Patent application number | Description | Published |
20100248471 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE - Provided is a method for fabricating a semiconductor device, including forming an interconnect structure including first and second interconnects and an insulating material between the first and second interconnects, forming a first mask layer and a second mask layer having a plurality of micropores sequentially on the interconnect structure, coalescing the plurality of micropores in the second mask layer with each other and forming a plurality of first microholes in the second mask layer, forming a plurality of second microholes in the first mask layer using the plurality of first microholes, and removing the insulating material using the first mask layer with the plurality of second microholes as an etch mask so as to form an air-gap between the first and second interconnects. | 09-30-2010 |
20110108988 | VIA STRUCTURES AND SEMICONDUCTOR DEVICES HAVING THE VIA STRUCTURES - A via structure may include a first conductive pattern, a buffer pattern, and a second conductive pattern. The first conductive pattern may be on an inner wall of a first substrate and the inner wall may define a via hole passing at least partially through the first substrate. The buffer pattern may be on the first conductive pattern and the buffer pattern may partially fill the via hole. The second conductive pattern may be on a top surface of the buffer pattern in the via hole. | 05-12-2011 |
20110136332 | METHODS OF FORMING INTEGRATED CIRCUIT DEVICES WITH CRACK-RESISTANT FUSE STRUCTURES - A fuse base insulating region, for example, an insulating interlayer or a compensation region disposed in an insulating interlayer, is formed on a substrate. An etch stop layer is formed on the fuse base insulating region and forming an insulating interlayer having a lower dielectric constant than the first fuse base insulating region on the etch stop layer. A trench extending through the insulating interlayer and the etch stop layer and at least partially into the fuse base insulating region is formed. A fuse is formed in the trench. The fuse base insulating region may have a greater mechanical strength and/or density than the second insulating interlayer. | 06-09-2011 |
20110241184 | INTEGRATED CIRCUIT DEVICES HAVING SELECTIVELY STRENGTHENED COMPOSITE INTERLAYER INSULATION LAYERS AND METHODS OF FABRICATING THE SAME - An integrated circuit device includes a plurality of stacked circuit layers, at least one of the plurality of circuit layers including a composite interlayer insulation layer including laterally adjacent first and second insulating material regions having different mechanical strengths and dielectric properties and a plurality of circuit components disposed in the composite interlayer insulation layer. The first insulating material region may have a lower dielectric constant and a lower mechanical strength than the second insulating material region such that, for example, the first insulating material region may be positioned near signal lines or other circuit features to reduce capacitance while using the second insulating material region near a location that is susceptible to localized mechanical stress, such as a fuse location, an external connection bonding location or a scribe line location. | 10-06-2011 |
20110263117 | APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME - A method of manufacturing a semiconductor device and an apparatus for manufacturing a semiconductor device in which moisture is removed from a porous low-dielectric layer after a chemical mechanical polishing (CMP) process include formation of a porous low-dielectric layer on a substrate. A metal interconnection is formed on the substrate having the porous low-dielectric layer. The metal interconnection forms a planar surface with the porous low-dielectric layer to fill the openings. Ultraviolet (UV) light is irradiated to the porous low-dielectric layer to remove absorbed moisture from the porous low-dielectric layer. A capping layer is formed on the substrate having the porous low-dielectric layer and the metal interconnection. The capping layer is formed in-situ to prevent additional absorption of moisture. | 10-27-2011 |
20110281427 | METHOD OF FABRICATING SEMICONDUCTOR DEVICE - Example embodiments herein relate to a method of fabricating a semiconductor device. The method may include forming a liner insulating layer on a surface of a gate pattern to have a first thickness. Subsequently, a gap fill layer may be formed on the liner insulating layer by flowable chemical vapor deposition (FCVD) or spin-on-glass (SOG). The liner insulating layer and the gap fill layer may be recessed such that the liner insulating layer has a second thickness, which is smaller than the first thickness, in the region in which a metal silicide will be formed. Metal silicide may be formed on the plurality of gate patterns to have a relatively uniform thickness using the difference in thickness of the liner insulating layer. | 11-17-2011 |
20120083117 | Method Of Forming Hardened Porous Dielectric Layer And Method Of Fabricating Semiconductor Device Having Hardened Porous Dielectric Layer - Example embodiments relate to a method of forming a hardened porous dielectric layer. The method may include forming a dielectric layer containing porogens on a substrate, transforming the dielectric layer into a porous dielectric layer using a first UV curing process to remove the porogens from the dielectric layer, and transforming the porous dielectric layer into a crosslinked porous dielectric layer using a second UV curing process to generate crosslinks in the porous dielectric layer. | 04-05-2012 |
20120094437 | METHOD OF FORMING THROUGH SILICON VIA OF SEMICONDUCTOR DEVICE USING LOW-K DIELECTRIC MATERIAL - A method of forming through silicon vias (TSVs) includes forming a primary via hole in a semiconductor substrate, depositing low-k dielectric material in the primary via hole, forming a secondary via hole by etching the low-k dielectric in the primary via hole, in such a manner that a via insulating layer and an inter metal dielectric layer of the low-k dielectric layer are simultaneously formed. The via insulating layer is formed of the low-k dielectric material on sidewalls and a bottom surface of the substrate which delimit the primary via hole and the inter metal dielectric layer is formed on an upper surface of the substrate. Then a metal layer is formed on the substrate including in the secondary via hole, and the metal layer is selectively removed from an upper surface of the semiconductor substrate. | 04-19-2012 |
20120153500 | SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES - A semiconductor device comprises a top surface having a first contact, a bottom surface having a second contact, a via hole penetrating a substrate, an insulation layer structure on a sidewall of the via hole, the insulation layer structure having an air gap therein, a through electrode having an upper surface and a lower surface on the insulation layer structure, the through electrode filling the via hole and the lower surface being the second contact, and a metal wiring electrically connected to the upper surface of the through electrode and electrically connected to the first contact. | 06-21-2012 |
20120178253 | Method of Manufacturing a Semiconductor Device Having a Porous, Low-K Dielectric Layer - The inventive concept provides porous, low-k dielectric materials and methods of manufacturing and using the same. In some embodiments, porous, low-k dielectric materials are manufactured by forming a porogen-containing dielectric layer on a substrate and then removing at least a portion of said porogen from the layer. | 07-12-2012 |
20130193552 | INTEGRATED CIRCUIT DEVICES WITH CRACK-RESISTANT FUSE STRUCTURES - A fuse base insulating region, for example, an insulating interlayer or a compensation region disposed in an insulating interlayer, is formed on a substrate. An etch stop layer is formed on the fuse base insulating region and forming an insulating interlayer having a lower dielectric constant than the first fuse base insulating region on the etch stop layer. A trench extending through the insulating interlayer and the etch stop layer and at least partially into the fuse base insulating region is formed. A fuse is formed in the trench. The fuse base insulating region may have a greater mechanical strength and/or density than the second insulating interlayer. | 08-01-2013 |
20130228936 | METHOD OF FORMING THROUGH SILICON VIA OF SEMICONDUCTOR DEVICE USING LOW-K DIELECTRIC MATERIAL - A method of forming through silicon vias (TSVs) uses a low-k dielectric material as a via insulating layer to thereby improve step coverage and minimize resistive capacitive (RC) delay. To this end, the method includes forming a primary via hole in a semiconductor substrate, depositing low-k dielectric material in the primary via hole, forming a secondary via hole by etching the low-k dielectric in the primary via hole, in such a manner that a via insulating layer and an inter metal dielectric layer of the low-k dielectric layer are simultaneously formed. The via insulating layer is formed of the low-k dielectric material on sidewalls and a bottom surface of the substrate which delimit the primary via hole and the inter metal dielectric layer is formed on an upper surface of the substrate. Then a metal layer is formed on the substrate including in the secondary via hole, and the metal layer is selectively removed from an upper surface of the semiconductor substrate. | 09-05-2013 |