Patent application number | Description | Published |
20100248595 | ABRASIVE TOOL FOR USE AS A CHEMICAL MECHANICAL PLANARIZATION PAD CONDITIONER - An abrasive tool including a CMP pad conditioner having a substrate including a first major surface, a second major surface opposite the first major surface, and a side surface extending between the first major surface and the second major, wherein a first layer of abrasive grains is attached to the first major surface and a second layer of abrasive grains is attached to the second major surface. The conditioner further includes a first sealing member extending in a peripheral direction along a portion of the side surface of the substrate. | 09-30-2010 |
20100330886 | Corrosion-Resistant CMP Conditioning Tools and Methods for Making and Using Same - An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad. | 12-30-2010 |
20120266543 | VITRIOUS BONDED ABBRASIVE - A vitrified superabrasive product includes a superabrasive component and a vitrified bond component in which the superabrasive component is dispersed. The vitrified bond includes an oxide of a lanthanoid. Additionally, the vitrified bond component defines pores that can be essentially all less than 800 μm in diameter. Seventy percent of the pores are in a range of between about 40 μm and about 500 μm and have an average aspect ratio less than about 2. The porosity is in a range of between about 50% and about 90% of the total volume of the superabrasive product. | 10-25-2012 |
20120279139 | Resin Bonded Abrasive - A superabrasive resin product includes a superabrasive grain component, an oxide component, and a continuous phase defining a network of interconnected pores. The oxide component consists of an oxide of a lanthanoid, and the continuous phase includes a thermoplastic polymer component. The superabrasive grain component and the oxide component are distributed in the continuous phase. | 11-08-2012 |
20130078895 | ABRASIVE TOOL FOR USE AS A CHEMICAL MECHANICAL PLANARIZATION PAD CONDITIONER - An abrasive tool including a CMP pad conditioner having a substrate including a first major surface, a second major surface opposite the first major surface, and a side surface extending between the first major surface and the second major, wherein a first layer of abrasive grains is attached to the first major surface and a second layer of abrasive grains is attached to the second major surface. The conditioner further includes a first sealing member extending in a peripheral direction along a portion of the side surface of the substrate. | 03-28-2013 |
20130316630 | TOOL FOR USE WITH DUAL-SIDED CHEMICAL MECHANICAL PLANARIZATION PAD CONDITIONER - A tool includes a holder configured to couple to a dual-sided chemical mechanical planarization (CMP) pad conditioner. The holder has a magnetic material, a first magnetic field strength (H | 11-28-2013 |
20140182214 | Abrasive Articles and Method of Forming Same - An abrasive article including a bonded abrasive body having a bond material made of a vitrified material, abrasive particles comprising a first type of superabrasive material contained in the bond material, a porosity of at least about 50 vol % of the total volume of the bonded abrasive body, and a ΔCTE of not greater than about 5.5 ppm/° C., wherein ΔCTE is defined as a difference between a CTE of the bond material and a CTE of the abrasive particles. | 07-03-2014 |
20140234568 | SAPPHIRE SUBSTRATE - A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm | 08-21-2014 |
20140290149 | Vitreous Bonded Abrasive - A vitrified superabrasive product includes a superabrasive component and a vitrified bond component in which the superabrasive component is dispersed. The vitrified bond includes an oxide of a lanthanoid. Additionally, the vitrified bond component defines pores that can be essentially all less than 800 μm in diameter. Seventy percent of the pores are in a range of between about 40 μm and about 500 μm and have an average aspect ratio less than about 2. The porosity is in a range of between about 50% and about 90% of the total volume of the superabrasive product. | 10-02-2014 |
20140335308 | SAPPHIRE SUBSTRATE - A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm | 11-13-2014 |
20150059256 | ABRASIVE ARTICLE AND METHOD OF FORMING - An abrasive article including a bonded abrasive body including a bond material having a metal, abrasive particles contained within the bond material, and a filler blend including fine filler particles and coarse filler particles and defining a filler particle size ratio (Ff/Fc) of not greater than about 0.97, where Ff represents the average particle of the fine filler particles and Fc represents the average particle size of the coarse filler particles. | 03-05-2015 |