode and the second electrode; and an electric circuit for converting a current, which is caused by a change in electrostatic capacitance between the first electrode and the second electrode due to vibration of the second electrode, into a voltage, in which the capacitive electromechanical transducer provides an output current with a high-pass characteristic having a first cutoff frequency with respect to a frequency, the electric circuit provides an output with a low-pass characteristic having a second cutoff frequency with respect to the frequency, and the second cutoff frequency is smaller than the first cutoff frequency. | 06-28-2012 |
20120256518 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - A method of producing an electromechanical transducer includes forming an insulating film on a first electrode, forming a sacrificial layer on the insulating film, forming a first membrane on the sacrificial layer, forming a second electrode on the first membrane, forming an etching-hole in the first membrane and removing the sacrificial layer through the etching-hole, and forming a second membrane on the second electrode, and sealing the etching-hole. Forming the second membrane and sealing the etching-hole are performed in one operation. | 10-11-2012 |
20120256519 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less. | 10-11-2012 |
20120256520 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode. | 10-11-2012 |
20130069480 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE ELECTROMECHANICAL TRANSDUCER - An electromechanical transducer with less characteristic variation and a method of manufacturing the electromechanical transducer is provided. The electromechanical transducer has a plurality of cells constituted of a first electrode, a vibration film provided with a second electrode provided so as to face the first electrode through a gap, and a supporting portion supporting the vibration film. A structure configured to reduce an uneven flatness between the vibration film and the supporting portion is provided at an outer peripheral portion of a gap while a portion of the supporting portion is interposed between the structure and the gap. | 03-21-2013 |
20130081471 | ELECTROMECHANICAL TRANSDUCER DEVICE AND ANALYTE INFORMATION ACQUIRING APPARATUS - To suggest an electromechanical transducer device with a high S/N ratio, an electromechanical transducer device includes a first substrate; electromechanical transducer elements two-dimensionally arrayed on a front surface of the first substrate and configured to provide conversion between acoustic waves and electric signals; an electric wiring substrate that is a second substrate electrically connected with a back surface of the first substrate; a first acoustic matching layer provided between the first substrate and the second substrate; an acoustic attenuating member arranged on a back surface of the second substrate; and a second acoustic matching layer provided between the second substrate and the acoustic attenuating member. | 04-04-2013 |
20130126993 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - The present invention relates to an electromechanical transducer and a method of producing it, in which the substrate rigidity is maintained to prevent the substrate from being broken during formation of dividing grooves or a film. | 05-23-2013 |
20140010052 | CAPACITIVE TRANSDUCER - Provided is a capacitive transducer having a wide frequency band width and an improved transmitting and receiving sensitivity, the capacitive transducer including an element including a plurality of cells: each of the plurality of cells including: a first electrode; a vibrating film including a second electrode, the second electrode being opposed to the first electrode with a gap; and a supporting portion that supports the vibrating film, in which the element includes a first cell and a second cell as the cell, the first cell including the vibrating film having a first spring constant, the second cell including the vibrating film having a second spring constant smaller than the first spring constant; and a distance between the first electrode and the second electrode of the first cell is smaller than a distance between the first electrode and the second electrode of the second cell. | 01-09-2014 |
20140010388 | CAPACITIVE TRANSDUCER, CAPACITIVE TRANSDUCER MANUFACTURING METHOD, AND OBJECT INFORMATION ACQUISITION APPARATUS - Provided is a capacitive transducer having broadband frequency characteristics. The capacitive transducer includes an element which has multiple kinds of cells, each cell including: a first electrode; a vibrating film including a second electrode, the second electrode being opposed to the first electrode with a gap; and a support portion that supports the vibrating film so as to form the gap. The multiple kinds of cells have different ratios of an area of one of the first electrode and the second electrode to an area of the gap when viewed from a normal direction of the vibrating film. The first electrodes or the second electrodes in the multiple kinds of cells are electrically connected together. | 01-09-2014 |
20140102204 | PROBE, OBJECT INFORMATION ACQUISITION APPARATUS, AND METHOD OF MANUFACTURING THE PROBE - A probe configured to receive an acoustic wave from an object including an element having a cell structure, in which a vibration membrane having one of a pair of electrodes formed with a gap arranged therebetween is supported so that the vibration membrane can be vibrated by the acoustic wave; a light reflection layer provided at a position near the object with respect to the element and configured to reflect light; and a support layer provided between the element and the light reflection layer and configured to support the light reflection layer. | 04-17-2014 |
20140120646 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF MANUFACTURING THE SAME - An electromechanical transducer includes multiple elements each including at least one cellular structure, the cellular structure including: a semiconductor substrate, a semiconductor diaphragm, and a supporting portion for supporting the diaphragm so that a gap is formed between one surface of the substrate and the diaphragm. The elements are separated from one another at separating locations of a semiconductor film including the diaphragm. Each of the elements includes in a through hole passing through a first insulating layer including the supporting portion and the semiconductor substrate: a conductor which is connected to the semiconductor film including the diaphragm; and a second insulating layer for insulating the conductor from the semiconductor substrate. | 05-01-2014 |
20140241129 | ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME - An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less. | 08-28-2014 |
20140313861 | TRANSDUCER, METHOD FOR MANUFACTURING TRANSDUCER, AND OBJECT INFORMATION ACQUIRING APPARATUS - A transducer includes at least one element including a plurality of cells. Each of the cells includes a pair of electrodes disposed with a gap therebetween and a vibrating membrane including one of the electrodes, and the vibrating membrane is vibratably supported. First and second cells of the plurality of cells in the element have the gaps that communicate with each other, and the first cell and a third cell in the element have the gaps that do not communicate with each other. | 10-23-2014 |
20150016221 | TRANSDUCER AND SUBJECT INFORMATION ACQUISITION APPARATUS - A transducer includes a plurality of elements each including at least one cell structured in such a way that a diaphragm including one of a first electrode and a second electrode disposed facing each other via a space is vibratably supported, bias wiring for supplying a bias voltage to the first electrode to provide a potential difference between the first and the second electrodes, and for electrically connecting the first electrodes of the elements to each other, and signal wiring lines each connected to a different one of the elements. The bias wiring includes a plurality of branch wiring lines to each of which the first electrodes of a part of the elements are connected, a plurality of first common wiring lines for connecting the branch wiring lines to each other, and a second common wiring line for connecting the first common wiring lines to each other. | 01-15-2015 |
20150057547 | CAPACITIVE TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME - A method for manufacturing a capacitive transducer is provided having a structure in which a vibrating film is supported to be able to vibrate. The method includes forming a sacrificial layer on a first electrode; forming a layer on the sacrificial layer, the layer forming at least part of the vibrating film; removing the sacrificial layer, including forming etching holes to communicate with the sacrificial layer; forming a sealing layer for sealing the etching holes; and etching at least part of the sealing layer. Before forming the sealing layer, an etching stop layer is formed on the layer forming at least part of the vibrating film. In the step of etching at least part of the sealing layer, the sealing layer is removed until the etching stop layer is reached. | 02-26-2015 |