Patent application number | Description | Published |
20100065835 | THIN FILM TRANSISTOR HAVING CRYSTALLINE INDIUM OXIDE SEMICONDUCTOR FILM - To provide a thin film transistor having an indium oxide-based semiconductor film which allows only a thin metal film on the semiconductor film to be selectively etched. A thin film transistor having a crystalline indium oxide semiconductor film which is composed mainly of indium oxide and contains a positive trivalent metal oxide. | 03-18-2010 |
20110049511 | FIELD EFFECT TRANSISTOR, SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD - A field effect transistor including a source electrode | 03-03-2011 |
20120292617 | In-Ga-O OXIDE SINTERED BODY, TARGET, OXIDE SEMICONDUCTOR THIN FILM, AND MANUFACTURING METHODS THEREFOR - An oxide sintered body including indium oxide of which the crystal structure substantially includes a bixbyite structure, wherein gallium atoms are solid-saluted in the indium oxide, and an atomic ratio Ga/(Ga+In) is 0.10 to 0.15. | 11-22-2012 |
20130082218 | SINTERED OXIDE MATERIAL, TARGET COMPRISING SAME, AND OXIDE SEMICONDUCTOR THIN FILM - An oxide sintered body including an oxide of indium and aluminum and having an atomic ratio Al/(Al+In) of 0.01 to 0.08. | 04-04-2013 |
20130140502 | SPUTTERING TARGET - An oxide sintered body including an oxide of indium (In), gallium (Ga), and positive trivalent and/or positive tetravalent metal X, wherein the amount of the metal X relative to the total amount of In and Ga is 100 to 10000 ppm (weight). | 06-06-2013 |
20130221351 | LAMINATE STRUCTURE INCLUDING OXIDE SEMICONDUCTOR THIN FILM LAYER, AND THIN FILM TRANSISTOR - A stacked layer structure including an oxide layer and an insulating layer, the oxide layer having a carrier concentration of 10 | 08-29-2013 |
20140014500 | SINTERED MATERIAL, AND PROCESS FOR PRODUCING SAME - A sintered body which includes at least indium oxide and gallium oxide and comprises voids each having a volume of 14000 μm | 01-16-2014 |
20140197408 | THIN-FILM TRANSISTOR - A thin film transistor ( | 07-17-2014 |
20140252354 | SPUTTERING TARGET - A sputtering target including a sintered body:
| 09-11-2014 |