| Patent application number | Description | Published |
|---|
| 20080208372 | SCHEDULING WITH NEURAL NETWORKS AND STATE MACHINES - Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors. | 08-28-2008 |
| 20080219806 | SEMICONDUCTOR MANUFACTURING PROCESS MODULES - A variety of process modules are described for use in semiconductor manufacturing processes. | 09-11-2008 |
| 20080219807 | SEMICONDUCTOR MANUFACTURING PROCESS MODULES - A variety of process modules are described for use in semiconductor manufacturing processes. | 09-11-2008 |
| 20080219808 | SEMICONDUCTOR MANUFACTURING PROCESS MODULES - A variety of process modules are described for use in semiconductor manufacturing processes. | 09-11-2008 |
| 20080219809 | SEMICONDUCTOR MANUFACTURING PROCESS MODULES - A variety of process modules are described for use in semiconductor manufacturing processes. | 09-11-2008 |
| 20080219810 | SEMICONDUCTOR MANUFACTURING PROCESS MODULES - A variety of process modules are described for use in semiconductor manufacturing processes. | 09-11-2008 |
| 20080219811 | SEMICONDUCTOR MANUFACTURING PROCESS MODULES - A variety of process modules are described for use in semiconductor manufacturing processes. | 09-11-2008 |
| 20080219812 | SEMICONDUCTOR MANUFACTURING PROCESS MODULES - A variety of process modules are described for use in semiconductor manufacturing processes. | 09-11-2008 |
| 20080232947 | SEMICONDUCTOR WAFER HANDLING AND TRANSPORT - Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency. | 09-25-2008 |
| 20080232948 | SEMICONDUCTOR WAFER HANDLING AND TRANSPORT - Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency. | 09-25-2008 |
