Shou-Yen
Shou-Yen Chou, Ji-An Shiang TW
Patent application number | Description | Published |
---|---|---|
20130293858 | ANISOTROPIC PHASE SHIFTING MASK - The present disclosure provides a photomask. The photomask includes a substrate. The photomask also includes a plurality of patterns disposed on the substrate. Each pattern is phase shifted from adjacent patterns by different amounts in different directions. The present disclosure also includes a method for performing a lithography process. The method includes forming a patternable layer over a wafer. The method also includes performing an exposure process to the patternable layer. The exposure process is performed at least in part through a phase shifted photomask. The phase shifted photomask contains a plurality of patterns that are each phase shifted from adjacent patterns by different amounts in different directions. The method includes patterning the patternable layer. | 11-07-2013 |
Shou-Yen Chou, Hualien County TW
Patent application number | Description | Published |
---|---|---|
20140365982 | Method for Making a Mask With a Phase Bar in An Integrated Circuit Design Layout - A method for making a mask includes receiving an integrated circuit (IC) design layout and identifying at least one targeted-feature-surrounding-location (TFSL) in the IC design layout, wherein TFSL is identified by a model-based approach. The method further includes inserting at least one phase bar (PB) in the IC design layout and performing an optical proximity correction (OPC) to the IC design layout having the at least one PB to form a modified IC design layout. A mask is then fabricated based on the modified IC design layout. | 12-11-2014 |
Shou-Yen Lin, Tainan City TW
Patent application number | Description | Published |
---|---|---|
20150059844 | FLEXIBLE PHOTO-ANODE OF DYE-SENSITIZED SOLAR CELL AND MANUFACTURING METHOD THEREOF - A flexible photo-anode of dye-sensitized solar cell and a manufacturing method thereof are provided. The method includes steps of: coating zinc oxide nanoparticles on a flexible substrate to form a seed layer; immersing the flexible substrate into a first reaction solution; heating the seed layer to form a zinc oxide nanowire array; cooling the flexible substrate to the room temperature, immersing it into the second reaction solution, and stirring the second reaction solution, so that the zinc oxide nanowire array forms a cactus-like structure. Thus, the sintering and embossing processes can be prevented. | 03-05-2015 |