Scollay
Dwayne John Scollay, Auckland NZ
Patent application number | Description | Published |
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20080271741 | Patient Ventilating And Aspirating System - A patient ventilating ( | 11-06-2008 |
Stuart Scollay, San Jose, CA US
Patent application number | Description | Published |
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20090279990 | TOOLS AND METHODS FOR MOUNTING TRANSPORT RAILS IN A SUBSTRATE PROCESSING SYSTEM - Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement. | 11-12-2009 |
20090324369 | SYSTEM AND METHOD FOR SUBSTRATE TRANSPORT - Introduction of substrates into vacuum environment is accomplish by gradually reducing the number of substrates being transferred simultaneously as the clean and evacuated environment is progressed. Cassettes are maintained in clean atmospheric environment and do not enter the vacuum environment. Several vacuum locks are linearly staggered so as to introduce progressively higher level of vacuum environment. The number of substrates transported through this arrangement is a portion of the number of substrates present in each cassette. The staggered vacuum locks lead to a series of processing chambers, wherein a yet smaller number of substrates, e.g., one or two, are transported. | 12-31-2009 |
Stuart Scollay, Santa Clara County, CA US
Patent application number | Description | Published |
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20090252582 | PROCESSING THIN WAFERS - There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing. | 10-08-2009 |
Stuart Scollay, Sunnyvale, CA US
Patent application number | Description | Published |
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20090123256 | ELEVATOR LINEAR MOTOR DRIVE - Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier. | 05-14-2009 |
20140377040 | ELEVATOR LINEAR MOTOR DRIVE - Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier. | 12-25-2014 |
Stuart Scollay US
Patent application number | Description | Published |
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20120093616 | PROCESSING THIN WAFERS - There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing. | 04-19-2012 |