Patent application number | Description | Published |
20100229967 | MASS FLOW CONTROLLER VERIFYING SYSTEM, VERIFYING METHOD AND VERIFYING PROGRAM - In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately. | 09-16-2010 |
20120101744 | FLUID MEASUREMENT SYSTEM - This invention is to improve procedures of maintenance of a fluid measurement system having a fluid measurement device and a control device. The fluid measurement system has a fluid measurement device and a control device to control the fluid measurement device, and the fluid measurement device comprises a fluid sensor and a related data store part configured to store fluid calculation related data for calculation of one or more fluid parameters with measurement data obtained by the fluid sensor, and the control device obtains the fluid calculation related data from the related data store part and calculates the one or more fluid parameters with the measurement data of the fluid sensor and the fluid calculation related data. | 04-26-2012 |
20120318383 | FLOW RATE MEASURING DEVICE AND FLOW RATE CONTROLLER - A flow rate measuring device includes a fluid resistance member through which measurement target fluid flows; an upstream side pressure sensor configured to measure pressure on an upstream side of the fluid resistance member from a change of electrical resistance of a resistive element attached to a pressure sensitive surface onto which the target fluid is introduced, and also to measure a temperature of the pressure sensitive surface from a temperature-dependent change of the electrical resistance of the resistive element; a temperature sensor to measure a temperature of the target fluid flowing through the fluid resistance member; and a flow rate calculation part that calculates a flow rate of the target fluid based on the pressure measured by the upstream side pressure sensor, pressure-flow rate characteristics of the fluid resistance member, the upstream side pressure sensor temperature, and the target fluid temperature in the fluid resistance member. | 12-20-2012 |
20130087230 | FLUID MECHANISM, SUPPORT MEMBER CONSTITUTING FLUID MECHANISM AND FLUID CONTROL SYSTEM - This invention provides a fluid mechanism that can arrange a plurality of fluid device units and external fluid devices mounted as a set on the fluid device units effectively and compactly. Each of the fluid device units is arranged with respective side surfaces in a longitudinal direction of the fluid device unit tightly attached, and the external fluid devices are arranged side-by-side external to and outside of the fluid device unit in the width direction. Furthermore, as for an introducing path and a discharging path that connect the external fluid devices and the fluid device unit, the introducing path, which is short, is connected to the discharging path, which is long. | 04-11-2013 |
20130092256 | FLOW RATE CONTROL DEVICE, DIAGNOSTIC DEVICE FOR USE IN FLOW RATE MEASURING MECHANISM OR FOR USE IN FLOW RATE CONTROL DEVICE INCLUDING THE FLOW RATE MEASURING MECHANISM AND RECORDING MEDIUM HAVING DIAGNOSTIC PROGRAM RECORDED THEREON FOR USE IN THE SAME - The flow rate control device is provided with: a fluid resistor provided on the flow channel; a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor; a stable state judging part configured to judge, based on the measurement flow rate value or a measurement pressure value measured by the pressure sensor, whether or not a state of the fluid flowing through the flow channel is in a stable state; and an abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value based on a variation amount of the measurement pressure value in the case where the stable state judging part judges that the state of the fluid is in a stable state. | 04-18-2013 |
20130092257 | FLOW RATE CONTROL DEVICE, DIAGNOSTIC DEVICE FOR USE IN FLOW RATE MEASURING MECHANISM OR FOR USE IN FLOW RATE CONTROL DEVICE INCLUDING THE FLOW RATE MEASURING MECHANISM AND RECORDING MEDIUM HAVING DIAGNOSTIC PROGRAM RECORDED THEREON FOR USE IN THE SAME - The flow rate control device is provided with: a fluid resistor provided on the flow channel; a pressure sensor provided in any one of an upstream side or a downstream side of the fluid resistor; a pressure calculating part configured to calculate a pressure in a side with respect to the fluid resistor where the pressure sensor is not provided; a flow rate calculating part configured to calculate a flow rate based on the measurement pressure value and a calculation pressure value calculated by the pressure calculating part; and an abnormality diagnosing part configured to diagnose an abnormality of the measurement flow rate value based on the measurement flow rate value and a calculation flow rate value. | 04-18-2013 |
20130092258 | FLOW RATE CONTROL DEVICE, AND DIAGNOSTIC DEVICE AND RECORDING MEDIUM RECORDED WITH DIAGNOSTIC PROGRAM USED FOR FLOW RATE CONTROL DEVICE - In order to be able to diagnose an abnormality occurring in a flow rate control valve with high reliability, and for example, if an abnormality occurs in the flow rate control valve, quickly perform appropriate maintenance or the like, a first measured flow rate diagnostic part that, on the basis of a second measured flow rate value or a measured pressure value, diagnoses an abnormality of a first measured flow rate value, and a valve diagnostic part that, when the first measured flow rate diagnostic part diagnoses that the first measured flow rate value has no abnormality, diagnoses an abnormality of the flow rate control valve are provided. | 04-18-2013 |
20130174635 | MASS FLOW CONTROLLER VERIFYING SYSTEM, VERIFYING METHOD AND VERIFYING PROGRAM - In a mass flow controller verifying system, there are provided a verifying gas line arranged in parallel to influent flow gas lines and joined into a post-confluent flow gas line, a reference volume calculating portion adapted to calculate a reference volume determined for a specified piping of a gas piping system, a verifying parameter calculating portion adapted to calculate a verifying parameter based on time series data of a measurement pressure measured by a pressure measurement unit during a control of a flow rate by a mass flow controller to be verified, and a comparing portion adapted to compare a reference parameter set based on the reference volume and the verifying parameter, whereby the verifying system can be introduced into an existing gas piping system used in a semiconductor manufacturing process and so forth at a low cost and is capable of verifying a mass flow controller quickly and accurately. | 07-11-2013 |
20140034164 | Flow Rate Control Device - The flow rate control device comprises a basal plate block wherein a single input port into which a fluid flows, a single output port from which the fluid flows out, two inflow channels whose proximal ends are connected to the input port and two outflow channels whose terminal ends are connected to the output port are formed, and two flow rate control units arranged on the basal plate block, and one of the flow rate control units is arranged between one of the inflow channels and one of the outflow channels, the other flow rate control unit is arranged between the other inflow channel and the other outflow channel, and each of the flow rate control units is configured to be capable of operating independently. | 02-06-2014 |
20140070128 | Valve Element and Fluid Control Valve - The present invention is directed a valve element which is intended to improve a sealing property at a time of closing a fluid control valve and to improve stability while maintaining durability for a long time period, wherein the valve element constitutes one of a valve seat surface or a seating surface and the valve element includes a concave portion formed in an opposing surface facing the valve seat surface and a resin coating film which is formed in the concave portion and contacts the valve seat surface. | 03-13-2014 |
20140167366 | SEALING MEMBER AND METHOD OF MANUFACTURING THE SAME - The present invention is mainly intended to provide a sealing member which can be easily manufactured and which is capable of sealing with high accuracy and a method of manufacturing the sealing member, wherein the sealing member is a metallic sealing member that is arranged so as to be interposed between a first surface and a second surface which are facing each other. The sealing member is provided with a first protrusion protruded toward the first surface and a pair of second protrusions protruded toward the second surface, wherein the first protrusion is arranged between the paired second protrusions and distal end portions of the first protrusion and second protrusions are mutually parallel flat surfaces. | 06-19-2014 |
20140182726 | FLUID MIXING ELEMENT - The fluid mixing element in accordance with this invention forms a first internal flow channel whose starting end opens on an end surface of one end part and whose terminal end opens on an end surface of the other end part and a second internal flow channel whose starting end opens on a side peripheral surface of a middle part and whose terminal end opens on an end surface of the other end part. It is possible for the fluid mixing element to securely mix a first fluid flowing in a main flow channel with a second fluid flowing in a sub-flow channel by the use of a pipe with a short length with a simple arrangement. | 07-03-2014 |
20140290778 | FLUID CONTROL VALVE - In order to make it possible to increase a diameter and output thereof, a diaphragm structure is provided that has low repulsiveness, can be largely deformed to increase a stroke even without being applied with a large force from an actuator, and is unlikely to give rise to a defect or fault even when formed thin, and a fluid control valve is provided with the diaphragm structure and the actuator that presses the diaphragm structure, wherein the diaphragm structure is provided with: a protruding part that is formed in a tubular shape and pressed by the actuator; a brim part that spreads from a base end of the protruding part outward with respect to the protruding part; and a support part that is formed on an outer circumference of the brim part and attached to another member, and the brim part is formed in a film shape. | 10-02-2014 |
20150013792 | FLUID RESISTANCE DEVICE - In order to be able to stably manufacture a fluid resistance device having the same resistance characteristics while preventing fluid such as gas from leaking, a fluid resistance device is provided with a fluid resistance element having a resistance flow passage, a base member and a fixing member for holding the fluid resistance element to be fixed between the base member and the fixing member, and a thin plate-shaped seal member interposed between the fixing member and the fluid resistance element. | 01-15-2015 |