Patent application number | Description | Published |
20110186545 | FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS - Methods and systems for controlling temperatures in plasma processing chamber with reduced controller response times and increased stability. Temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. A feedforward control signal compensating disturbances in the temperature attributable to the plasma power may be combined with a feedback control signal counteracting error between a measured and desired temperature. | 08-04-2011 |
20110297650 | ASSEMBLY FOR DELIVERING RF POWER AND DC VOLTAGE TO A PLASMA PROCESSING CHAMBER - A triaxial rod assembly for providing both RF power and DC voltage to a chuck assembly that supports a workpiece in a processing chamber during a manufacturing operation. In embodiments, a rod assembly includes a center conductor to be coupled to a chuck electrode for providing DC voltage to clamp a workpiece. Concentrically surrounding the center conductor is an annular RF transmission line to be coupled to an RF powered base to provide RF power to the chuck assembly. An insulator is disposed between the center conductor and RF transmission line. Concentrically surrounding the RF transmission line is a ground plane conductor coupled to a grounded base of the chuck to provide a reference voltage relative to the DC voltage. An insulator is disposed between the RF transmission line and the ground plane conductor. | 12-08-2011 |
20120091104 | MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE UNIFORMITY - An electrostatic chuck assembly including a dielectric layer with a top surface to support a workpiece. A cooling channel base disposed below the dielectric layer includes a plurality of inner fluid conduits disposed beneath an inner portion of the top surface, and a plurality of outer fluid conduits disposed beneath an outer portion of the top surface. A chuck assembly includes a thermal break disposed within the cooling channel base between the inner and outer fluid conduits. A chuck assembly includes a fluid distribution plate disposed below the cooling channel base and the base plate to distribute a heat transfer fluid delivered from a common input to each inner or outer fluid conduit. The branches of the inner input manifold may have substantially equal fluid conductance. | 04-19-2012 |
20120132397 | TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW - Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. In further embodiments, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a passive leveling pipe coupling the two reservoirs. In another embodiment, digital heat transfer fluid flow control valves are opened with pulse widths dependent on a heating/cooling duty cycle value and a proportioning cycle having a duration that has been found to provide good temperature control performance. | 05-31-2012 |
20130277333 | PLASMA PROCESSING USING RF RETURN PATH VARIABLE IMPEDANCE CONTROLLER WITH TWO-DIMENSIONAL TUNING SPACE - In a plasma reactor having a driven electrode and a counter electrode, an impedance controller connected between the counter electrode and ground includes both series sand parallel variable impedance elements that facilitate two-dimensional movement of a ground path input impedance in a complex impedance space to control spatial distribution of a plasma process parameter. | 10-24-2013 |
20130284369 | TWO-PHASE OPERATION OF PLASMA CHAMBER BY PHASE LOCKED LOOP - Plasma distribution is controlled in a plasma reactor by controlling the phase difference between opposing RF electrodes, in accordance with a desired or user-selected phase difference, by a phase-lock feedback control loop. | 10-31-2013 |
20140203526 | TEMPERATURE MANAGEMENT OF ALUMINIUM NITRIDE ELECTROSTATIC CHUCK - An unseasoned substrate support assembly includes a ceramic body and a thermally conductive base bonded to a lower surface of the ceramic body. The substrate support assembly further includes an upper surface of the ceramic body having a first portion proximate to a center of the upper surface of the ceramic body and having a first roughness profile and a second portion distal from the center of the upper surface of the ceramic body and having a second roughness profile with a lower roughness than the first roughness profile, wherein areas of the first and second portions are based on radial distances from the center of the ceramic body. | 07-24-2014 |
20140346743 | MULTI-ZONED PLASMA PROCESSING ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE UNIFORMITY - An electrostatic chuck assembly including a dielectric layer with a top surface to support a workpiece. A cooling channel base disposed below the dielectric layer includes a plurality of inner fluid conduits disposed beneath an inner portion of the top surface, and a plurality of outer fluid conduits disposed beneath an outer portion of the top surface. A chuck assembly includes a thermal break disposed within the cooling channel base between the inner and outer fluid conduits. A chuck assembly includes a fluid distribution plate disposed below the cooling channel base and the base plate to distribute a heat transfer fluid delivered from a common input to each inner or outer fluid conduit. The branches of the inner input manifold may have substantially equal fluid conductance. | 11-27-2014 |
20150316941 | TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEAT TRANSFER FLUID FLOW - Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. In further embodiments, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a passive leveling pipe coupling the two reservoirs. In another embodiment, digital heat transfer fluid flow control valves are opened with pulse widths dependent on a heating/cooling duty cycle value and a proportioning cycle having a duration that has been found to provide good temperature control performance. | 11-05-2015 |
Patent application number | Description | Published |
20090212591 | Vehicle slider assembly - A vehicle slider assembly has a frame, upon which a fixed panel and an upper and a lower track are attached, and a slider panel assembly that moves in the tracks. The frame defines a window opening that the moving slider panel assembly opens and closes. The interior surfaces of the frame provide constant sealing surfaces for seals attached to the outwardly directed slider panel surfaces. The lower horizontal portion of the frame is adjacent to the lower track and has drain holes through it. The lower track has a reservoir channel defined in it, such that, moisture that is interior to the vehicle slider assembly accumulates in the reservoir channel and flows through the drain holes to the exterior of the vehicle slider assembly. An appliqué may be disposed over the exterior of the lower frame portion so that the flow of the moisture is hidden in an unencumbered and aesthetically pleasing manner. | 08-27-2009 |
20090241426 | VERTICAL DROP VEHICLE SLIDER ASSEMBLY - A partial and a full drop vertical vehicle slider assembly are provided that do not require a horizontal beltline support member. For the partial drop assembly, two fixed panels each with a division member, an upper header member, and a horizontal vehicle body opening edge abut to form the slider panel opening. For the full drop assembly, an upper header member, two upper slider assembly side members, and a horizontal vehicle body opening edge abut one another to form a slider panel opening. In both cases, the horizontal vehicle body opening edges have seals attached, through which a slider panel vertically slides up and spans the vertical extent of the slider panel opening to close the slider assembly, and slides down into the vehicle body to open the slider panel opening. In the case of the full drop assembly, unimpaired backlite viewing is provided. | 10-01-2009 |
20100071270 | VEHICLE WINDOW ASSEMBLY - A flush-flush horizontal vehicle window assembly is provided that includes a sliding panel with guide pins, formed with a load-bearing shoulder, on sliding panel corners, and a frame defining a window opening. The frame is attached to two fixed panels. Upper/lower tracks are attached above/below the window opening. Each track has a leading and a trailing guide path formed through a surface of the respective tracks, where the pins partially project into the guide paths and where load-bearing shoulder surfaces smoothly and reliably slide on the track surfaces. Each leading guide path is “S” shaped and each trailing guide path is shaped in a perpendicular manner at one end, which causes the sliding panel to smoothly enter and seal the window opening in a flush manner. An aesthetically pleasing flush-flush slider results when the sliding panel is in the plane of the window opening and further in the plane of the outer vehicle body panel. | 03-25-2010 |
20130019532 | HEATED VEHICLE SLIDING WINDOW ASSEMBLY - A heated vehicle sliding window assembly has a fixed glass panel with an opening formed in it and a slidably movable glass panel capable of closing the opening. Disposed on the fixed glass panel are electrically conductive grid lines that form two grid resistors which are connected together as a series circuit, which is connected between two electrically conductive bus bars deposited on the fixed glass panel. Disposed on the slidably movable glass panel are electrically conductive grid lines that form a third grid resistor, which is connected between two other electrically conductive bus bars disposed on the movable glass panel. Both sets of electrically conductive bus bars may be connected together as a parallel circuit when the opening is either opened or closed by the movable glass panel. | 01-24-2013 |
20130224391 | METHOD OF CONDITIONING AN APPLICATOR TIP AND DEVICE THEREFOR - A method of conditioning an applicator tip for subsequent use in uniformly applying an adhesion-promoting primer material to a glass vehicle window, and the device for accomplishing such conditioning of the applicator tip are aspects of the invention. | 08-29-2013 |
20130255158 | MOVABLE PANEL ASSEMBLY WITH A POWER SLIDING DRIVE MECHANISM - A powered sliding drive assembly is provided with a sliding panel having a frame member on its periphery and guide pins that are on the bottom of the sliding panel. The pins may have a washer and/or a collar disposed on them. The washers provide quiet movement of the sliding pane. The sliding panel defines a plane. The assembly further has two or more cables, each of which is separately attached on one end to opposite sides of the frame member, pins, washers, and/or collars, where each of these ends of the cables is in the plane of the sliding panel. Each cable is attached on another end to opposite sides of a drive unit. The pins of the sliding panel are positioned in tracks, whereby the sliding panel can be located in a flush-flush position with a fixed panel and a vehicle body panel. | 10-03-2013 |