Patent application number | Description | Published |
20120326570 | FLEXURAL VIBRATOR ELEMENT, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING FLEXURAL VIBRATOR ELEMENT - A flexural vibrator element has a vibrator arm extending from a base section and having a rectangular cross-sectional shape, the vibrator arm having first and second step sections composed of step surfaces intersecting respectively with a left side surface and a right side surface, and step side surfaces intersecting respectively with an upper surface and a lower surface, between the lower surface, the upper surface and the left side surface, the right side surface, and first and fourth detection electrodes on the left and right side surfaces and second and third detection electrodes on the step side surfaces are respectively separated in a thickness direction of the vibrator arm. The first through fourth detection electrodes are patterned with accuracy by exposure from the upper surface and the lower surface using a common exposure device by existing photo etching. | 12-27-2012 |
20130255379 | VIBRATING ELEMENT, SENSOR UNIT, ELECTRONIC APPARATUS, AND METHOD FOR MANUFACTURING VIBRATING ELEMENT - An vibrating gyro device includes a base, drive vibrating arms extending from one end of the base, and detection vibrating arms extending from the other end of the base that faces away from the one end, and an adjustment film is provided on each of the drive vibrating arms in an area close to the base. | 10-03-2013 |
20130283910 | VIBRATING REED, GYRO SENSOR, ELECTRONIC APPARATUS, AND MOBILE UNIT - A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece. | 10-31-2013 |
20130291638 | VIBRATING ELEMENT, GYRO SENSOR, ELECTRONIC APPARATUS AND MOVING OBJECT - First vibrating arms extend along a first direction from a base portion. Second vibrating arms extend along a second direction from the base portion. First suspension arms extend from a fixed portion and are connected to first connecting parts of the base portion. Second suspension arms extend from the fixed portion and are connected to second connecting parts of the base portion. | 11-07-2013 |
20130291639 | VIBRATING PIECE AND MANUFACTURING METHOD FOR THE VIBRATING PIECE, GYRO SENSOR, AND ELECTRONIC APPARATUS AND MOBILE BODY - A vibrating piece includes a driving arm at least partially formed by a piezoelectric body, the driving arm including a first surface spreading along the direction of excited vibration, a second surface on the opposite side of the first surface, a first side surface configured to connect the first surface and the second surface, and a second side surface arranged on the opposite side of the first side surface and configured to connect the first surface and the second surface. The vibrating piece includes first electrodes arranged at least on one surface side of the first surface and the second surface and second electrodes arranged on at least one surface side of the first side surface and the second side surface. The first electrodes are provided asymmetrically with respect to an equally dividing plane of the driving arm orthogonal to the direction of the excited vibration of the driving arm. | 11-07-2013 |
20130305824 | VIBRATING ELEMENT AND MANUFACTURING METHOD FOR THE SAME, GYRO SENSOR, ELECTRONIC APPARATUS AND MOVING OBJECT - A vibrating element includes a vibrating arm for detection. An electrode is provided on the vibrating arm for detection. A wiring line is connected to the electrode. The wiring line is arranged on a piezoelectric body of a base portion. At least a part of the wiring line is an electrode for adjustment. The electrode for adjustment generates an electrical signal with an opposite phase to an output signal of leak vibration of the vibrating arm for detection. | 11-21-2013 |
20140020503 | VIBRATOR ELEMENT, METHOD OF MANUFACTURING VIBRATOR ELEMENT, VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS AND MOVING BODY - A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established. | 01-23-2014 |
20140290362 | VIBRATOR ELEMENT AND METHOD OF MANUFACTURING THE SAME - A vibrator element has a first vibration mode in which first and second detection portions perform flexural vibration in opposite directions in the opposite phase to first and second driving portions which vibrate in opposite directions according to a Coriolis force, and a second vibration mode in which the first and second detection portions perform flexural vibration in opposite directions in the same phase as the first and second driving portions which vibrate in opposite directions according to a Coriolis force. A ratio r=R | 10-02-2014 |