Patent application number | Description | Published |
20080210022 | Force Measuring Device Having A Rigid Stem - A force measuring device has a rigid stem joined to an essentially flat deformable membrane. The membrane includes detectors for detecting a deformation of the membrane. A portion of the stem comes in contact with an element capable of being subjected to the action of a force. The stem has slots forming anchoring means for interacting with the element. The force measuring device is for use, in particular, in improving the transmission of loads to the deformable membrane. | 09-04-2008 |
20080245144 | Sensor Structure in Particular For a Harsh Environment in a Motor Vehicle and Preheater Plug Comprising Such a Sensor - A sensor structure notably for a harsh environment in a motor vehicle is disclosed. The sensor structure has a sensor body ( | 10-09-2008 |
20080314148 | Piezo-resistive detection resonant device made using surface technologies - This invention relates to a resonant device with detection in the piezo-resistive plane made using surface technologies on a bulk, which comprises a resonator connected to this bulk by at least one embedded portion, means of exciting this resonator and detection means comprising at least one suspended beam type strain gauge made from piezo-resistive material, in which each strain gauge has a common plane with the resonator, and is connected to this resonator at a point situated outside of this at least one embedded portion to increase the stress observed by this strain gauge. | 12-25-2008 |
20090038386 | SENSOR STRUCTURE IN PARTICULAR FOR A HARSH ENVIRONMENT IN A MOTOR VEHICLE - A sensor structure is disclosed, notably for a harsh environment in a motor vehicle. The sensor includes a sensor body having, at one end, an element sensitive to the quantity to be measured in the harsh environment and, at another end, a circuit for connecting it, placed outside the harsh environment, physically separated from each other, connected by means for transmitting data without a connection, and between which means are provided that are permeable to data, for protecting the connecting circuit from the environment. | 02-12-2009 |
20090139342 | DEVICE WITH DETECTION BY SUSPENDED PIEZORESISTIVE STRAIN GAUGE COMPRISING A STRAIN AMPLIFIER CELL - A device, with piezoresistive detection comprising at least:
| 06-04-2009 |
20090170231 | METHOD OF PRODUCING MECHANICAL COMPONENTS OF MEMS OR NEMS STRUCTURES MADE OF MONOCRYSTALLINE SILICON - The invention concerns a method of producing at least one mechanical component of a MEMS or NEMS structure from a monocrystalline silicon substrate, comprising the steps of:
| 07-02-2009 |
20090321887 | METHOD OF FABRICATING AN ELECTROMECHANICAL STRUCTURE INCLUDING AT LEAST ONE MECHANICAL REINFORCING PILLAR - The invention relates to a method of fabricating an electromechanical structure presenting a first substrate ( | 12-31-2009 |
20100006840 | MEMS/NEMS STRUCTURE COMPRISING A PARTIALLY MONOCRYSTALLINE ANCHOR AND METHOD FOR MANUFACTURING SAME - The invention relates to a method for producing a MEMS/NEMS structure from a substrate made in a monocrystalline semiconductor material, the structure comprising a flexible mechanical element connected to the substrate by at least one anchoring zone, the method comprising the following steps:
| 01-14-2010 |
20100186506 | GYROMETER IN SURFACE TECHNOLOGY, WITH OUT-OF-PLANE DETECTION BY STRAIN GAUGE - The invention concerns a gyrometer-type device, comprised in a substrate ( | 07-29-2010 |
20100186510 | INERTIAL OR RESONATING SENSOR IN SURFACE TECHNOLOGY, WITH OUT OF PLANE DETECTION BY STRAIN GAUGE - The invention involves a surface type MEMS sensor, characterized by that fact that it has:
| 07-29-2010 |
20100317137 | METHOD FOR RELEASING THE SUSPENDED STRUCTURE OF A NEMS AND/OR NEMS COMPONENT - A method for making a microelectronic device comprising at least one electromechanical component provided with a mobile structure,
| 12-16-2010 |
20110147860 | MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR OUT-OF-PLANE DISPLACEMENTS OF THE STRUCTURE AND ITS PRODUCTION PROCESS - Process for producing a micromechanical structure comprising a substrate and a stack of at least two layers arranged on the substrate, a mobile part formed in the stack and a fixed part relative to the substrate formed in the stack, and an opposite surface formed between the fixed part and the mobile part, forming for example stop means to limit displacement of the mobile part in a direction substantially perpendicular to the stack, which process using at least one sacrificial layer between the substrate and the stack made of material suitable to be etched selectively relative to the materials of the stack. | 06-23-2011 |
20110219875 | FORCE SENSOR WITH REDUCED NOISE - A MEMS or NEMS device for detecting a force following a given direction, comprising a support ( | 09-15-2011 |
20110304325 | MAGNETIC FIELD SENSOR WITH SUSPENDED STRESS GAUGE - A magnetic field sensor including a body including a magnetic mechanism capable of forming a torque applied on the body by action of an external magnetic field to be detected; a connector, separated from the body, mechanically connecting the body to an inlay portion of the sensor by at least one pivot link having an axis perpendicular to the direction of the magnetic field to be detected; a detector detecting stress applied by the body by action of the torque, separated from the connector and including at least one suspended stress gauge including a first part mechanically connected to the inlay portion, a second part mechanically connected to the body, and a third part provided between the first and second parts and suspended between the inlay portion and the body. | 12-15-2011 |
20120006123 | INERTIAL SENSOR HAVING AN OSCILLATING ROTATING DISK - The present invention relates to an inertial rotary movement microsensor for detecting a rotational movement around what is referred to as an axis of rotation (X), provided with a part that is movable relative to a fixed part, the movable part comprising an excitation mass configured to undergo an oscillating movement in an excitation direction (Z) by an exciter so as to generate a Coriolis force induced by the rotational movement, a detection mass kinematically connected to the excitation mass by a linkage configured to transmit the Coriolis force at least partly without transmitting the oscillating movement around the excitation axis at least partly, a detector configured to measure the Coriolis force transmitted to the detection mass, characterized in that the detector is provided with at least one strain gauge suspended between the detection mass and an anchoring part integral with the fixed part. | 01-12-2012 |
20120017693 | MEMS DYNAMIC PRESSURE SENSOR, IN PARTICULAR FOR APPLICATIONS TO MICROPHONE PRODUCTION - A pressure sensor of the MEMS and/or NEMS type is disclosed, including:
| 01-26-2012 |
20120018244 | MEMS-TYPE PRESSURE PULSE GENERATOR - The invention relates to a device for generating or recovering acoustic energy, including:
| 01-26-2012 |
20120210792 | IN-PLANE PIEZORESISTIVE DETECTION SENSOR - An in-plane MEMS or NEMS detection device for measuring displacements directed along a direction including a seismic mass suspended with respect to a substrate, the seismic mass being pivotable about an axis perpendicular to the plane of the substrate, at least one piezoresistive strain gauge mechanically connected to the seismic mass and the substrate, wherein the piezoresistive gauge has a thickness lower than that of the seismic mass, and wherein the axis of the piezoresistive strain gauge is orthogonal to the plane containing the pivot axis and the center of gravity of the seismic mass and the plane is orthogonal to the direction of the displacements to be measured. | 08-23-2012 |
20120279299 | GYROMETER WITH REDUCED PARASITIC CAPACITANCES - Gyrometer comprising a substrate and an inertial mass suspended above the substrate, the inertial mass comprising an excitation part and a detection part, means of moving the excitation part in at least one direction contained in the plane of said inertial mass, and capacitive detection means detecting movement of said detection part outside the plane of said mass, said capacitive detection means comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with said detection part, said electrode being held above said detection part by at least one pillar passing through the inertial mass. | 11-08-2012 |
20130000411 | PRESSURE MEASUREMENT DEVICE HAVING AN OPTIMIZED SENSITIVITY - A MEMS and/or NEMS pressure measurement device comprising a deformable membrane suspended on a substrate, one of the faces of the membrane being intended to be subjected to the pressure to be measured, detection means with strain gauges for the deformation of the membrane, said detection means being formed on a substrate and a non-deformable arm, transmitting the deformation in an amplified manner of the membrane to the detection means, the arm being rotatably hinged to the substrate about an axis (Y) substantially parallel to the plane of the membrane and which is integral with the membrane so that it transmits a deformation of the membrane to the detection means in an amplified manner. | 01-03-2013 |
20130137245 | METHOD FOR MAKING A STRUCTURE COMPRISING AT LEAST ONE MULTI-THICK ACTIVE PART - A method for making a structure comprising an active part comprising at least two layers from a first single crystal silicon substrate, said method comprising the steps of:
| 05-30-2013 |
20130267049 | METHOD FOR PRODUCING A STRUCTURE COMPRISING AT LEAST ONE ACTIVE PART HAVING ZONES OF DIFFERENT THICKNESSES - Method for producing a structure comprising an active part comprising a first and a second suspended zone of different thicknesses from a first comprising substrate, said method comprising the following steps:
| 10-10-2013 |
20130273683 | Method of Fabricating An Electromechanical Structure Including at Least One Mechanical Reinforcing Pillar - The invention provides a method of fabricating an electromechanical structure presenting a first substrate including a layer of monocrystalline material covered in a sacrificial layer that presents a free surface, the structure presenting a mechanical reinforcing pillar in the sacrificial layer, the method including etching a well region in the sacrificial layer to define a mechanical pillar; depositing a first functionalization layer of the first material to at least partially fill the well region and cover the free surface of the sacrificial layer around the well region; depositing a second material different from the first material for terminating the filling of the well region to thereby cover the first functionalization layer around the well region, planarizing the filler layer, the pillar being formed by the superposition of the first material and second material in the well region; and releasing the electromechanical structure by removing at least partially the sacrificial layer. | 10-17-2013 |
20140177881 | DEVICE WITH A CONTROLLED DISPLACEMENT MEMBRANE - Membrane device comprising a support ( | 06-26-2014 |