Patent application number | Description | Published |
20090214402 | Microplasma Array - The invention relates to a microplasma array for producing low-temperature plasmas at or close to atmospheric pressure. According to the invention, the walls of holes which are introduced into a substrate ( | 08-27-2009 |
20100171425 | ELECTRODE FOR A PLASMA GENERATOR - The invention relates to an electrode for a plasma generator for generating plasmas at atmospheric pressure or near-atmospheric pressures by means of excitation using microwaves. The invention provides an electrode made of a sheet metal strip ( | 07-08-2010 |
20110006687 | METHOD AND GENERATOR CIRCUIT FOR PRODUCTION OF PLASMA BY MEANS OF RADIO-FREQUENCY EXCITATION - Method and generator circuit for generating plasmas by means of radiofrequency excitation | 01-13-2011 |
20110181324 | SELF-ADJUSTING GATE BIAS NETWORK FOR FIELD EFFECT TRANSISTORS - The present invention is directed to a self-adjusting gate bias network for field effect transistors in radio frequency applications. A bias network for field effect transistors is provided comprising a field effect transistor having a source electrode connected to ground and a drain electrode connected to a load; a radio frequency network connected to the gate electrode; a gate bias network connected to the gate electrode; wherein a device having a non-linear characteristic is provided in series between the gate electrode and the gate bias network such that a forward bias current at the gate electrode of the field effect transistor is reduced or prevented. | 07-28-2011 |
20120018096 | PROCESS CHAMBER HAVING MODULATED PLASMA SUPPLY - The invention relates to a plasma chamber ( | 01-26-2012 |
20120285934 | DEVICE AND METHOD FOR GENERATING A PLASMA BY MEANS OF A TRAVELING WAVE RESONATOR - A device for generating a plasma, comprises an alternating voltage source, a travelling wave resonator and coupling means that are designed to couple the alternating voltage generated by the alternating voltage source into the travelling wave resonator in such a manner that travelling electromagnetic waves are produced, wherein the travelling wave resonator is designed to increase the electric field strength of the travelling electromagnetic waves in such a manner that a plasma is ignited in a gas. The invention further relates to a method for generating a plasma, comprising the steps of: generating an alternating voltage; generating travelling electromagnetic waves in a travelling wave resonator by coupling said alternating voltage into the travelling wave resonator; and increasing the electric field strength of the travelling electromagnetic waves in the travelling wave resonator in order to ignite a plasma in a gas. | 11-15-2012 |
20120313524 | MINIATURIZABLE PLASMA SOURCE - The invention relates to a plasma source with an oscillator having an active element and a resonator connected to the active element. The resonator has a hollow body, a gas inlet, a gas outlet arranged at a distal end of the hollow body about a longitudinal axis of the hollow body, and a coil arranged along the longitudinal axis of the hollow body, said coil having an effective length of one quarter of a wavelength at a resonant frequency of the resonator. A distal end of the coil is arranged relative to the gas outlet such that a plasma section can form between the distal end of the coil serving as a first plasma electrode and the gas outlet of the hollow body serving as a second plasma electrode. At a proximal end of the hollow body, the coil is lead out of the interior of the hollow body through an electrically contact-free feed-through, and a proximal end of the coil contacts the hollow body at its external side. At a first contact region located between the proximal end of the coil and the feed-through, the coil is coupled to a first gate of the active element, and at a second contact region located between the proximal end of the coil and the feed-through, the coil is coupled to a second gate of the active element. | 12-13-2012 |
20130187544 | METHOD AND APPARATUS FOR GENERATING PLASMA PULSES - A method for generating plasma pulses in which at least two sources are furnished with at least one time function, wherein each of the at least two sources radiates an electromagnetic field generated by one of the time functions, and the at least one time function and the at least two sources cooperate in such a manner that at least one predetermined field strength is realized sequentially in a temporal succession in at least two predetermined space-time points. An alternative method provides at least one source and at least one reflection element for realizing the predetermined field strength. The apparatus for generating plasma pulses comprises at least two sources and at least one data processing device or at least one source, at least one reflection element and at least one data processing device and is configured in such a manner that a method for generating plasma pulses can be executed. | 07-25-2013 |
20130213576 | PLASMA PROCESSES AT ATMOSPHERIC PRESSURE - The invention relates to an apparatus for the treatment of surfaces of a substrate by means of plasma. Said apparatus comprises a plasma source designed to generate plasma and to eject it into a plasma space with a longitudinal plasma extent, said extent extending along a main motion component of the plasma, an at least partially conductive first holding apparatus designed to hold a first workpiece, and a voltage source connected to the first holding apparatus, said voltage source being designed to generate a first acceleration voltage and to apply it to the first holding apparatus. The first holding apparatus is arranged and designed relative to the plasma source in such a manner that it places the first workpiece in such a manner that the plasma reaches the first workpiece when the first acceleration voltage is applied. | 08-22-2013 |
20130328483 | MICROWAVE ICP RESONATOR - A microwave resonator for inductively generating a plasma ( | 12-12-2013 |
20140120855 | AUTO-HETERODYNE RECEIVER - A receiver with a local oscillator, a quadrature modulator, a first mixer and a second mixer, wherein a first input of the quadrature modulator is connected to a second signal input of the receiver circuit and a second input of the quadrature modulator is connected to the local oscillator. Further, a first input of the first mixer is connected to a first signal input of the receiver circuit, a second input of the first mixer is connected to an output of the quadrature modulator, and an output of the first mixer is connected to a first signal output of the receiver circuit. A first input of the second mixer is connected to the second signal input, a second input of the second mixer is connected to the output of the quadrature modulator, and an output of the second mixer is connected to a second signal output of the receiver circuit. | 05-01-2014 |