Patent application number | Description | Published |
20100219050 | DIRECT DRIVE MODULAR BELT CONVEYOR, CARTRIDGE, AND QUICK CONNECT-DISCONNECT CONSTANT VELOCITY DRIVE SHAFT, FOR HIGH SPEED FOUP TRANSPORT - A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor. | 09-02-2010 |
20120062866 | MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG - Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag. | 03-15-2012 |
20120188557 | Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure - An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly. | 07-26-2012 |
20120267219 | DIRECT DRIVE MODULAR BELT CONVEYOR, CARTRIDGE, AND QUICK CONNECT-DISCONNECT CONSTANT VELOCITY DRIVE SHAFT, FOR HIGH SPEED FOUP TRANSPORT - A conveyor system includes a cartridge, which defines a section of the conveyor. In one embodiment, the cartridge includes a number of wheels, which are designed as a unit for a conveyor section and the wheels of the cartridge are designed to hold a belt. A conveyor section, in one optional embodiment, includes integrated sensors for detecting the presence of a container (e.g., FOUP), and each conveyor section can implement precision sheet metal rails that facilitate high speed FOUP transport. In one embodiment, each conveyor section has two sides. Each side has a cartridge that has a belt. In particular embodiments, one side of the conveyor section includes a drive motor, that drives the conveyor. | 10-25-2012 |
20130069449 | MODULAR COIL ARRAYS FOR PLANAR AND LINEAR MOTORS - Coil arrays are disclosed for a planar or linear motor. An exemplary coil array includes multiple coil modules. Each coil module includes at least one coil set, respective electrical circuitry to and from the coil set, at least one respective hydraulic cooling device for the coil set, and respective hydraulic conduitry to and from the cooling device. The coil modules are interchangeably mountable relative to each other in the array such that mounting the coil module to the array produces accompanying hydraulic and electrical connections between the array and coil module, and removing the coil module from the array severs the connections. | 03-21-2013 |
20130140372 | TEMPERATURE CONTROL OF A MOVER WITH ACTIVE BYPASS, PREDICTIVE FEEDFORWARD CONTROL, AND PHASE CHANGE HOUSING - A stage assembly includes (i) a stage; (ii) a base assembly; (iii) a stage mover, and (iv) a temperature controller. The stage mover includes a magnet array and a conductor array. The conductor array can be grouped into one or more zones. The temperature controller selectively directs a circulation fluid at a first temperature, and at a second temperature to each zone. Feedforward signals based on the expected heat dissipation of the conductor array can be used to improve the response time of the temperature controller. The temperature controller can include a phase change material and a housing assembly that retains the phase change material in an enclosed chamber near the conductor array. | 06-06-2013 |
20150075751 | FLUID DISTRIBUTION NETWORK FOR LARGE STATOR MOTOR - A reaction assembly ( | 03-19-2015 |