Patent application number | Description | Published |
20100049601 | METHOD AND APPARATUS FOR MANAGING SUBSCRIPTIONS - A subscription system allows a customer to establish a subscription to a product with one or more retailers (e.g., by establishing the subscription through a controller or central system). In one embodiment, a subscription may be established after receiving information that identifies a product. Terms of a subscription for the product are established, such as a frequency and a duration of the subscription. | 02-25-2010 |
20120150612 | METHOD AND APPARATUS FOR MANAGING SUBSCRIPTIONS - A subscription system allows a customer to establish a subscription to a product with one or more retailers (e.g., by establishing the subscription through a controller or central system). In one embodiment, a subscription may be established after receiving information that identifies a product. Terms of a subscription for the product are established, such as a frequency and a duration of the subscription. | 06-14-2012 |
20140012755 | METHOD AND APPARATUS FOR MANAGING SUBSCRIPTIONS - A subscription system allows a customer to establish a subscription to a product with one or more retailers (e.g., by establishing the subscription through a controller or central system). In one embodiment, a subscription may be established after receiving information that identifies a product. Terms of a subscription for the product are established, such as a frequency and a duration of the subscription. | 01-09-2014 |
20150066767 | METHOD AND APPARATUS FOR MANAGING SUBSCRIPTIONS - A subscription system allows a customer to establish a subscription to a product with one or more retailers (e.g., by establishing the subscription through a controller or central system). In one embodiment, a subscription may be established after receiving information that identifies a product. Terms of a subscription for the product are established, such as a frequency and a duration of the subscription. | 03-05-2015 |
Patent application number | Description | Published |
20100065445 | Pre-Packaged, Customized, Woven, Wet Towel - The invention relates to a pre-packaged, pre-moistened towel, which is customized. The towel is made from a woven cloth material, which can be customized by printing logos, designs or words on the towel. The towel can be either disposable or reusable. | 03-18-2010 |
20120096811 | Method for Production of Printed and Packaged Cloth Wipes - The invention relates to a pre-packaged, pre-moistened cloth wipe, which is customized. The towel is made from a woven cloth material, which can be customized by printing logos, designs or words on the towel. The cloth wipe can be either disposable or reusable. The invention also relates to a method of making, printing, and packaging the cloth wipe. | 04-26-2012 |
20130249358 | Portable Mobile Device Protective Cover - The present invention relates to a three-dimensional protective cover for portable mobile devices. These covers are intended to protect the device in a decorative and personalized manner. The covers are also intended to provide the ability to view the device in an upright orientation. | 09-26-2013 |
Patent application number | Description | Published |
20110235777 | High-Energy X-Ray-Spectroscopy-Based Inspection System and Methods to Determine the Atomic Number of Materials - The application discloses systems and methods for X-ray scanning for identifying material composition of an object being scanned. The system includes at least one X-ray source for projecting an X-ray beam on the object, where at least a portion of the projected X-ray beam is transmitted through the object, and an array of detectors for measuring energy spectra of the transmitted X-rays. The measured energy spectra are used to determine atomic number of the object for identifying the material composition of the object. The X-ray scanning system may also have an array of collimated high energy backscattered X-ray detectors for measuring the energy spectrum of X-rays scattered by the object at an angle greater than 90 degrees, where the measured energy spectrum is used in conjunction with the transmission energy spectrum to determine atomic numbers of the object for identifying the material composition of the object. | 09-29-2011 |
20120155592 | SYSTEMS AND METHODS FOR DETECTING NUCLEAR MATERIAL - The present specification discloses a system for detecting nuclear material based on at least one source of probing radiation and the radiation signatures generated from interrogating an object under inspection. In addition, the present specification describes a threshold-activation detector capable of detecting prompt neutrons, via the activation, after the source's blinding radiation has stopped. The threshold-activation detector can be manufactured from liquid fluorocarbons that allow for the detection of beta radiation and gamma rays. | 06-21-2012 |
20140321588 | Integrated Primary and Special Nuclear Material Alarm Resolution - The present specification discloses methods for inspecting an object. The method includes scanning an object in a two-step process. In the primary scan, a truck or cargo container (container) is completely scanned with a fan beam radiation, the transmitted radiation is measured with an array of detectors, and the transmission information and optionally the fission signatures are analyzed to determine the presence of high-density, high-Z and fissionable materials. If the container alarms in one or more areas, the areas are subjected to a secondary scan. This is done by precisely repositioning the container to the location of the suspect areas, adjusting the scanning system to focus on the suspect areas, performing a stationary irradiation of the areas, and analyzing the measured feature signatures to clear or confirm the presence of SNM. | 10-30-2014 |
20140341341 | High-Energy X-Ray-Spectroscopy-Based Inspection System and Methods to Determine the Atomic Number of Materials - The application discloses systems and methods for X-ray scanning for identifying material composition of an object being scanned. The system includes at least one X-ray source for projecting an X-ray beam on the object, where at least a portion of the projected X-ray beam is transmitted through the object, and an array of detectors for measuring energy spectra of the transmitted X-rays. The measured energy spectra are used to determine atomic number of the object for identifying the material composition of the object. The X-ray scanning system may also have an array of collimated high energy backscattered X-ray detectors for measuring the energy spectrum of X-rays scattered by the object at an angle greater than 90 degrees, where the measured energy spectrum is used in conjunction with the transmission energy spectrum to determine atomic numbers of the object for identifying the material composition of the object. | 11-20-2014 |
Patent application number | Description | Published |
20090107046 | FUEL FEED SYSTEM FOR A GASIFIER AND METHOD OF GASIFICATION SYSTEM START-UP - A fuel feed system for use in a gasification system includes a feed preparation section, a pressurization and conveyance section, and a slag additive section. The feed preparation section is configured to grind the fuel to a predetermined size and to adjust the moisture content within the particulate fuel. The pressurization and conveyance section is coupled in flow communication with the feed preparation section, and includes at least one solids pump configured to receive a flow of the particulate fuel at a first pressure and discharge the particulate fuel at a second pressure. The slag additive section is configured to feed a slag additive mixture into the gasifier and to substantially control the total water content within the gasification system. | 04-30-2009 |
20090158664 | ROTARY APPARATUS FOR USE WITH A GASIFIER SYSTEM AND METHODS OF USING THE SAME - A method for transporting a solid particulate within a gasifier system is provided. The method includes discharging solid particulate through an inlet into an opening defined within a rotor, wherein the inlet and the solid particulate are at a first pressure. The method further includes rotating the rotor such that at least one end of the opening is aligned in flow communication with a duct at a second pressure that is different from the first pressure. The solid particulate is discharged from the rotor opening through an outlet such that the solid particulate is at the second pressure, and the rotor is rotated such that at least one end of the rotor opening is aligned in flow communication with a pressure source that is at approximately the first pressure, and such that the opening is at the first pressure. | 06-25-2009 |
20090178338 | FUEL FEED SYSTEM FOR A GASIFIER AND METHOD OF GASIFICATION SYSTEM START-UP - A method of startup for a gasification system includes assembling a fuel mixture for use by a gasifier at a fuel mixture assembly point, wherein the fuel mixture includes a quantity of particulate solid fuel and a quantity of non-ventable carrier gas. The method includes channeling the fuel mixture through a first conduit to a fuel mixture disassembly system including a non-ventable carrier gas removal apparatus, establishing a substantially steady flow of the fuel mixture within the first conduit, and redirecting the fuel mixture through a second conduit to the gasifier to facilitate gasifier startup. | 07-16-2009 |
20090199474 | APPARATUS FOR COOLING AND SCRUBBING A FLOW OF SYNGAS AND METHOD OF ASSEMBLING - A method of assembling a spray quench apparatus is provided. The method includes coupling a first end of an exit tube to a quench chamber such that the exit tube end is in flow communication with the quench chamber, coupling at least one spray nozzle to an opposite second end of the exit tube such that water emitted from the spray nozzle fills the exit tube and forms a film of water across an inner surface of the exit tube, coupling a water source to the quench chamber for providing a substantially continuous water film along an inner surface of the quench chamber, and coupling at least one discharge apparatus to the quench chamber for providing water spray into the quench chamber, wherein the water of the water film and water sprays drains into a water sump. | 08-13-2009 |
20090202403 | METHOD AND APPARATUS FOR COOLING SYNGAS WITHIN A GASIFIER SYSTEM - A method of assembling a synthesis gas (syngas) cooler for a gasification system includes positioning a dip tube within a shell of the syngas cooler. The dip tube is configured to quench the syngas flowing through the shell and/or at least partially channel the syngas through the dip tube. The method also includes coupling an isolation tube to the dip tube such that the isolation tube is substantially concentrically aligned with, and radially outward of, the dip tube. The isolation tube is coupled in flow communication with a purge gas source and is configured to at least partially form a dynamic pressure seal. The method further includes coupling at least one of the isolation tube and the dip tube in fluid communication with a fluid retention chamber. The method also include at least partially filling the fluid retention chamber with fluid, thereby further forming the dynamic pressure seal. | 08-13-2009 |
20090272821 | METHODS AND SYSTEMS FOR MIXING REACTOR FEED - Methods and systems for a feed injector are provided. The feed injector system includes a plurality of annular channels that are substantially concentric about a longitudinal axis. The plurality of annular channels direct a flow of fluid substantially axially therethrough from a respective source to a reaction zone. The feed injector system also includes a swirl member extending into the fluid flow path defined in at least one of the plurality of annular channels wherein the swirl member is configured to impart a circumferential flow direction to fluid flowing through the at least one annular channel. | 11-05-2009 |
20090272822 | FEED INJECTOR SYSTEMS AND METHODS - A feed injector system comprises substantially concentric channels with one being configured for pneumatically conveying pulverized solid fuel feed from a respective source to a reaction zone and another configured to impart convey a fluid oxidizer stream with and without swirl. | 11-05-2009 |
20120017562 | HIGH PRESSURE CONVEYANCE GAS SELECTION AND METHOD OF PRODUCING THE GAS - A method is provided that includes removing carbon dioxide from untreated syngas received from a gasifier to produce a gas stream comprising carbon dioxide, modifying the gas stream by adding carbon monoxide, hydrogen, hydrogen sulfide, or any combination thereof, and providing the gas stream from an acid gas remover to a feed system for use as a conveyance gas to convey a feedstock into the gasifier. Systems implementing these and other methods are also provided. | 01-26-2012 |
20120036823 | METHODS AND SYSTEMS FOR MONITORING A SEAL ASSEMBLY - A method for monitoring functionality of a seal assembly within an injector feed assembly is described. The method includes providing a buffer fluid to the seal assembly, measuring at least one of a pressure and a flow rate of the buffer fluid, and determining a functionality of the seal assembly based at least partially on the at least one of a pressure and a flow rate of the buffer fluid. | 02-16-2012 |
20120037732 | ANNULAR INJECTOR ASSEMBLY AND METHODS OF ASSEMBLING THE SAME - An annular injector is described. The injector includes a first bayonet assembly and a second bayonet assembly each including a terminal end and a tip end. The second bayonet assembly is configured to be concentrically coupled at least partially about the first bayonet assembly. An outer diameter of the first bayonet assembly and an inner diameter of the second bayonet assembly vary at the tip end to define a first substantially annular nozzle. The first bayonet assembly includes a maximum outer diameter that is greater than a minimum inner diameter of the second bayonet assembly and at least a portion of at least one of the first bayonet assembly and the second bayonet assembly extends from the tip end to the terminal end. The injector includes a third bayonet assembly configured to be concentrically coupled at least partially about the second bayonet assembly to define a second substantially annular nozzle. | 02-16-2012 |
20130183204 | SYSTEM FOR DEAERATION IN A FLASH VESSEL - The disclosed embodiments relate to systems for deaerating a stream of slag sump water produced by a gasifier. For example, in one embodiment, a system includes a flash vessel having a first inlet configured to introduce a first fluid into the flash vessel, wherein the flash vessel is configured to flash the first fluid to produce a first flash gas, a second inlet configured to introduce a stream from slag sump into the flash vessel, wherein the stream from slag sump comprises a mixture of a gasification fine slag, dissolved oxygen (O | 07-18-2013 |
20140270993 | SOLIDS SUPPLY SYSTEM AND METHOD FOR SUPPLYING SOLIDS - A pressure control system is provided. The pressure control system includes a first pressure sensing device configured to obtain a first pressure measurement including at least one of a first differential pressure and a first pressure, the first pressure measurement obtained from at least one of within and downstream from a solids supply system, a second pressure sensing device configured to obtain a second pressure measurement including at least one of a second differential pressure and a second pressure within the solids supply system, and a pressure controller configured to use the first pressure measurement and the second pressure measurement to control a pressure within the solids supply system. | 09-18-2014 |
Patent application number | Description | Published |
20130081925 | SYSTEM AND METHOD FOR TRANSPORTING SOLID FEED IN A SOLID FEED PUMP - A system includes a solid feed pump configured to transport a solid feedstock. The solid feed pump includes at least one passage for the transport of the solid feedstock. The solid feed pump also includes at least one movable wall configured to move along the passage. The solid feed pump further includes a retractable gripping element configured to extend from the at least one movable wall into the at least one passage to grip a portion of the solid feedstock. In addition, the retractable gripping element is configured to retract away from the at least one passage. | 04-04-2013 |
20130180175 | GASIFICATION SYSTEM AND METHOD FOR GASIFYING A FUEL - A system includes a gasification feed injector. The gasification feed injector includes a first injector portion configured to inject a first fuel at a first flow rate and a second injector portion configured to inject a second fuel at a second flow rate. The system also includes a fuel circulation system configured to circulate at least one fuel and supply the at least one fuel to the gasification feed injector and a controller configured to transition the gasification feed injector from injecting the first fuel to injecting the second fuel based at least on a pressure downstream of the gasification feed injector. | 07-18-2013 |
20130192137 | SYSTEM AND METHOD FOR HEATING A GASIFIER - A system includes a gasifier injector configured to inject a heat control fuel and a mixed air into a gasifier for combustion during a heat control mode. The heat control fuel is the same or different from the gasification fuel, and the system is configured to create the mixed air from independent supplies of oxygen and nitrogen. | 08-01-2013 |
20130192139 | SYSTEM AND METHOD FOR HEATING A GASIFIER - A system includes a gasifier configured to gasify a gasification fuel during a gasification mode. The system also includes a first injector configured to inject a heat control fuel and an oxygen enriched air into the gasifier for combustion during a heat control mode. The heat control fuel is the same or different from the gasification fuel, and the oxygen enriched air includes air enriched with additional oxygen. | 08-01-2013 |
20140150288 | SYSTEM AND METHOD FOR REMOVAL OF LIQUID FROM A SOLIDS FLOW - A system includes a multi-feeder assembly. The multi-feeder assembly includes a first solids feeder, a liquid removal section, and a second solids feeder. The first solids feeder is configured to receive a solids flow from an upstream system. The liquid removal section is configured to reduce an amount of liquid in the solids flow. The second solids feeder is configured to receive the solids flow in series with the first solids feeder and output the solids flow to a downstream system. | 06-05-2014 |
20140150873 | MULTI-STAGE SOLIDS FEEDER SYSTEM AND METHOD - A system includes a multi-stage solids feeder. The multi-stage solids feeder includes a first solids feeder having a first inlet and a first outlet, a second solids feeder having a second inlet and a second outlet, and a conduit disposed between the first outlet and the second inlet. The second solids feeder is disposed adjacent to the first solids feeder, and the conduit routes a solids flow from the first solids feeder to the second solids feeder. | 06-05-2014 |
20140151191 | SYSTEM AND METHOD TO SUPPLY A SOLID FEEDSTOCK TO A SOLIDS FEEDER - In a first embodiment, a system includes a first solids feeder having a first inlet and a first outlet, a second solids feeder having a second inlet and a second outlet, and an adjustable volume coupled to the first outlet and the second inlet. The first solids feeder is configured to supply a feedstock at a first feed rate and the second solids feeder is configured to supply the feedstock at a second feed rate. The adjustable volume is configured to adjust based at least in part on first feed rate and the second feed rate. | 06-05-2014 |
20150159098 | SYSTEM AND METHOD FOR COOLING SYNGAS WITHIN A GASIFIER SYSTEM - A vessel for use in a gasification system is provided. The vessel includes a shell and a heat exchange structure positioned within the shell. The heat exchange structure defines a central cavity configured to receive and to direct a syngas to a quenching portion positioned downstream of the central cavity along a syngas path. A passageway is disposed between the shell and the heat exchange structure. A liquid seal is positioned upstream of the quenching portion, and the liquid seal is configured to block transport of at least one of the syngas between from the quenching portion into the passageway and inert gas from the passageway into the quenching portion. | 06-11-2015 |
20150175913 | FUEL FEED SYSTEM FOR A GASIFIER AND METHOD OF GASIFICATION SYSTEM START-UP - A method of start-up for a gasification system includes establishing a flow of a start-up fuel external to the gasifier prior to ignition of the gasifier. The method also includes establishing a start-up liquid feed external to the gasifier during gasifier start-up. The method further includes channeling the start-up liquid feed and the start-up fuel to the gasifier during gasifier start-up. | 06-25-2015 |
Patent application number | Description | Published |
20100324941 | PERSISTENT SALES AGENT FOR COMPLEX TRANSACTIONS - The present invention includes systems and methods employing branded virtual characters across multiple network platforms throughout various stages of complex transactions (eg, selling insurance). These characters initially engage prospective customers on a network platform, such as a social network, and persist over time across other network platforms (eg, university and company websites) to educate consumers until they are ready to purchase—from their “trusted advisor”—particular products and services offered by various providers. Even after completing transactions, these characters continue to provide various services, such as notifying a customer whose circumstances have changed of a relevant product or service, while remaining available to answer questions and provide information upon demand. By employing a semi-automated model, the system of the present invention can answer many questions via predetermined vignettes and automated answers generated by expert systems, while still utilizing live human experts (often transparently) when necessary. | 12-23-2010 |
20120265645 | PERSISTENT SALES AGENT FOR COMPLEX ONLINE TRANSACTIONS - The present invention includes systems and methods employing branded virtual characters across multiple network platforms throughout various stages of complex transactions (eg, selling insurance). These characters initially engage prospective customers on a network platform, such as a social network, and persist over time across other network platforms (eg, university and company websites) to educate consumers until they are ready to purchase—from their “trusted advisor”—particular products and services offered by various providers. Even after completing transactions, these characters continue to provide various services, such as notifying a customer whose circumstances have changed of a relevant product or service, while remaining available to answer questions and provide information upon demand. By employing a semi-automated model, the system of the present invention can answer many questions via predetermined vignettes and automated answers generated by expert systems, while still utilizing live human experts (often transparently) when necessary. | 10-18-2012 |
20140129262 | PRESISTENT SALES AGENT FOR COMPLEX TRANSACTIONS - The present invention includes systems and methods employing branded virtual characters across multiple network platforms throughout various stages of complex transactions (eg, selling insurance). These characters initially engage prospective customers on a network platform, such as a social network, and persist over time across other network platforms (eg, university and company websites) to educate consumers until they are ready to purchase—from their “trusted advisor”—particular products and services offered by various providers. Even after completing transactions, these characters continue to provide various services, such as notifying a customer whose circumstances have changed of a relevant product or service, while remaining available to answer questions and provide information upon demand. By employing a semi-automated model, the system of the present invention can answer many questions via predetermined vignettes and automated answers generated by expert systems, while still utilizing live human experts (often transparently) when necessary. | 05-08-2014 |
Patent application number | Description | Published |
20120271359 | BONE PLATE SYSTEM AND RELATED METHODS - A bone plate system for use in an “open door” laminoplasty procedure, including a bone plate, a first fixation element, and at least one second fixation element. The bone plate is elongated and has a generally curved shape such that the plate has an associated radius of curvature. The plate is sized and dimensioned to span a gap between a pair of bony segments, for example a pair of bony segments constituting a divided lamina. The first and second fixation elements are each configured to securely attach the bone plate to the bony segments. The bone plate has a first end including a generally U-shaped slot extending therein such that the open end of the slot comprises a first terminal end of the plate. | 10-25-2012 |
20140114363 | INSRUMENT AND METHOD FOR RESTORING MOTION TO A POLYAXIAL SCREW - A polyaxial screw head remobilizer for remobilizing a screw body member relative to a head of a polyaxial bone screw includes a barrel body, a handle assembly, an inner shaft, a slide assembly, and a lever. The barrel body includes proximal and distal ends. The distal end includes a plurality of prongs for releasably engaging a plurality of yokes of the polyaxial screw body member to center the inner shaft over the head of the screw. The handle assembly couples to the proximal end of the barrel body. The inner shaft, disposed within the barrel body, includes proximal and distal ends. An engagement feature of the inner shaft mates with pockets of a bushing of the screw body member. The slide assembly is operably coupled to the barrel body and effect translations of the inner shaft. The lever extends from the slide assembly and rotates to actuate the slide assembly. | 04-24-2014 |
20140180298 | INSTRUMENT AND METHOD FOR PROVISIONALLY LOCKING A POLYAXIAL SCREW - An instrument for provisionally tightening a screw body member to a head of a polyaxial bone screw includes a barrel body, an inner shaft, a handle and lever, and a load link assembly. The barrel body includes a distal end with a pair of rotatable tangs configured to engage the screw body member. The inner shaft includes a distal end configured to engage a bushing within the screw body member. The lever pivotally couples to one of the handle and the barrel body. The load link assembly couples to the inner shaft and the lever. Actuation of the lever towards causes the load link assembly to longitudinally displace the inner shaft toward the distal end to contact the bushing and advance the bushing into frictional fit between the screw body member and the head of the polyaxial bone screw. | 06-26-2014 |
20150359572 | SINGLE ACTION LOCKING PEDICLE SCREWDRIVER - An instrument for attaching a driver shaft to a screw assembly using a thrusting motion. The instrument has a main shaft, a locking tube, and a driver shaft. The locking tube is slidably mounted within the main shaft and the driver shaft is slidably mounted within the locking tube. The locking tube is configured to urge a jaw assembly of the instrument into a tensioned engagement with a body member of the screw assembly. A locking mechanism is also included and is configured to lock the driver shaft in a fixed position relative to the locking tube. The locking mechanism may be configured to lock the driver shaft with respect to the locking tube after a distal end of the main shaft engages the screw assembly using the single action. | 12-17-2015 |
Patent application number | Description | Published |
20110087288 | Surgical Fixation System and Related Methods - A surgical fixation system including a pair of spinal rods, an occipital fixation element (comprising either an occipital plate or a plurality of occipital anchors), a crosslink connector, and a plurality of anchor elements, including but not limited to friction-fit pedicle screws, favored-angle pedicle screws, and laminar hooks. Any or all of these elements may be made of a biologically inert material, preferably any metal customarily used for surgical devices, such as for example titanium or stainless steel. The surgical fixation system of the present invention is described herein for application to the posterior region of the human spine, for attachment to cervical and/or thoracic vertebrae, as well as the occiput portion of the skull. | 04-14-2011 |
20160095633 | Bone Plate System and Related Methods - A bone plate system for use in an “open door” laminoplasty procedure, including a bone plate, a first fixation element, and at least one second fixation element. The bone plate is elongated and has a generally curved shape such that the plate has an associated radius of curvature. The plate is sized and dimensioned to span a gap between a pair of bony segments, for example a pair of bony segments constituting a divided lamina. The first and second fixation elements are each configured to securely attach the bone plate to the bony segments. The bone plate has a first end including a generally U-shaped slot extending therein such that the open end of the slot comprises a first terminal end of the plate. | 04-07-2016 |
Patent application number | Description | Published |
20090163034 | COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APPARATUS - A showerhead electrode for a plasma processing apparatus includes an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of ≧300% in a temperature range of room temperature to 300° C. such as heat curable high molecular weight dimethyl silicone with fillers. The sheet form adhesive has bond thickness control for parallelism of bonded surfaces over large areas. The sheet adhesive may be cast or die cut into pre-form shapes that can conform to irregularly shaped features, maximize surface contact area with mating electrode surfaces, and installed into cavities of the mating assembly. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar. | 06-25-2009 |
20100304571 | FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS - A bonded assembly to reduce particle contamination in a semiconductor vacuum chamber such as a plasma processing apparatus is provided, including an elastomeric sheet adhesive bond between mating surfaces of a component and a support member to accommodate thermal stresses. The elastomeric sheet comprises a silicone adhesive to withstand a high shear strain of ≧800% at a temperature range between room temperature and 300° C. such as heat curable high molecular weight dimethyl silicone with optional fillers. The sheet form has bond thickness control for parallelism of bonded surfaces. The sheet adhesive may be cut into pre-form shapes to conform to regularly or irregularly shaped features, maximize surface contact area with mating parts, and can be installed into cavities. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar. | 12-02-2010 |
20130292048 | FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS - A bonded assembly to reduce particle contamination in a semiconductor vacuum chamber such as a plasma processing apparatus is provided, including an elastomeric sheet adhesive bond between mating surfaces of a component and a support member to accommodate thermal stresses. The elastomeric sheet comprises a silicone adhesive to withstand a high shear strain of ≧800% at a temperature range between room temperature and 300° C. such as heat curable high molecular weight dimethyl silicone with optional fillers. The sheet form has bond thickness control for parallelism of bonded surfaces. The sheet adhesive may be cut into pre-form shapes to conform to regularly or irregularly shaped features, maximize surface contact area with mating parts, and can be installed into cavities. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar. | 11-07-2013 |
Patent application number | Description | Published |
20090305509 | Showerhead electrode assemblies for plasma processing apparatuses - Showerhead electrode assemblies are disclosed, which include a showerhead electrode adapted to be mounted in an interior of a vacuum chamber; an optional backing plate attached to the showerhead electrode; a thermal control plate attached to the backing plate or to the showerhead electrode at multiple contact regions across the backing plate; and at least one interface member separating the backing plate and the thermal control plate, or the thermal control plate and showerhead electrode, at the contact regions, the interface member having a thermally and electrically conductive gasket portion and a particle mitigating seal portion. Methods of processing semiconductor substrates using the showerhead electrode assemblies are also disclosed. | 12-10-2009 |
20110024049 | LIGHT-UP PREVENTION IN ELECTROSTATIC CHUCKS - An electrostatic chuck assembly is provided comprising a ceramic contact layer, a patterned bonding layer, an electrically conductive base plate, and a subterranean arc mitigation layer. The ceramic contact layer and the electrically conductive base plate cooperate to define a plurality of hybrid gas distribution channels formed in a subterranean portion of the electrostatic chuck assembly. Individual ones of the hybrid gas distribution channels comprise surfaces of relatively high electrical conductivity presented by the electrically conductive base plate and relatively low electrical conductivity presented by the ceramic contact layer. The subterranean arc mitigation layer comprises a layer of relatively low electrical conductivity and is formed over the relatively high conductivity surfaces of the hybrid gas distribution channels in the subterranean portion of the electrostatic chuck assembly. Semiconductor wafer processing chambers are also provided. | 02-03-2011 |
20110300714 | PLASMA PROCESSING CHAMBER COMPONENT HAVING ADAPTIVE THERMAL CONDUCTOR - An assembly comprises a component of a plasma process chamber, a thermal source and a polymer composite therebetween exhibiting a phase transition between a high-thermal conductivity phase and a low-thermal conductivity phase. The temperature-induced phase change polymer can be used to maintain the temperature of the component at a high or low temperature during multi-step plasma etching processes. | 12-08-2011 |
20120031427 | Methods For Stabilizing Contact Surfaces of Electrostatic Chucks - Methods for stabilizing a ceramic contact surface of an electrostatic chuck, wherein the electrostatic chuck can be disposed within a reaction chamber of a semiconductor wafer processing assembly including a radio frequency source and a coolant gas supply are described herein. The method may include: clamping electrostatically a conditioning wafer to the ceramic contact surface of the electrostatic chuck; and cycling an output power of the radio frequency source and an output pressure of the coolant gas supply for multiple hot/cold cycles. Each of the hot/cold cycles includes a hot abrasion state and a cold abrasion state. At the hot abrasion state, the output power of the radio frequency source is relatively high and the output pressure of the coolant gas supply is relatively low to yield a relatively hot conditioning wafer. At the cold abrasion state, the output power of the radio frequency source is relatively low and the output pressure of the coolant gas supply is relatively high to yield a relatively cool conditioning wafer. | 02-09-2012 |
20130102156 | COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RESISTANT COATINGS - A component of a plasma processing chamber includes a three dimensional body having a highly dense plasma resistant coating thereon wherein a plasma exposed surface of the coating has a texture which inhibits particle generation from film buildup on the plasma exposed surface. The component can be a window of an inductively coupled plasma reactor wherein the window includes a textured yttria coating. The texture can be provided by contacting the plasma exposed surface with a polishing pad having a grit size effective to provide intersecting scratches with a depth of 1 to 2 microns. | 04-25-2013 |
20130244441 | COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APPARATUS - A method of forming an elastomeric sheet adhesive bond between mating surfaces of an electrode and a backing member to accommodate stresses generated during temperature cycling due to mismatch in coefficients of thermal expansion. The elastomeric sheet comprises a thermally conductive silicone adhesive able to withstand a high shear strain of ≧300% in a temperature range of room temperature to 300° C. such as heat curable high molecular weight dimethyl silicone with fillers. Installation can be manually, manually with installation tooling, or with automated machinery. | 09-19-2013 |
20140103806 | PRESSURE CONTROLLED HEAT PIPE TEMPERATURE CONTROL PLATE - A showerhead electrode assembly for a plasma processing chamber, which includes a showerhead electrode; a heater plate secured to the showerhead electrode; at least one pressure controlled heat pipe secured to an upper surface of the heater plate, the at least one pressure controlled heat pipe having a heat transfer liquid contained therein, and a pressurized gas, which produces a variable internal pressure within the at least one pressure controlled heat pipe; a top plate secured to an upper surface of the at least one heat pipe; and wherein the variable internal pressure within the at least one pressure controlled heat pipe during heating of the showerhead electrode by the heater plate displaces the heat transfer liquid from a thermal path between the top plate and the heater plate, and when removing excess heat from the showerhead electrode returns the heat transfer liquid to the thermal path. | 04-17-2014 |
20140154888 | SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES - Showerhead electrode assemblies are disclosed, which include a showerhead electrode adapted to be mounted in an interior of a vacuum chamber; an optional backing plate attached to the showerhead electrode; a thermal control plate attached to the backing plate or to the showerhead electrode at multiple contact regions across the backing plate; and at least one interface member separating the backing plate and the thermal control plate, or the thermal control plate and showerhead electrode, at the contact regions, the interface member having a thermally and electrically conductive gasket portion and a particle mitigating seal portion. Methods of processing semiconductor substrates using the showerhead electrode assemblies are also disclosed. | 06-05-2014 |
20140295670 | DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF - A method of forming a dense oxide coating on an aluminum component of semiconductor processing equipment comprises cold spraying a layer of pure aluminum on a surface of the aluminum component to a predetermined thickness. A dense oxide coating is then formed on the layer of pure aluminum using a plasma electrolytic oxidation process, wherein the plasma electrolytic oxidation process causes the layer of pure aluminum to undergo microplasmic discharges, thus forming the dense oxide coating on the layer of pure aluminum on the surface of the aluminum component. | 10-02-2014 |
20150184296 | COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACES OF A COMPONENT OF A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS - A coating system for forming an atomic layer deposition (ALD) or a molecular layer deposition (MLD) barrier coating on interior fluid wetted surfaces of a fluid handling component for a vacuum chamber of a semiconductor substrate processing apparatus. The coating system includes the fluid handling component, wherein the interior fluid wetted surfaces define a process region of the coating system, a gas supply system in fluid communication with the process region of the component wherein the gas supply system supplies process gases to the process region of the component through the inlet port thereof such that an ALD or MLD barrier coating can be formed on the fluid wetted surfaces of the fluid handling component, and an exhaust system in fluid communication with the process region of the component wherein the exhaust system exhausts the process gases from the process region of the component through the outlet port thereof. | 07-02-2015 |
20150187615 | COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALLY CONDUCTIVE AND NONMAGNETIC COLD SPRAYED COATING - A semiconductor plasma processing apparatus used to process semiconductor components comprises a plasma processing chamber, a process gas source in fluid communication with the plasma processing chamber for supplying a process gas into the plasma processing chamber, a RF energy source adapted to energize the process gas into the plasma state in the plasma processing chamber, and a vacuum port for exhausting process gas from the plasma processing chamber. The semiconductor plasma processing apparatus further comprises at least one component wherein the component has a body which has a relative magnetic permeability of about 70,000 or greater and a cold sprayed electrically conductive and nonmagnetic coating on a surface of the body wherein the coating has a thickness greater than the skin depth of a RF current configured to flow therethrough during plasma processing. | 07-02-2015 |
20150337450 | DENSE OXIDE COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF - A method of forming a dense oxide coating on an aluminum component of semiconductor processing equipment comprises cold spraying a layer of pure aluminum on a surface of the aluminum component to a predetermined thickness. A dense oxide coating is then formed on the layer of pure aluminum using a plasma electrolytic oxidation process, wherein the plasma electrolytic oxidation process causes the layer of pure aluminum to undergo microplasmic discharges, thus forming the dense oxide coating on the layer of pure aluminum on the surface of the aluminum component. | 11-26-2015 |