| Patent application number | Description | Published |
|---|
| 20090203221 | APPARATUS AND METHOD FOR INCORPORATING COMPOSITION INTO SUBSTRATE USING NEUTRAL BEAMS - An apparatus and method for incorporating a composition into a substrate using neutral beams are provided to repeatedly process an oxide layer using the neutral beams having low energy to minimize electrical damage to the oxide layer and improve characteristics of the oxide layer. The apparatus is mounted in a plasma generating chamber, and includes: an ion beam generating gas inlet, which injects a gas for generating ion beams; an ion source, which generates the ion beams having a polarity from the gas introduced through the ion beam generating gas inlet; a grid assembly, which is installed on one end of the ion source; a reflector, which is aligned with the grid assembly and converts the ion beams to the neutral beams; and a stage, on which the substrate is placed on a traveling path of the neutral beams. Formation of the oxide layer and application of the neutral beams are repeatedly performed on the substrate so as to improve the characteristics of the oxide layer. | 08-13-2009 |
| 20090203226 | NEUTRAL BEAM-ASSISTED ATOMIC LAYER CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF PROCESSING SUBSTRATE USING THE SAME - A neutral beam-assisted atomic layer chemical vapor deposition (ALCVD) apparatus is provided for uniformly depositing an oxide layer filling a planarization layer or a trench to increase uniformity and density of the oxide layer using neutral beams generated by a neutral beam generator without a seam or void occurring in an atomic layer deposition (ALD) or ALD-like chemical vapor deposition (CVD) process, thereby solving problems on the void or seam and low density occurring when a high-density planarization layer or a shallow trench having a width of 65 nm or less is formed, and improving a next generation oxide layer isolation process. The neutral beam-assisted ALCVD apparatus includes: an ALCVD apparatus, which deposits an oxide layer in order to form a pattern in a semiconductor substrate; and a neutral beam generator, which converts ion beams to neutral beams in order to remove a seam or void in the oxide layer deposited between the patterns, and applies the neutral beams to the oxide layer deposited to form the pattern. | 08-13-2009 |
| 20090323964 | SYSTEM AND METHOD OF UPDATING KEY BASED ON COMMUNICATION COST AND SECURITY DAMAGE COST - A system and method of updating a key based on communication and security damage costs are provided. The key updating system for group communication between a plurality of group members, includes a key update cycle determining unit to determine a key update cycle based on a communication cost and a security damage cost, and a key updating unit to perform a key updating with respect to one or more group members of the group communication based on the determined key update cycle. | 12-31-2009 |
| 20100295068 | LIGHT EMITTING DEVICE PACKAGE AND LIGHTING APPARATUS USING THE SAME - In one embodiment, the light emitting device package includes a package body, electrodes attached to the package body, and at least two light emitting devices electrically connected to the electrodes. Each light emitting device emits light of a different color from the other light emitting devices. A protective layer is formed over the at least two light emitting devices, and a phosphor layer formed over the protective layer. Other embodiments include other structures such a individual phosphor layers on each light emitting device. And, a light apparatus including a package may include a single driver driving the light emitting devices of the package. | 11-25-2010 |
| 20120023147 | SYSTEM AND METHOD OF PROVIDING CONTENTS FOR MOBILE COMMUNICATION TERMINAL - A system and method of providing content for a mobile communication terminal are disclosed. In one embodiment, the method includes i) receiving package list data for content from a mobile communication terminal, wherein the content is organized into a plurality of individual files, and wherein the package list data comprises individual ID, size and version data of each of the individual files stored in the mobile communication terminal and ii) comparing, at a content server, at least one of the sizes and individual version data of at least two files having the same individual ID that are stored in the content server and mobile communication terminal. The method may further include transmitting at least one individual file stored in the content server to the mobile communication terminal, wherein the at least one individual file has individual file data different from the corresponding file indicated in the package list data. | 01-26-2012 |
| 20120129347 | Apparatus and Method For Incorporating Composition Into Substrate Using Neutral Beams - An apparatus and method for processing a surface of a substrate using neutral beams are provided to repeatedly process an oxide layer using the neutral beams having low energy to minimize electrical damage to the oxide layer and improve characteristics of the oxide layer. The apparatus is mounted in a plasma generating chamber, and includes: an ion beam generating gas inlet, which injects a gas for generating ion beams; an ion source, which generates the ion beams having a polarity from the gas introduced through the ion beam generating gas inlet; a grid assembly, which is installed on one end of the ion source; a reflector, which is aligned with the grid assembly and converts the ion beams to the neutral beams; and a stage, on which the substrate is placed on a traveling path of the neutral beams. | 05-24-2012 |
| 20120143402 | SYSTEM AND METHOD FOR UPDATING VEHICLE INFORMATION USING WIRELESS ACCESS POINT CONNECTED TO TELEMATICS SERVER - The present invention provides a technique for updating vehicle information using a wireless access point connected to a telematics server. More specifically, the system includes a wireless communication unit configured to connect to the wireless access point through, e.g., Wi-Fi network, to automatically receive an update data container(s), when the update data container(s) regarding the vehicle information is present in the telematics server; a control unit configured to store the update data container(s) received through the wireless communication unit and control the vehicle information and one or more devices corresponding to the vehicle information; and an update unit configured to update the vehicle information by using the update data container(s). | 06-07-2012 |
| 20130040377 | PCR DEVICE INCLUDING TWO HEATING BLOCKS - According to the present invention, a PCR device including two heating blocks which is used for nucleic acid amplification reactions is disclosed. Using the PCR device of the present invention, nucleic acid amplification reactions can be efficiently performed. | 02-14-2013 |
