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| 20110276354 | ASSESSMENT OF SOFTWARE CODE DEVELOPMENT - A cost per unit of processed code metric is determined based on a quantity of processed code during a given time period that is attributable to one or more developers, and a cost to develop the quantity of processed code during the time period attributable to the one or more developers. Also, a quality scaling factor is calculated based on quality measurements for the quantity of processed code. Thereafter, the cost per unit of processed code metric is scaled (or discounted) by the quality scaling factor to provide a cost of development index (CDI). Because the inputs to the quality scaling factor may be determined in an automated fashion, this CDI determination permits more rapid response to any adverse assessments. Furthermore, because direct measurement of code quality is employed, more meaningful insight is provided into the likelihood that end product, i.e., the software code, is of good quality. | 11-10-2011 |
| 20120311467 | COMPUTER-IMPLEMENTED METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT FOR DISPLAYING A USER INTERFACE COMPONENT - A computer-implemented method, a computer system and a computer program product are for displaying a user interface component according to an implementation language independent description of the user interface component are provided. The method may comprise selecting, based on a characteristic of the implementation language independent description, a description parser and receiving the implementation language independent description, and determining an implementation language for displaying the user interface component. Also, the method may comprise parsing, by the description parser, the implementation language independent description, identifying a presentation rule, and selecting a set of instructions for processing the parsed description. In addition, the method may comprise processing the parsed description according to the set of instructions in order to create an implementation language dependent specification of the user interface component. The user interface component may be displayed according to the implementation language dependent specification. | 12-06-2012 |
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| 20080242810 | Use of a Combination Chain Transfer and Activating Agent to Control Molecular Weight and Optical Density of Pd Catalyzed Norbornene Polymers - A method of controlling the molecular weight of poly(cyclic) olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer. | 10-02-2008 |
| 20110009578 | Use Of A Combination Chain Transfer And Activating Agent To Control Molecular Weight And Optical Density Of Pd Catalyzed Norbornene Polymers - A method of controlling the molecular weight of poly(cyclic) olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer. | 01-13-2011 |
| 20110065878 | Norbornene-Type Polymers, Compositions Thereof And Lithographic Processes Using Such Compositions - Embodiments of the present invention relate generally to non-self imagable and imagable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof. | 03-17-2011 |
| 20110104614 | Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom - Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices. | 05-05-2011 |
| 20110244400 | Norbornene-Type Polymers, Compositions Thereof and Lithographic Process Using Such Compositions - Embodiments in accordance with the present invention provide for non-self imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming top-coat layers for overlying photoresist layers in immersion lithographic process and the process thereof. | 10-06-2011 |
| 20120056183 | GATE INSULATOR LAYER FOR ORGANIC ELECTRONIC DEVICES - Embodiments in accordance with the present invention provide for the use of polycycloolefins in electronic devices and more specifically to the use of such polycycloolefins as gate insulator layers used in the fabrication of electronic devices, the electronic devices that encompass such polycycloolefin gate insulator and processes for preparing such polycycloolefin gate insulator layers and electronic devices encompassing such layers. | 03-08-2012 |
| 20120056249 | INTERLAYER FOR ELECTRONIC DEVICES - Embodiments in accordance with the present invention provide for the use of polycycloolefins in electronic devices and more specifically to the use of such polycycloolefins as interlayers applied to fluoropolymer layers used in the fabrication of electronic devices, the electronic devices that encompass such polycycloolefin interlayers and processes for preparing such polycycloolefin interlayers and electronic devices. | 03-08-2012 |
| 20120129101 | Self-Imageable Film Forming Polymer, Compositions Thereof and Devices and Structures Made Therefrom - Polymers and compositions for forming self-imageable films encompassing such polymers that encompass norbornene-type repeating unit having at least one phenolic functionality and maleic anhydride-type repeating unit, which can be formulated to be either positive tone imaging or negative tone imaging. The films formed thereby are useful as self-imageable layers in the manufacture of microelectronic, such as semiconductor, and optoelectronic devices. | 05-24-2012 |
| 20130017488 | Self-Imageable Layer Forming Polymer and Compositions Thereof - Copolymers and compositions thereof useful for forming self-imageable films encompassing such copolymers are disclosed. Such copolymers encompass norbornene-type repeating units and maleic anhydride-type repeating units where at least some of such and maleic anhydride-type repeating units have been ring-opened. The films formed from such copolymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices. | 01-17-2013 |
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| 20090196924 | CONTROLLED-RELEASE LAMOTRIGINE FORMULATIONS - Pharmaceutical controlled-release formulations comprising particles comprising lamotrigine or a pharmaceutically acceptable salt thereof, coated with a modified-release coating comprising a modified-release coating agent and a pore-former. | 08-06-2009 |
| 20090252791 | PHARMACEUTICAL COMPOSITIONS COMPRISING A TRIPTAN AND A NONSTEROIDAL ANTI-INFLAMMATORY DRUG - Dosage forms for administering a triptan and a nonsteroidal anti-inflammatory drug are disclosed, including multilayered tablets and mini-tablets. These multilayered tablets can be in a side-by-side arrangement, can be inlayed, or one layer can completely surround another. These can be administered in a capsule or directly. Other formulations are also disclosed. | 10-08-2009 |
| 20100137358 | SOLIFENACIN COMPOSITIONS - Compositions and/or formulations comprising solifenacin or a salt thereof and processes for preparing the same. Certain compositions and formulations contain a stable amorphous form of solifenacin succinate. | 06-03-2010 |
| 20100305163 | PHARMACEUTICAL FORMULATIONS COMPRISING NSAID AND PROTON PUMP INHIBITOR DRUGS - Aspects of the invention relate to pharmaceutical formulations comprising an NSAID and acid reducer drug for therapeutic purposes, and methods of preparing the same. Further aspects of the invention relate to fixed dose pharmaceutical formulations comprising naproxen, or pharmaceutically acceptable salts thereof, and esomeprazole, or pharmaceutically acceptable salts thereof. | 12-02-2010 |
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| 20120001339 | BUMPLESS BUILD-UP LAYER PACKAGE DESIGN WITH AN INTERPOSER - The present disclosure relates to the field of integrated circuit package design and, more particularly, to packages using a bumpless build-up layer (BBUL) designs. Embodiments of the present description relate to the field of fabricating microelectronic packages, wherein an interposer, such as a through-silicon via interposer, may be used in a bumpless build-up layer package to facilitate stacked microelectronic components. | 01-05-2012 |
| 20120074580 | METHODS OF FORMING FULLY EMBEDDED BUMPLESS BUILD-UP LAYER PACKAGES AND STRUCTURES FORMED THEREBY - Methods of forming a microelectronic packaging structure and associated structures formed thereby are described. Those methods may include a die embedded in a coreless substrate, wherein a mold compound surrounds the die, and wherein the die comprises TSV connections on a first side and C | 03-29-2012 |
| 20130023088 | METHODS OF FORMING FULLY EMBEDDED BUMPLESS BUILD-UP LAYER PACKAGES AND STRUCTURES FORMED THEREBY - Methods of forming a microelectronic packaging structure and associated structures formed thereby are described. Those methods may include a die embedded in a coreless substrate, wherein a mold compound surrounds the die, and wherein the die comprises TSV connections on a first side and C4 pads on a second side of the die, a dielectric material on a first side and on a second side of the mold compound; and interconnect structures coupled to the C4 pads and to the TSV pads. Embodiments further include forming packaging structures wherein multiple dies are fully embedded within a BBUL package without PoP lands. | 01-24-2013 |
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| 20090078598 | FRAGRANCE EMITTING PATCH AND COMPACT FOR HOLDING A PLURALITY OF SUCH PATCHES - A fragrance emitting patch kit including a compact having an internal compartment, and a plurality of fragrance emitting patches positioned within the internal compartment of the compact. | 03-26-2009 |
| 20090081912 | FRAGRANCE EMITTING PATCH - A fragrance emitting patch including a primary porous layer having a top and a bottom surface, a secondary layer having a top and a bottom surface, a construction adhesive arranged between the primary layer and the secondary layer for securing the primary and secondary layers to one another, the primary layer being provided with a fragrance, and an absolute difference of a Hildebrand solubility parameter of the construction adhesive and the Hildebrand solubility parameter of the fragrance is greater than 1.5. | 03-26-2009 |
| 20090247928 | Applicator for Intravaginal Devices - An applicator for intravaginal devices includes an elongate handle, an insertion sleeve, and an intravaginal device support member. The elongate handle has an open first end that defines a cavity extending into the handle. The insertion sleeve extends from the open first end of the handle; it is arranged and configured to slide into the cavity of the handle and to accommodate an intravaginal device; and it has associated therewith a trigger. The intravaginal device support member is disposed in the cavity of the handle; it is operatively connected to the handle; and it has a bearing surface disposed proximate the open first end of the handle. The applicators are useful to ensure that intravaginal devices are placed in the appropriate position to be effective. | 10-01-2009 |
| 20100075561 | FRAGRANCE EMITTING PATCH - A fragrance emitting patch including a primary porous layer having a top and a bottom surface, a secondary layer having a top and a bottom surface, a construction adhesive arranged between the primary layer and the secondary layer for securing the primary and secondary layers to one another, the primary layer being provided with a fragrance, and an absolute difference of a Hildebrand solubility parameter of the construction adhesive and the Hildebrand solubility parameter of the fragrance is greater than 1.5. | 03-25-2010 |
| 20100076389 | ABSORBENT ARTICLE INCLUDING FRAGRANCE EMITTING LAYER - A sanitary absorbent article including a cover layer, a barrier layer, a secondary barrier layer arranged between the cover layer and the barrier layer, the secondary barrier layer provided with an oil based fragrance, wherein the secondary barrier layer is a mineral oil polymer blend microporous film. | 03-25-2010 |
| 20100218359 | RESILIENT DEVICE - An intravaginal device has a working portion (e.g., intravaginal urinary incontinence device suppository, tampon) and an anchoring portion comprising at least one member extending beyond at least one end of the working portion to maintain the working portion in place during use. | 09-02-2010 |
| 20110077578 | METHOD OF TREATING URINARY INCONTINENCE - A method for treating urinary incontinence includes the steps of inserting into the woman's vagina a first disposable device, removing the first disposable device, and inserting a second disposable device substantially identical to the first disposable device. The disposable devices have a working portion with opposed working surfaces to provide support to an associated urinary system and an anchoring portion to maintain the disposable device in place during use. The anchoring portion has at least one member extending beyond at least one end of the working portion | 03-31-2011 |
| 20110152604 | INTRAVAGINAL INCONTINENCE DEVICE - An intravaginal urinary incontinence device has an insertion end and an opposed withdrawal end. The device has a resilient frame including a working portion disposed proximate the withdrawal end and an anchoring portion disposed proximate the insertion end. The working portion has a resilient structure having a plurality of connected elongate elements arranged and configured to define opposed working surfaces for providing support to an associated urinary system. The anchoring portion extends beyond the working portion and has a plurality of connected elongate elements arranged and configured to expand laterally within a user's vagina. The elongate elements are formed of a high modulus polymer having an elongation at yield of at least 3% and an elastic modulus of at least 2 Gpa. | 06-23-2011 |
| 20110152605 | INTRAVAGINAL INCONTINENCE DEVICE - An intravaginal urinary incontinence device has an insertion end and an opposed withdrawal end. The device has a resilient frame including a working portion disposed proximate the withdrawal end and an anchoring portion disposed proximate the insertion end. The working portion has a resilient structure having a plurality of connected elongate elements for providing support to an associated urinary system. The anchoring portion has a plurality of connected elongate elements arranged to expand laterally within a user's vagina. The elongate elements are formed of a high modulus polymer having an elastic modulus of at least 2 or 3 GPa. Additionally, the polymer may have an Initial Stress @ 3% Strain of at least about 30 MPa, an elongation at yield of at least 3%, a Stress Ratio of at least about 0.5, and/or an Aged Stress (t=50 hrs @ 40° C.) @ 3% Strain is greater than about 35 MPa. | 06-23-2011 |
| 20120136199 | Cushioned Resilient Intravaginal Urinary Incontinence Device - An intravaginal device has an insertion end, a withdrawal end, a longitudinal axis, and a device interior, and it includes a first structural material formed into a device frame and a second cushioning material having a thickness surrounding portions of the device frame. The first structural material includes a working portion disposed proximate the withdrawal end and an anchoring portion extending therefrom disposed proximate the insertion end. The device frame includes interconnected elongate elements having a maximum cross-section of less than about 5 mm and a longitudinal axis. The device frame has a plurality of primary bearing surfaces arranged and configured to bear on vaginal tissue during insertion and use, and the thickness of the cushioning material on the device frame is greater on the primary bearing surfaces than on surfaces of the device frame disposed toward the device interior. The device further includes a withdrawal element operatively connected to the working portion. Preferably, the first structural material is a high modulus polymer and the second material is a thermoplastic elastomer. The intravaginal device may be included in a device delivery system including a delivery applicator. | 05-31-2012 |
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| 20110096914 | Method and System for Context Sensitive Calling - A system and method for context sensitive calling is disclosed in which context associated with a call is pulled from a file or database and forwarded with the call. In some embodiments, the context is pulled using a context reference number, and the context may be dependant upon the type of called terminal equipment available. | 04-28-2011 |
| 20110183652 | COMMUNICATION METHOD AND SYSTEM - A software button and software agent downloaded to a computing in response to actuation of the button make it possible to create a communication connection providing privacy, security and dynamic control of service. In one embodiment an online telephone directory comprised of software buttons is provided, in which a calling party can select a called party by clicking a software button dedicated to the called party. The button provides an identification of the called party, but all contact information is hidden and inaccessible to the calling party. Upon actuation of the button server containing the directory causes download of a software agent to the calling party's computing device, causing it to establish communication with the called party. In a second embodiment, software buttons provide a communication service which is dynamic, the nature or type of service changing based on conditions predefined by the called. For example, a called party may specify that, during business hours, communication be by telephone to a specific telephone number and outside of business hours, communication be by text message if urgent and e-mail if not urgent. When the calling party clicks a software button, the software agent downloaded to his computing device would then be a soft phone during business hours. Outside of business hours, a software agent would be downloaded to the calling party which would inquire whether the call is urgent and, depending upon the response, would provide a text message agent or an e-mail agent, respectively. | 07-28-2011 |
| 20110274259 | METHOD AND SYSTEM FOR IMPROVED COMMUNICATION SECURITY - Security is improved in a communication system in which a communication connection is established when a user who has received a software button on his computing device (a Recipient) clicks on the button. When a Recipient first actuates a software button, a basic type of communication connection is established, during which the Recipient's identity can be verified. The Recipient then establishes a personal identification code, which he will have to provide upon future actuations of the software button. The system then enables other types of communication connections to be established by the Recipient. After the Recipient actuates the software button and verifies his identity, the system remembers the identity and location of the computing device he is using. When the Recipient subsequently actuates the software button, the identity and location of his computing device are checked, and verification of his identity is suppressed if they have not changed. | 11-10-2011 |
| 20120140907 | Communication Method and System - A system is disclosed that may include a directory server on a network, the server having a network interface that includes a plurality of actuatable software buttons, each button identifying a listed party; a database of private information for listed parties; a button server on the network containing executable software agents constructed to create a communication interface for a communication connection; wherein the buttons are constructed to transfer to the user's computing device information describing the type of connection and private address information for the listed party identified by the actuated button, the button server then downloading, to the computing device of the user actuating the button, a software agent constructed to create a communication interface to the private address of the listed party identified by the actuated button. | 06-07-2012 |
| 20120192083 | METHOD AND SYSTEM FOR ENHANCED ONLINE SEARCHING - A user performing a search on a computing device, for example with a browser application, is provided with one or more software buttons on the display of the device. The buttons are created based on the subject matter of his search. As the user searches, his queries are stored. Should the user actuate a software button, real time communication, for example a telephone call, is established with an adviser, who receives a copy of the user's search queries on his computing device. | 07-26-2012 |
| 20120203793 | Method and System for Online Searching of Physical Objects - Online searching related to a physical object by a user making use of a computing device is accomplished by creating a representation of the object at the user's computing device. A software button originating remote from the user's computing device is provided to the user's computing device, and the button is constructed based upon the representation of the object. The software button is associated with a second device in use by a subscriber associated with the object, the button and it is actuable by the user. Upon actuation of the software button by the user, an executable agent is downloaded to his computing device, effective to establish a connection between the user's computing device and the second device. | 08-09-2012 |
| 20120275579 | Voice Message Communication Method and System - A system is disclosed which provides communication of recorded voice messages over a network among a plurality of users having voice communication devices. The system has a voice message server connected to the network, which includes a receiver which receives from a sending user's communication device a voice message signal including a header component and a recorded voice message component is stored at the server in association with the corresponding header. The header component identifies the sending user and an intended recipient user, and it is transmitted to the communication device of the intended recipient identified in the header component. The corresponding voice message component is transmitted to the recipient user's communication device in response to the recipient user's communication device requesting it. The recipient user may send a responsive voice message to the server addressed to the sending user. | 11-01-2012 |
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| 20090251122 | Method for DC/DC Conversion and DC/DC Converter Arrangement - A method for DC/DC conversion which comprises the steps of controlling a first switch ( | 10-08-2009 |
| 20100039177 | Amplifier Arrangement and Method for Amplification - An amplifier arrangement comprises a first transistor ( | 02-18-2010 |
| 20100308903 | Filtering Arrangement, Filtering Method and Current Sensing Arrangement - A filtering arrangement comprises a reference voltage input ( | 12-09-2010 |
| 20100327833 | Buck-Boost Switching Regulator and Method Thereof - A method for DC/DC conversion comprises operating in a Boost mode of operation or in a Buck-Boost mode of operation. Furthermore, the method comprises switching from the Boost mode of operation to the Buck-Boost mode of operation, if a desired value (VOUTR) of an output voltage (VOUT) which is generated from a supply voltage (VIN) by the DC/DC conversion is smaller than a first reference voltage (VR | 12-30-2010 |
| 20110187338 | Controlled Current Source and Method for Sourcing a Current - A controlled current source comprises a signal input to receive a control input bus signal (D | 08-04-2011 |
| 20110199062 | DC/DC Converter Arrangement and Method for DC/DC Conversion - A DC/DC converter arrangement comprises an input terminal ( | 08-18-2011 |
| 20110199069 | Band Gap Reference Circuit - A band gap reference circuit comprises a first branch ( | 08-18-2011 |
| 20110279173 | Controlled Charge Pump Arrangement and Method for Controlling a Clocked Charge Pump - A controlled charge pump comprises a clock operated charge pump having an output terminal to provide an output voltage. A first sub-circuit is coupled to the output terminal of the clocked operated charge pump and adapted to provide a first control signal in response to a comparison of the output voltage with a first reference signal. A second sub-circuit is coupled to the clocked operated charge pump and provides a second control signal in response to a comparison of a switch current within the clocked operated charge pump with a second reference signal. A clock skip controller is adapted to control the mode of operation of the clocked operated charge pump in response to that first and second control signals. | 11-17-2011 |
| 20110316499 | Current Source Regulator - A current source regulator for controlling an output device (Mp) of current source, the output device (Mp) providing an output current (Isrc) to a load. The current source regulator comprises a first feedback loop ( | 12-29-2011 |
| 20120105138 | Circuit Charge Pump Arrangement and Method for Providing a Regulated Current - A power source arrangement comprises a controlled and clocked operated power source, that power source providing an output voltage out of a plurality of output voltages in response to a first multiplication factor. One or more regulated current sources are connected to the controlled and clocked operated power source to provide an output current to respective loads. Each of the one or more regulated current sources is adapted to provide a first indication signal upon a regulated operation of the respective current source. The power source arrangement further comprises a dummy power source as well as a dummy current source connected to the dummy power source. The dummy current source receives a load signal corresponding to a voltage drop over the loads connected to the one or more regulated current sources and provides a second indication signal in response thereto. A control circuit receives the respective first and second indication signal and provides the control signal to the controlled and clocked operated power source in response thereto. | 05-03-2012 |
| 20120187932 | Voltage Converter and Method for Voltage Conversion - A voltage converter ( | 07-26-2012 |
| 20120228934 | Multi-Current Source and Method for Regulating Current - A multi-current-source comprises a voltage converter (VC), a first current source (CS | 09-13-2012 |
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| 20100308463 | INTERFACIAL CAPPING LAYERS FOR INTERCONNECTS - Adhesive layers residing at an interface between metal lines and dielectric diffusion barrier (or etch stop) layers are used to improve electromigration performance of interconnects. Adhesion layers are formed by depositing a precursor layer of metal-containing material (e.g., material containing Al, Ti, Ca, Mg, etc.) over an exposed copper line, and converting the precursor layer to a passivated layer (e.g., nitridized layer). For example, a substrate containing exposed copper line having exposed Cu—O bonds is contacted with trimethylaluminum to form a precursor layer having Al—O bonds and Al—C bonds on copper surface. The precursor layer is then treated to remove residual organic substituents and to form Al—N, Al—H bonds or both. The treatment can include direct plasma treatment, remote plasma treatment, UV-treatment, and thermal treatment with a gas such as NH | 12-09-2010 |
| 20110236594 | In-Situ Deposition of Film Stacks - Methods and hardware for depositing film stacks in a process tool in-situ (i.e., without a vacuum break or air exposure) are described. In one example, a method for depositing, on a substrate, a film stack including films of different compositions in-situ in a process station using a plasma is described, the method including, in a first plasma-activated film deposition phase, depositing a first layer of film having a first film composition on the substrate; in a second plasma-activated deposition phase, depositing a second layer of film having a second film composition on the first layer of film; and sustaining the plasma while transitioning a composition of the plasma from the first plasma-activated film deposition phase to the second plasma-activated film deposition phase. | 09-29-2011 |
| 20110244694 | DEPOSITING CONFORMAL BORON NITRIDE FILMS - A method of forming a boron nitride or boron carbon nitride dielectric produces a conformal layer without loading effect. The dielectric layer is formed by chemical vapor deposition (CVD) of a boron-containing film on a substrate, at least a portion of the deposition being conducted without plasma, and then exposing the deposited boron-containing film to a plasma. The CVD component dominates the deposition process, producing a conformal film without loading effect. The dielectric is ashable, and can be removed with a hydrogen plasma without impacting surrounding materials. The dielectric has a much lower wet etch rate compared to other front end spacer or hard mask materials such as silicon oxide or silicon nitride, and has a relatively low dielectric constant, much lower then silicon nitride. | 10-06-2011 |
| 20120028454 | PLASMA ACTIVATED CONFORMAL DIELECTRIC FILM DEPOSITION - Methods of depositing a film on a substrate surface include surface mediated reactions in which a film is grown over one or more cycles of reactant adsorption and reaction. In one aspect, the method is characterized by intermittent delivery of dopant species to the film between the cycles of adsorption and reaction. | 02-02-2012 |
| 20120258261 | INCREASING ETCH SELECTIVITY OF CARBON FILMS WITH LOWER ABSORPTION CO-EFFICIENT AND STRESS - A method for depositing a film includes arranging a substrate in a plasma enhanced chemical vapor deposition chamber. A first ashable hardmask (AHM) layer that is carbon-based is deposited on the substrate. During the depositing of the first AHM layer, doping is performed with at least one dopant selected from a group consisting of silicon, silane, boron, nitrogen, germanium, carbon, ammonia, and carbon dioxide. An atomic percentage of the at least one dopant is greater than or equal to 5% of the first AHM layer. | 10-11-2012 |
| 20130008378 | DEPOSITING CONFORMAL BORON NITRIDE FILMS - A method of forming a boron nitride or boron carbon nitride dielectric produces a conformal layer without loading effect. The dielectric layer is formed by chemical vapor deposition (CVD) of a boron-containing film on a substrate, at least a portion of the deposition being conducted without plasma, and then exposing the deposited boron-containing film to a plasma. The CVD component dominates the deposition process, producing a conformal film without loading effect. The dielectric is ashable, and can be removed with a hydrogen plasma without impacting surrounding materials. The dielectric has a much lower wet etch rate compared to other front end spacer or hard mask materials such as silicon oxide or silicon nitride, and has a relatively low dielectric constant, much lower then silicon nitride. | 01-10-2013 |
| 20130040447 | CONFORMAL DOPING VIA PLASMA ACTIVATED ATOMIC LAYER DEPOSITION AND CONFORMAL FILM DEPOSITION - Disclosed herein are methods of doping a patterned substrate in a reaction chamber. The methods may include forming a first conformal film layer which has a dopant source including a dopant, and driving some of the dopant into the substrate to form a conformal doping profile. In some embodiments, forming the first film layer may include introducing a dopant precursor into the reaction chamber, adsorbing the dopant precursor under conditions whereby it forms an adsorption-limited layer, and reacting the adsorbed dopant precursor to form the dopant source. Also disclosed herein are apparatuses for doping a substrate which may include a reaction chamber, a gas inlet, and a controller having machine readable code including instructions for operating the gas inlet to introduce dopant precursor into the reaction chamber so that it is adsorbed, and instructions for reacting the adsorbed dopant precursor to form a film layer containing a dopant source. | 02-14-2013 |
