Patent application number | Description | Published |
20130228013 | PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS - A physical quantity sensor includes a base section, a movable body having a movable electrode section, pivot sections connected to the movable body, and forming a pivot axis of the movable body, a fixation section fixed to the substrate, and adapted to support the movable body via the pivot sections, and a fixed electrode section disposed on the substrate so as to be opposed to the movable electrode section, and the fixation section is provided with opening sections disposed on a line of the pivot axis. | 09-05-2013 |
20130255377 | GYRO SENSOR AND ELECTRONIC DEVICE INCLUDING THE SAME - A gyro sensor includes: a driving mass; a detection mass connected with the driving mass; a driving connection one end and the other end of which are connected with the driving mass and an anchor, respectively; an island connected with the anchor, and disposed with a clearance left between the island and the driving mass in such a manner as to be electrically connected with the driving mass; and a projection provided at least either on the surface of the driving mass opposed to the island, or on the surface of the island opposed to the driving mass. The driving unit includes a movable electrode unit connected with the driving mass, and a fixed electrode unit. The minimum distance between the driving mass and the island is longer than the driving amplitude of the driving mass and shorter than the maximum amplitude of the movable electrode unit. | 10-03-2013 |
20130255382 | PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS - A physical quantity sensor includes: a fixed portion; a fixed electrode portion; and a movable body that includes a support portion disposed around the fixed portion in plan view, a movable electrode portion supported by the support portion, extending along a first axis, and arranged to face the fixed electrode portion, and a coupling portion coupling the fixed portion with the support portion, and is displaceable along a second axis crossing the first axis. | 10-03-2013 |
20130256814 | PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS - A physical quantity sensor includes: a movable body displaceable in a direction of a first axis; a fixed electrode portion disposed to face a movable electrode portion; a spring portion as a connection member connecting a fixed portion with the movable body and including a first extending portion extending from the fixed portion along a second axis crossing the direction of the first axis, a turn-around portion connected to the first extending portion, and a second extending portion extending from the turn-around portion along the second axis; and a wall portion extending from the fixed portion and disposed, in plan view, outside the first extending portion and the turn-around portion of the spring portion. The spring portion and the wall portion are electrically connected. | 10-03-2013 |
20130263662 | PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS - A physical quantity sensor includes: a substrate; a movable body including, with a first axis as a boundary, a first movable electrode portion disposed in a first region, a second movable electrode portion disposed in a second region, and a damping adjusting portion disposed in at least one of the first region and the second region; beam portions supporting the movable body; a first fixed electrode portion; and a second fixed electrode portion. A first through-hole is disposed in the damping adjusting portion. Second through-holes are disposed in the movable electrode portions. The area of a region where the first movable electrode portion overlaps with the first fixed electrode portion is the same as the area of a region where the second movable electrode portion overlaps with the second fixed electrode portion. The width of the first through-hole is greater than the widths of the second through-holes. | 10-10-2013 |
20130264661 | PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS - A physical quantity sensor includes a substrate, a movable body which has first and second sections and in which a first movable electrode section is provided in the first section, a beam section which supports the movable body so as to be able to be displaced, and a first fixed electrode section disposed on the substrate. The first fixed electrode section is provided at a position overlapping an end of the first section in the second axis direction in plan view, and is provided in a range of 0.0500X≦L≦0.816X assuming that the width of the first section in the second axis direction is X and the width of a portion of the first fixed electrode section in the second axis direction overlapping the movable body in plan view is L. | 10-10-2013 |
20140021562 | MEMS DEVICE, ELECTRONIC MODULE, ELECTRONIC APPARATUS, AND MOBILE UNIT - A MEMS device includes: a base substrate; a first wiring disposed on the base substrate using a first structure; a second wiring disposed on the base substrate using the first structure and a second structure connected to the first structure; and a MEMS element connected with the first wiring and the second wiring and arranged on the base substrate, wherein the first wiring and the second wiring include a crossing portion where the first wiring and the second wiring cross each other, and at the crossing portion, the first structure of the first wiring and the second structure of the second wiring cross each other. | 01-23-2014 |
20140069190 | PHYSICAL QUANTITY SENSOR, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS - A physical quantity sensor includes: a substrate; a first movable body that is provided on the substrate and includes first movable electrode sections; first fixed electrode sections disposed on the substrate so as to face the first movable electrode sections; a second movable body that is provided on the substrate and includes second movable electrode sections; and second fixed electrode sections disposed on the substrate so as to face the second movable electrode sections. A post section protruding from the principal surface of the substrate is provided in a portion of the substrate located between the first and second movable bodies in plan view. | 03-13-2014 |
20140367806 | FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS, AND MOVING OBJECT - A functional element includes a first electrode section, a second electrode section, a first wiring line connected to the first electrode section, and a second wiring line connected to the second electrode section, the first wiring line is provided with at least one first intersecting section intersecting with a wiring line other than the second wiring line, the second wiring line includes at least one second intersecting section intersecting with a wiring line other than the first wiring line, and a difference between a number of the first intersecting sections and a number of the second intersecting sections satisfies a condition one of equal to and lower than 50% with respect to larger one of the number of the first intersecting sections and the number of the second intersecting sections. | 12-18-2014 |
20150013458 | PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT - A fixed electrode part, a movable member supported by a support part above the fixed electrode part to which a principal surface thereof is opposed, and a stopper part provided to be opposed to at least a part of an outer edge of the movable member and regulating in-plane rotation displacement of the principal surface of the movable member are provided. | 01-15-2015 |
20150014799 | ELECTRONIC DEVICE, METHOD OF MANUFACTURING ELECTRONIC DEVICE, PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, MOVING OBJECT - A physical quantity sensor includes a first sensor element, and an outer edge portion arranged in at least part of the outer periphery of the first sensor element, and a first groove extending in a first direction provided in the outer edge portion in a plan view of the outer edge portion. | 01-15-2015 |
20150020591 | FUNCTIONAL DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A functional device includes a movable body and a supporting section configured to support the movable body via coupling sections extending along a first axis. The supporting section includes a connection region connected to the coupling sections and provided along the first axis and contact regions provided on the outer side of the connection region in plan view and electrically connected to a wire provided on a substrate. | 01-22-2015 |
20150021719 | FUNCTIONAL DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A functional device includes a movable body displaceable along a first axis, a fixed section configured to support the movable body in a coupling section, a movable electrode section extending from the movable body, a fixed electrode section arranged to be opposed to the movable electrode section, and an extending section extending from the fixed section and including an opposed section opposed to a side surface of the movable electrode section. The distance between the opposed section and the movable electrode section is smaller than the distance between the fixed electrode section and the movable electrode section. | 01-22-2015 |
20150029690 | FUNCTIONAL DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A functional device includes a fixed electrode portion including a first fixed electrode portion and a second fixed electrode portion, a first wiring portion connected to the first fixed electrode portion, and a second wiring portion connected to the second fixed electrode portion. At least one of the first wiring portion and the second wiring portion is provided with a branch portion. One wiring line extending from the branch portion is connected to the fixed electrode portion, and another wiring line extending from the branch portion is provided along the first wiring portion or the second wiring portion. | 01-29-2015 |
20150040667 | PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOVING OBJECT - A physical quantity sensor according to the embodiment includes: a substrate; a movable body including a movable electrode portion; and a support which supports the movable body around a first shaft to be displaced, in which, when the movable body is divided into a first portion and a second portion with the first shaft as a boundary, the physical quantity sensor includes a first fixed electrode portion which is disposed on the substrate to oppose the first portion, and a second fixed electrode portion which is disposed on the substrate to oppose the second portion, and a guard portion which suppresses an electrostatic force generated between the movable body and the substrate is provided in an inter-electrode area between the first fixed electrode portion and the second fixed electrode portion, on the substrate. | 02-12-2015 |
20150059474 | FUNCTIONAL DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A functional device includes a movable member that can be displaced along a first axis, a movable electrode part extended from the movable member, a fixed electrode part provided to be opposed to the movable electrode part, and a stopper part that regulates displacement of the movable member. A projecting part projecting along the first axis is provided on the movable member, and a distance between an end of the projecting part and the stopper part is shorter than a distance between the movable electrode part and the fixed electrode part. | 03-05-2015 |
20150070031 | PHYSICAL QUANTITY SENSOR, VIBRATORY DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT - A physical quantity sensor includes a substrate, a fixation section and a wiring line provided to the substrate, a contact section adapted to electrically connect the fixation section and the wiring line to each other, and a movable electrode electrically connected to the wiring line via the fixation section. The contact section is disposed in the fixation section in a second area outside a first area obtained by imaginarily extending a fixed support area in a displacement direction of the movable electrode in a plan view. The fixed support area is sandwiched by edge portions of an area where the movable electrode and the fixation section are connected to each other. | 03-12-2015 |