Patent application number | Description | Published |
20110079508 | METHOD FOR COATING A SUBSTRATE AND COATER - A method is provided for coating substrates with at least one cathode assembly having a rotatable target, the rotatable target being provided with at least one magnet assembly positioned there within. The method includes providing a potential difference between the substrate and the rotatable target that is varied over time during coating. Further, the method may include positioning the magnet assembly with respect to the rotatable target so that the magnet assembly is asymmetrically aligned with respect to a plane perpendicularly extending from the substrate to the axis of the rotatable target for a predetermined first time interval. The magnet assembly is then moved to a second position that is also asymmetrically aligned. Further, a coater for coating substrates is provided including a cathode assembly with a rotatable curved target and two magnet assemblies positioned within the rotatable curved target. | 04-07-2011 |
20110089559 | METHOD AND INSTALLATION FOR PRODUCING A SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE - A method of producing a semiconductor device is provided, the semiconductor device including a substrate, a semiconductor layer and at least one metallization layer adjacent to at least one element chosen from the substrate and the semiconductor layer, the method including forming at least one metallization layer which, adjacent to at least one element chosen from the substrate and the semiconductor layer, includes oxygen. | 04-21-2011 |
20120056173 | STAGGERED THIN FILM TRANSISTOR AND METHOD OF FORMING THE SAME - A staggered thin film transistor and a method of forming the staggered thin film transistor are provided. The thin film transistor includes an annealed layer stack including an oxide containing layer, a copper alloy layer deposited on the conductive oxide layer, a copper containing oxide layer, and a copper containing layer. | 03-08-2012 |
20120080309 | SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL - The present disclosure describes a method of coating a substrate, the method including forming a layer of sputtered material on the substrate. Forming the layer of sputtered material may include: sputtering material from at least one target over the substrate; varying the relative position between the at least one target and the substrate to a first position (I), which first position is maintained for a predetermined first time interval; and varying the relative position between the at least one target and the substrate to a second position (II), which second position is maintained for a predetermined second time interval. The present disclosure further describes a system for coating a substrate. | 04-05-2012 |
20120104616 | METHOD FOR DEPOSITING A THIN FILM ELECTRODE AND THIN FILM STACK - A method for depositing at least one thin-film electrode onto a transparent conductive oxide film is provided. At first, the transparent conductive oxide film is deposited onto a substrate to be processed. Then, the substrate and the transparent conductive oxide film are subjected to a processing environment containing a processing gas acting as a donor material or an acceptor material with respect to the transparent conductive oxide film. The at least one thin-film electrode is deposited onto at least portions of the transparent conductive oxide film. A partial pressure of the processing gas acting as the donor material or the acceptor material with respect to the transparent conductive oxide film is varied while depositing the at least one thin-film electrode onto at least portions of the transparent conductive oxide film. Thus, a modified transparent conductive oxide film having reduced interface resistance and bulk resistance can be obtained. | 05-03-2012 |
20120273343 | METHOD FOR COATING A SUBSTRATE AND COATER - A method is provided for coating a substrate ( | 11-01-2012 |
20130284590 | SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL - The present disclosure describes a method of coating a substrate, the method including forming a layer of sputtered material on the substrate. Forming the layer of sputtered material may include: sputtering material from at least one rotatable target over the substrate; varying the relative position between the at least one target and the substrate. In addition, the present disclosure describes varying the distance between a target and a substrate during the sputter process. The present disclosure further describes a system for coating a substrate. | 10-31-2013 |
20140332369 | MULTIDIRECTIONAL RACETRACK ROTARY CATHODE FOR PVD ARRAY APPLICATIONS - A cathode assembly for a sputter deposition apparatus and a method for coating a substrate is provided. The cathode assembly has a coating side for coating on a substrate. Further, the cathode assembly includes a rotary target assembly adapted for rotating a target material around a rotary axis; at least a first magnet having an inner magnet pole and at least one outer magnet poles and being adapted for generating one or more plasma regions. The cathode assembly has a first angular coordinate for a magnet pole, the magnet pole being provided for the coating side, and a second angular coordinate for a further magnet pole, the magnet pole being provided for the coating side; wherein the first angular coordinate and the second angular coordinate define an angle a larger than about 20 degrees and smaller than about 160 degrees. | 11-13-2014 |
20150214018 | METHOD FOR COATING A SUBSTRATE AND COATER - A method for coating a substrate by means of a cathode arrangement including at least two rotatable cathodes is disclosed. The method includes rotating at least one of the at least two rotatable cathodes in a first direction, and, at the same time, rotating at least one of the at least two rotatable cathodes in a second direction. The first direction is opposite to the second direction. Furthermore, a controller for controlling a coating process is disclosed. Furthermore, a coater for coating a substrate is disclosed. The coater includes a cathode arrangement with at least two rotatable cathodes and a controller as disclosed herein. | 07-30-2015 |
20160002770 | APPARATUS WITH NEIGHBORING SPUTTER CATHODES AND METHOD OF OPERATION THEREOF - An apparatus for deposition of a layer stack on a non-flexible substrate or on a substrate provided in a carrier is described. The apparatus includes a vacuum chamber, a transport system, wherein the transport system and the vacuum chamber are configured for inline deposition, a first support for a first rotatable sputter cathode rotatable around a first rotation axis within the vacuum chamber, wherein a first deposition zone for depositing a first material is provided, a second support for a second rotatable sputter cathode rotatable around a second rotation axis within the vacuum chamber, wherein a second deposition zone for depositing a second material is provided, wherein the first rotation axis and the second rotation axis have a distance from each other of 700 mm or below; and a separator structure between the first rotation axis and the second rotation axis, adapted to receive the first material sputtered towards the second deposition zone and the second material sputtered towards the first deposition zone, wherein apparatus is configured for deposition of the layer stack comprising a layer of the first material and a subsequent layer of the second material. | 01-07-2016 |
Patent application number | Description | Published |
20120197474 | MOTOR VEHICLE WITH ELECTRIC MOTOR - A motor vehicle comprising an electric motor, at least one battery, and an electronic regulation unit connected to a potentiometer of the accelerator to regulate the power supply of the electric motor. The stator of the electric motor is rotatably mounted on two fixed supports joined to the frame of the vehicle, an axle shaft of a wheel is connected to the stator and the axle shaft of the other wheel is connected to the rotor. The vehicle additionally comprises a rotation reversing device to reverse the rotation of one of the two axle shafts of the wheels with respect to the rotation of the rotor or stator, respectively, an endothermic motor, an electric generator connected to the battery and a three way clutch to couple the endothermic motor to the generator and/or stator of the electric motor. | 08-02-2012 |
20150190817 | CENTRIFUGAL SEPARATOR OR DECANTER PROVIDED WITH IMPROVED CLOSING SYSTEM - A centrifugal separator or decanter having a rotary drum wherein product is introduced in order to be separated at least in a light phase and a heavy phase, a first outlet of the light phase, a second outlet of the heavy phase, and a closing device adapted to close/open the second outlet of the heavy phase and/or a third outlet of solid sediments. The closing device has an electromagnetic actuator. | 07-09-2015 |
20150257328 | PLOW - A plow has a share used to cut the soil, a moldboard connected to the share used to turn over the cods of soil cut by the share, a beam connecting the share-moldboard assembly to a motor vehicle, a vibrator assembly connected to the moldboard to put the share-moldboard assembly into vibration, a force sensor connected to the beam to detect the ploughing force on the beam, a controller connected to the force sensor and the vibrator assembly to control the vibration of the vibrator assembly according to the force value detected by the force sensor, the controller being set in such manner to acquire the force values from the force sensor, pursuing a minimum force through the control of the vibrator assembly. | 09-17-2015 |