Patent application number | Description | Published |
20080221822 | System and Method for Calibration of a Flow Device - Embodiments of the present invention provide a system and method for rapid calibration of a flow device. A flow device can be provided with a calibration flow curve (e.g., represented by an n | 09-11-2008 |
20080225925 | System and Method for Non-Intrusive Thermal Monitor - Embodiments disclosed herein provide a non-intrusive thermal (NIT) monitor for sensing temperatures useful for semiconductor manufacturing applications. In some embodiments, a NIT monitor comprises a thermopile, a fluid housing with a fluid window, and an elongated member positioned between the thermopile and the fluid window for transmitting or reflecting infrared signals corresponding to a temperature of a fluid in the fluid housing. The fluid housing may have a cross-sectional profile to enable the manipulation of the fluid flow under the fluid window, enhancing the speed and accuracy of the temperature sampling. The elongated member, which may be hollow and coated with gold, may an extended piece of the fluid housing or a part of an optics housing. In some embodiments, the NIT monitor is connected to a main conditioning circuit board via a cable for processing the temperature measurements at a remote location. | 09-18-2008 |
20090116334 | METHOD FOR CONTROLLED MIXING OF FLUIDS VIA TEMPERATURE - Embodiments of the present invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature. | 05-07-2009 |
20090230336 | Liquid flow controller and precision dispense apparatus and system - Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid. | 09-17-2009 |
20090315745 | Auto Ranging System and Method for Analog Signal - Disclosed herein are embodiments of an auto ranging system and method for an analog signal. A microprocessor is configured to digitally control the programmable gains of an operational amplifier based on the digital output of an A/D converter which may reside on or packaged along with the microprocessor. The amplifier receives a raw analog signal from a sensor and provides an amplified analog signal to the A/D converter. The gain of the amplifier generally corresponds to some range of the sensor signal. The A/D converter outputs a number of bits representative of the input signal. A microprocessor which is configured to digitally control the programmable gains of the amplifier receives and examines the output from the A/D converter and automatically adjusts the gain of the amplifier accordingly and as needed to keep or maintain the output from the A/D converter in a predetermined range. | 12-24-2009 |
20100236643 | System and Method for Flow Monitoring and Control - One embodiment of the present invention can include a flow control device that comprises an inlet, an outlet in fluid communication with the inlet, a pressure sensor, which may or may not be the only pressure sensor of the fluid control device, and a controller coupled to the pressure sensor. The controller can be configured to generate a valve control signal based on a measured pressure at a single pressure sensor. | 09-23-2010 |
20110194373 | METHOD FOR CONTROLLED MIXING OF FLUIDS VIA TEMPERATURE - Embodiments of the invention provide a method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature. | 08-11-2011 |
20110208890 | I/O SYSTEMS, METHODS AND DEVICES FOR INTERFACING A PUMP CONTROLLER - Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump. | 08-25-2011 |
20110213504 | I/O SYSTEMS, METHODS AND DEVICES FOR INTERFACING A PUMP CONTROLLER - Embodiments of the present invention provide I/O systems, methods, and devices for interfacing pump controller(s) with control device(s) which may have different interfaces and/or signaling formats. In one embodiment, an I/O interface module comprises a processor, a memory, and at least two data communications interfaces for communicating with a pumping controller and a control device. The I/O interface module can receive discrete signals from the control device, interpret them accordingly and send the packets to the pump controller. The pump controller reads the packets and takes appropriate actions at the pump. The I/O interface module can interpret packets of data received from the pump controller and assert corresponding discrete signals to the control device. The I/O interface module is customizable and allows a variety of interfaces and control schemes to be implemented with a particular multiple stage pump without changing the hardware of the pump. | 09-01-2011 |
20120090704 | Liquid Flow Controller And Precision Dispense Apparatus And System - Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid. | 04-19-2012 |
20120091165 | System and Method for Correcting for Pressure Variations Using a Motor - Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber. | 04-19-2012 |
20130220452 | Liquid Flow Controller And Precision Dispense Apparatus And System - Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid. | 08-29-2013 |