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| 20110265814 | METHODS FOR PROCESSING SUBSTRATES IN PROCESS SYSTEMS HAVING SHARED RESOURCES - Methods for processing substrates in twin chamber processing systems having first and second process chambers and shared processing resources are provided herein. In some embodiments, a method may include flowing a process gas from a shared gas panel to a processing volume of the first process chamber and to a processing volume of the second process chamber; forming a first plasma in the first processing volume to process the first substrate and a second plasma to process the second substrate; monitoring the first processing volume and the second processing volume to determine if a process endpoint is reached in either volume; and either terminating the first and second plasma simultaneously when a first endpoint is reached; or terminating the first plasma when a first endpoint is reached in the first processing volume while continuing to provide the second plasma in the second processing volume until a second endpoint is reached. | 11-03-2011 |
| 20110266256 | METHODS FOR PROCESSING SUBSTRATES IN PROCESS SYSTEMS HAVING SHARED RESOURCES - Methods for processing substrates in twin chamber processing systems having first and second process chambers and shared processing resources are provided herein. In some embodiments, a method may include providing a substrate to the first process chamber of the twin chamber processing system, wherein the first process chamber has a first processing volume that is independent from a second processing volume of the second process chamber; providing one or more processing resources from the shared processing resources to only the first processing volume of the first process chamber; and performing a process on the substrate in the first process chamber. | 11-03-2011 |
| 20110303639 | METHODS FOR PROCESSING SUBSTRATES HAVING METAL HARD MASKS - Methods of processing metal hard masks are provided herein. In some embodiments, a method for processing a metal hard mask layer having a tri-layer resist disposed thereon is provided. A pattern is etched from a patterned photoresist layer into a second anti-reflective layer using a first plasma comprising chlorine. The pattern is etched into a first anti-reflective layer using a second plasma formed from a second process gas. The second anti-reflective layer is removed using a third plasma comprising chlorine (Cl | 12-15-2011 |
| 20110304078 | METHODS FOR REMOVING BYPRODUCTS FROM LOAD LOCK CHAMBERS - Methods for removing process byproducts from a load lock chamber are provided herein. In some embodiments, a method for removing process byproducts from a load lock chamber may include: performing a process on a substrate disposed within a process chamber; transferring the substrate from the process chamber to a load lock chamber; and providing an inert gas to the load lock chamber via at least one gas line while transferring the substrate from the process chamber to the load lock chamber to remove process byproducts from the load lock chamber. | 12-15-2011 |
| 20110306215 | METHODS OF PROCESSING SUBSTRATES HAVING METAL MATERIALS - Methods of processing substrates having metal layers are provided herein. In some embodiments, a method of processing a substrate comprising a metal layer having a patterned mask layer disposed above the metal layer, the method may include etching the metal layer through the patterned mask layer; and removing the patterned mask layer using a first plasma formed from a first process gas comprising oxygen (O | 12-15-2011 |
| 20120094499 | METHOD OF PERFORMING AN IN SITU CHAMBER CLEAN - Methods of performing in situ chamber cleaning for etch chambers are described. | 04-19-2012 |
| 20120222699 | METHOD FOR REMOVING HALOGEN-CONTAINING RESIDUES FROM SUBSTRATE - Methods for removing halogen-containing residues from a substrate are provided. By combining the heat-up and plasma abatement steps, the manufacturing throughput can be improved. Further, by appropriately controlling the pressure in the abatement chamber, the removal efficiency can be improved as well. | 09-06-2012 |
| 20120222752 | METHOD EXTENDING THE SERVICE INTERVAL OF A GAS DISTRIBUTION PLATE - Methods for reducing the contamination of a gas distribution plate are provided. In one embodiment, a method for processing a substrate includes transferring the substrate into a chamber, performing a treating process on the substrate, and providing a purge gas into the chamber before or after the treating process to pump out a residue gas relative to the treating process from the chamber. The treating process includes distributing a reactant gas into the chamber through a gas distribution plate. | 09-06-2012 |
| 20120276657 | METHOD OF PATTERNING OF MAGNETIC TUNNEL JUNCTIONS - Embodiments of the invention generally relate to methods for fabricating devices on semiconductor substrates. More specifically, embodiments of the invention relate to methods of patterning magnetic materials. Certain embodiments described herein use a reducing chemistry containing a hydrogen gas or hydrogen containing gas with an optional dilution gas at temperatures ranging from 20 to 300 degrees Celsius at a substrate bias less than 1,000 DC voltage to reduce the amount of sputtering and redeposition. Exemplary hydrogen containing gases which may be used with the embodiments described herein include NH | 11-01-2012 |
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| 20100082402 | ESTIMATING ON-LINE ADVERTISING INVENTORY VALUE BASED ON CONTRACT DELIVERY INFORMATION - Disclosed are apparatus and methods for pricing on-line advertisement inventory. In one embodiment, a method for pricing on-line advertisement inventory includes (i) providing a model for determining a value of an individual impression as a function of its user target attributes based on historical bookings for a plurality of impressions, wherein each impression corresponds to a plurality of user target attributes for which an on-line advertisement can be displayed, (ii) receiving a request for a price of a new product, and (iii) determining the price of the new product based on the average of individual impression values that are determined by using the model on a plurality of user target attributes of a plurality of individual impressions that serve the new product. | 04-01-2010 |
| 20100082503 | ESTIMATING ON-LINE ADVERTISING INVENTORY VALUE BASED ON CONTRACT ELIGIBILITY INFORMATION - Disclosed are apparatus and methods for apparatus and methods for pricing on-line advertisement inventory. In one embodiment, a method for pricing on-line advertisement inventory includes (i) receiving a request for a price of a new product, wherein the new product includes a plurality of specified characteristics of a type of on-line advertisement display, (ii) providing a sample of new impressions that are predicted to be delivered for such new product, (iii) for each new impression, determining which bookings could be served by such new impression so as to define a set of overlapping bookings, (iv) determining the price of each new impression based on a weighted average of a plurality of prices of such each new impression's corresponding overlapping bookings, (v) determining the price of the new product based on an average of the prices of the new impressions, and (vi) returning the price of the new product for use in a booking negotiation with a potential buyer of such new product. | 04-01-2010 |
| 20100100422 | APPARATUS AND METHODS FOR PRICING GUARANTEED DELIVERY CONTRACTS - Disclosed are apparatus and methods for pricing on-line advertisement inventory. In one embodiment, a method for pricing on-line advertisement inventory includes (i) forecasting a delivery cost for delivering a plurality of deliverable impressions to meet a guaranteed delivery contract for a particular advertising product; and (ii) determining a target price for a guaranteed delivery contract for such particular advertising product by adjusting the delivery cost based on one or more changes in one or more conditions of a supply and demand market. | 04-22-2010 |
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| 20090077050 | QUERYING MARKUP LANGUAGE DATA SOURCES USING A RELATIONAL QUERY PROCESSOR - An XML wrapper queries an XML document in an on-the-fly manner so that only parent nodes in the document that satisfy the query are extracted and then unnested. The parent nodes and associated descendent nodes are located using XPath expressions contained as options in data definition language (DDL) statements. The parent nodes satisfying the query and associated descendent nodes are extracted and stored outside of a database according to a relational schema. The wrapper facilitates applications that use convention SQL queries and views to operate on that information stored according to the relational schema. The wrapper also responds to query optimizer requests for costs associated with queries against external data sources associated with the wrapper. | 03-19-2009 |
| 20110040794 | QUERYING MARKUP LANGUAGE DATA SOURCES USING A RELATIONAL QUERY PROCESSOR - An XML wrapper queries an XML document in an on-the-fly manner so that only parent nodes in the document that satisfy the query are extracted and then unnested. The parent nodes and associated descendent nodes are located using XPath expressions contained as options in data definition language (DDL) statements. The parent nodes satisfying the query and associated descendent nodes are extracted and stored outside of a database according to a relational schema. The wrapper facilitates applications that use convention SQL queries and views to operate on that information stored according to the relational schema. The wrapper also responds to query optimizer requests for costs associated with queries against external data sources associated with the wrapper. | 02-17-2011 |
| 20110208774 | QUERYING MARKUP LANGUAGE DATA SOURCES USING A RELATIONAL QUERY PROCESSOR - An XML wrapper queries an XML document in an on-the-fly manner so that only parent nodes in the document that satisfy the query are extracted and then unnested. The parent nodes and associated descendent nodes are located using XPath expressions contained as options in data definition language (DDL) statements. The parent nodes satisfying the query and associated descendent nodes are extracted and stored outside of a database according to a relational schema. The wrapper facilitates applications that use convention SQL queries and views to operate on that information stored according to the relational schema. The wrapper also responds to query optimizer requests for costs associated with queries against external data sources associated with the wrapper. | 08-25-2011 |
| 20130036349 | SYSTEM FOR SIMPLIFYING THE PROCESS OF CREATING XML DOCUMENT TRANSFORMATIONS - An extensible markup language (XML) document transformation system, including: a user interface configured to receive a user input; a transformation engine configured to: create a target model by incremental user selection of elements in a source model; interpret the target model to create an XML schema of the target model; and create a mapping between the source model of the XML document and the target model; and a memory device configured to store the mapping. | 02-07-2013 |
| 20130036352 | SIMPLIFYING THE PROCESS OF CREATING XML DOCUMENT TRANSFORMATIONS - A method for simplifying a process for creating a transformation of an extensible markup language XML document is described. The method includes: creating a target model by incremental user selection of elements in a source model; interpreting the target model to create an XML schema of the target model; and creating a mapping between the source model of the XML document and the target model, wherein the mapping is stored on a memory device. | 02-07-2013 |
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| 20090037391 | Common Interface to Access Catalog Information from Heterogeneous Databases - Various embodiments of a system and computer program product to access metadata from a plurality of data servers from a federated database management system are provided. In one embodiment, a request for metadata, from a client application, is received by the federated database management system. Data servers which are accessible from the federated database management system are identified. For each data server, metadata describing data of a data source of that data server is retrieved in accordance with the application request. The retrieved metadata from each of the data servers is aggregated to produce an aggregated result in a uniform format. The aggregated result is provided. In another embodiment, for each data server, a source metadata request for metadata of that data server is generated in accordance with the application request and a source metadata application programming interface. A view is created based on the source metadata request for metadata for each data server. | 02-05-2009 |
| 20130060814 | TRANSFORMING HIERARCHICAL LANGUAGE DATA INTO RELATIONAL FORM - Described herein are methods, systems, apparatuses and products for transforming hierarchical language data into relational form. An aspect provides for assembling at least one statistical summary of at least one hierarchical language data source responsive to execution of program instructions accessible to at least one processor operatively connected to a memory device; accessing at least one entity of interest selected from the at least one statistical summary; generating at least one target hierarchical language model based on the at least one entity of interest; and transforming data from the at least one hierarchical language data source into at least one relational form by executing transformation artifacts generated based on a type of the relational form. Other aspects are disclosed herein. | 03-07-2013 |
| 20130060816 | TRANSFORMING HIERARCHICAL LANGUAGE DATA INTO RELATIONAL FORM - Described herein are methods, systems, apparatuses and products for transforming hierarchical language data into relational form. An aspect provides for assembling at least one statistical summary of at least one hierarchical language data source responsive to execution of program instructions accessible to at least one processor operatively connected to a memory device; accessing at least one entity of interest selected from the at least one statistical summary; generating at least one target hierarchical language model based on the at least one entity of interest; and transforming data from the at least one hierarchical language data source into at least one relational form by executing transformation artifacts generated based on a type of the relational form. Other aspects are disclosed herein. | 03-07-2013 |
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| 20100048419 | Combinatorial Screening Method and Apparatus - A combinatorial screening method and system are provided. The combinatorial system and method provide rapid data generation for characterization of phase change material. The characterization data is collected through a multipoint probe card where multiple regions are characterized in a single annealing cycle. | 02-25-2010 |
| 20120119768 | Method and System of Improved Reliability Testing - A method and system of improved reliability testing includes providing a first substrate and a second substrate, each substrate comprising only a first metallization layer; processing regions on a first substrate by combinatorially varying at least one of materials, unit processes, and process sequences; performing a first reliability test on the processed regions on the first substrate to generate first results; processing regions on a second substrate in a combinatorial manner by varying at least one of materials, unit processes, and process sequences based on the first results of the first reliability test; performing a second reliability test on the processed regions on the second substrate to generate second results; and determining whether the first substrate and the second substrate meet a predetermined quality threshold based on the second results. | 05-17-2012 |
| 20120290245 | METHOD AND APPARATUS FOR PARALLEL TESTING OF SEMICONDUCTOR DEVICES - Method and apparatus for parallel testing of multiple regions on a substrate used in high performance combinatorial development of new materials and processes are described. The apparatus comprises dedicated hardware for each probe assembly with multiple PC controllers networked using a master/slave configuration. | 11-15-2012 |
| 20120293162 | METHOD FOR TESTING MULTIPLE COUPONS - A method for testing multiple coupons is described. The x, y, and theta offset coordinates of a reference structure for each coupon are determined. Additionally, the x and y offset coordinates between the reference structure and the first test device are determined. After the reference data from all of the coupons have been determined, the testing sequence for all of the coupons can be initiated and completed without further intervention. | 11-22-2012 |
