Patent application number | Description | Published |
20130171745 | ENERGY METER CALIBRATION AND MONITORING - A method of controlling a thermal treatment process for semiconductor substrates is described. A substrate is disposed in a thermal process chamber. A plurality of test locations are identified on the substrate surface, and the test locations are processed with different combinations of energy fluence and exposure duration. A physical property such as reflectivity is measured for each test process, and the data compared to a standard data set. The performance of the process is thus compared to a known physical quantity, and an adjustment applied to correct performance of the thermal processing apparatus. | 07-04-2013 |
20130280923 | APPARATUS AND METHOD TO REDUCE PARTICLES IN ADVANCE ANNEAL PROCESS - Embodiments of the invention generally relate to apparatus and methods of thermal processing of semiconductor substrates using a pellicle to eliminate contamination of an aperture member. The aperture member is disposed between an energy source and a substrate to be processed. The pellicle may be a thin piece of membrane that is substantially transparent to selected forms of energy, such as pulses of electromagnetic energy from a laser that emits radiation at one or more appropriate wavelengths for a desired period of time. In one embodiment, the pellicle is mounted at a predetermined distance from the aperture member and covering pattern openings (i.e., apertures) formed on the aperture member such that any particle contaminants that may land on the aperture member will land on the pellicle. The pellicle keeps particle contaminants out of focus in the final energy field, thereby preventing particle contaminants from being imaged onto the processed substrate. | 10-24-2013 |
20130340495 | APERTURE CONTROL OF THERMAL PREOCESSING RADIATION - Device for processing a substrate are described herein. Devices can include a radiation source and an aperture positioned to receive radiant energy from the radiation source. The aperture can include one or more members, and one or more interfering areas, wherein the interfering areas surround a transmissive area. The one or more structures can affect transmission of radiant energy through a portion of the transmissive area of the aperture. Structures disposed on the aperture can reduce or redirect transmission to provide for more uniform overall transmission of radiant energy through the aperture. | 12-26-2013 |
Patent application number | Description | Published |
20090210269 | Method for Operating a Renewable Energy Power Generation Facility - A method is described for operating a renewable power generation facility having a plurality of individual power generation units for generating power from a renewable energy source. In one exemplary embodiment, the method comprises selling the power generation units in the power generation facility to individual investors | 08-20-2009 |
20090210329 | Renewable Energy Park - A renewable energy park comprises a large-scale power generation facility having a plurality of individual power generation units for generating power from a renewable energy source. Individual power generation units are sold or leased to private investors. Energy supplied by individual power generation units in the renewable energy park to a public power grid is measured so that the individual investors can receive a retail offset or other form of payment for the energy produced. | 08-20-2009 |
20120006317 | Solar Tracker - A free-standing solar tracker comprises a base, a support frame, a panel assembly comprising one or more solar panels, and an actuator to rotate the panel assembly to track the movement of the sun. The solar tracker is designed to be free-standing and requires no foundation. When the solar tracker is deployed, the base forms a pan to contain a ballast material for holding the base in place. The base of the solar tracker is designed to serve as a “suitcase” to contain most of the components of the solar tracker, making it easier to transport the solar tracker | 01-12-2012 |
20140083032 | EXTERNAL WALL AND ROOF SYSTEMS - A ventilated exterior wall or roof system comprises frame including a plurality of frame members, and a double envelope structure attached to the exterior of the frame. The double envelope structure comprises a water resistant membrane, an exterior sheathing material disposed on the exterior side of and spaced from the water resistant membrane, and one or more air channels between the water resistant membrane and the exterior sheathing. | 03-27-2014 |
20150236636 | Solar Tracker - A solar tracker comprises a support frame, a panel assembly comprising one or more solar panels, and an actuator to rotate the panel assembly to track the movement of the sun. The panel assembly comprises a central spine and one or more panel carriers extending transversely over the top of the central spine for supporting solar panels. The panel carriers are secured to the central spine by respective support brackets. The support brackets comprise a top surface, side walls extending downwardly from opposing sides of the top surface, and a slot with a downwardly facing opening extending transversely through the sidewalls. The slot is configured to receive the central spine. | 08-20-2015 |
20150236637 | Solar Tracker - A free-standing solar tracker comprises a base, a support frame, a panel assembly comprising one or more solar panels, and an actuator to rotate the panel assembly to track the movement of the sun. The solar tracker is designed to be free-standing and requires no foundation. When the solar tracker is deployed, the base forms a pan to contain a ballast material for holding the base in place. The base of the solar tracker is designed to serve as a “suitcase” to contain most of the components of the solar tracker, making it easier to transport the solar tracker 10 to a location where the solar tracker is installed. | 08-20-2015 |