| Patent application number | Description | Published |
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| 20090032433 | WAFER CONTAINER WITH RESTRAINER - A wafer container includes a container body that having a plurality of slots therein for placing a plurality of wafers; an opening is formed on a sidewall of the container body for importing or exporting the wafers; and a door having an inner surface and an outer surface, in which the inner surface of the door is joined with the opening of the container body for protecting the plurality of wafers therein, the characteristic in that: a recess is disposed in the central portion of the inner surface of the door to divide the inner surface into two platforms, and each restraint module is located on two platforms. | 02-05-2009 |
| 20100025287 | Wafer Container with Constraints - A wafer container includes a container body that having an open front on sidewall, a plurality of slots disposed in the container body for support wafers, and a door is assembled with opening of the container body for protecting the wafer therein, the characteristic in that: an recess is disposed in the inner surface, and a wafer restraint modules on the sides of the recess. The wafer restraint module includes a base portion for fixing the wafer restraint module on the platform, and a plurality of curve portions is formed on the side of the platform, in which each curve portion and the free ends constructed the protruding portion, thereby, the guiding notch of the protruding portion contacted the wafer to restrict the wafer from moving. | 02-04-2010 |
| 20100025288 | Wafer container with constraints - A wafer container includes a container body with an opening on one side, and the inside with slots for placing the wafers. The door joined with the opening of the container body to protect the wafer therein, the characteristic in that: two rows of the plurality of wafer restraint components with a spaced at interval is located on the inner surface of the door and adjacent to the central of the door, in which the each wafer restraint component includes a base portion, which one end is fixed on the inner surface of the door, and another end is joined with a bent arm. The bent arm includes a first contact head and a second contact head to restrict the wafer moving toward the opening of the door. | 02-04-2010 |
| 20100108565 | Wafer container having the snap-fitting restraint module - A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an inner surface, which is joined with opening of the container body with the inner surface for protecting the plurality of wafers in the container body, the characteristic in that: at least one restraint module is disposed on the inner surface of the door, the restraint module including a base which is disposed with a plurality of restraints arranged at intervals and an opening, and a snap-fitting piece is disposed on the inner surface of the door for snap-fitting the restraint module by passing the snap-fitting piece through the opening of the base of restraint module and rotating the restraint to an angle. | 05-06-2010 |
| Patent application number | Description | Published |
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| 20100078865 | Sheet clamping apparatus - The present invention discloses a sheet clamping apparatus for a reticle, a wafer, a glass substrate, a LCD panel et al. The apparatus comprises a pair of brackets, each bracket having at least one cam groove thereon for defining a movement route by two opposing sides of the cam groove, and one end of each bracket being joined with a connecting frame. One end of a clamping arm is joined with each cam groove, and the other end of the clamping arm is clamping the sheet (ex: a reticle, a wafer, a glass substrate, a LCD panel et al.). The characteristic of the sheet clamping apparatus is that: on the other end of each clamping arm is formed with a clamping head with recess, and at least a pair of rollers are disposed on the recess of clamping head for stably clamping the reticle or a semiconductor component stored in the pod. | 04-01-2010 |
| 20100089491 | Gas Filling Socket, Gas Filling Socket Set, and Gas Filling Apparatus - The present invention is related to a gas filling socket, gas filling socket set, and gas filling apparatus. The gas filling socket comprises a carrying base having an upper surface and a lower surface, the upper surface being used to carry a semiconductor storage device or a reticle pod; at least a pair of through holes being set on and through the carrying base; at least one gas input port connecting to one through hole, and at least one gas output port connecting to another through hole, wherein the characteristic of the gas filling socket is that: the upper surface of the carrying base includes an angle guiding board disposed on one side of the carrying base for providing a guiding function to ensure the positioning of the semiconductor storage device or the reticle pod while the semiconductor storage device or the reticle pod is placed into the gas filling socket. | 04-15-2010 |
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| 20090194140 | Semiconductor Substrate Cleaning Apparatus - A semiconductor substrate cleaning and reticle cleaning apparatus, and more particularly, a cleaning apparatus used to remove contaminants from the surface of the semiconductor substrate and the reticle in the semiconductor process, is disclosed in the present invention. The cleaning apparatus comprises a working platform, a base unit, and an adjustable cleaning unit. The base unit is composed of two vertical baseboards in parallel to each other and each vertical baseboard has a bottom end and a top end. The bottom ends of two vertical baseboards are placed on the working platform. The adjustable cleaning unit is pivotally disposed on the top ends of two vertical baseboards, wherein the adjustable cleaning unit comprises at least a long slot for transmitting a fluid to a surface of a semiconductor substrate or a reticle. | 08-06-2009 |
| 20090194197 | GAS FILLING APPARATUS AND GAS FILLING PORT THEREOF - A gas filling apparatus for connecting a gas feeding device to introduce a gas into a storage apparatus for storing a semiconductor element or a reticle comprises a base and at least one gas filling port, in which the gas filling port comprises a foundation, an elastic element and a fixing element for fixing the elastic element. | 08-06-2009 |
| 20090260331 | Gas Filling Apparatus and Gas Filling Port Thereof - The present invention provides a gas filling apparatus and gas filling port thereof. The gas filling apparatus is connected with the air feed apparatus which is introduced the gas into the first inlet port of the semiconductor device or reticle storage apparatus. The gas filling apparatus includes a supporting base which is provided to hold the storage apparatus thereon, and at least one second inlet port which is disposed on the first inlet port of the storage apparatus so as to the gas is flowed into the storage apparatus through the second inlet port. The second inlet port includes a first base, a second base, a first elastic element, a fixing element, and a switch device. Both of the first base and second base have through holes, and opposite to each other. The first elastic element is used to maintain the airtight and is disposed on the second base and opposite to the first inlet port of the storage apparatus used to maintain the airtight. The fixing element is used to fix the elastic element on the second base. The switch device is disposed on the gap in the middle of the first base and the second base, and is provided to control the input or output for the gas of the second inlet port. | 10-22-2009 |
