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Ooshima, JP
Akira Ooshima, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20100209550 | PET FOOD - The present invention relates to pet foods containing carbohydrates that include high-amylose starch, and an animal or vegetable protein. They are excellent in benefits such as having an anti-obesity effect and do not impair the pet's appetite or food intake. | 08-19-2010 |
Atsushi Ooshima, Shizuoka JP
| Patent application number | Description | Published |
|---|---|---|
| 20080276861 | Coating rod and producing method therefor - A peripheral surface of a coating rod has an area where grooves (convex portions) are formed. This area is ground by a grinding apparatus by which a maximum height Ry of the rod surface is adjusted to 15 μm or less. Further, a ratio of D/W is adjusted to 0.01 or more, wherein D is a total distance of the convex portions of the rod actually abutting on a web in an axial direction of the rod, and W is a coating width of the web. Furthermore, straightness of the rod is adjusted to 30 μm or less per 1 m, and roundness of the rod is adjusted to 10 μm or less. Micro-projections are removed by grinding so that scratches of a coating surface are prevented from occurring. Coating unevenness is prevented by improving the straightness and the roundness. | 11-13-2008 |
Atsushi Ooshima, Fujisawa-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090295325 | Electric Power Steering Apparatus and Method of Assembling the Same - To provide an electric power steering apparatus in which it is possible to minimize a connection distance between a control unit and an electric motor and surely prevent electric noise from mixing between the control unit and the electric motor as well as to minimize electric resistance and minimize an electric loss by directly connecting the control unit and connection terminals of the electric motor and a torque sensor. A motor control apparatus includes a steering column | 12-03-2009 |
Atsushi Ooshima, Kanagawa JP
| Patent application number | Description | Published |
|---|---|---|
| 20090046187 | Solid-state imaging device - A solid-state imaging device includes a pixel array area having pixels including photoelectric transducers arranged as an array; signal lines wired for every pixel column in the pixel array area; and a plurality of noise reducers provided for the corresponding signal lines. Each of the noise reducers includes a first capacitor, one end of which is connected to the signal line; a first switch element, an input port of which is connected to the other end of the first capacitor; a second capacitor connected between an output port of the first switch element and a reference voltage; and a clamping element for clamping the voltage of a connecting node between the output port of the first switch element and the second capacitor to a predetermined voltage. The first capacitor is shared among the plurality of noise reducers. | 02-19-2009 |
| 20090272599 | Electric Power Steering Apparatus - To provide an electric power steering apparatus in which it is possible to reduce a size of the entire structure of a control unit while sufficiently showing a heat radiation effect of heat generating members. The electric power steering apparatus includes a steering column | 11-05-2009 |
Atsushi Ooshima, Haibara-Gun JP
| Patent application number | Description | Published |
|---|---|---|
| 20090246395 | COATING METHOD AND COATING DEVICE - The present invention provides a coating method and a coating device that can both prevent the occurrence of streaks and nonuniform application. A coating device comprises an approximately cylindrical bar arranged to come into contact with a traveling web, and a feed device that feeds coating solution to the entry side of the web relative to the bar. Spiral grooves inclined at an angle of 20 degrees to 70 degrees (both inclusive) with respect to a plane orthogonal to the central axis of the bar, and smooth portions with which the web comes into contact at a percentage of 20% or more are formed on the surface of the bar. | 10-01-2009 |
Atsushi Ooshima, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110279345 | ARRAY ANTENNA AND METHOD FOR MANUFACUTRING ARRAY ANTENNA - An array antenna includes: a plurality of first antenna elements arrayed at specified element intervals on a plane of a board; a plurality of second antenna elements arrayed at the element intervals in parallel to an array direction of the first antenna elements on the plane; a first power supply circuit for supplying electric power to the respective first antenna elements by a line branched at a first branch point on the plane; and a second power supply circuit for supplying electric power to the respective second antenna elements by a line branched at a second branch point shifted by a specified distance in the array direction with respect to the first branch point on the plane. | 11-17-2011 |
Hideto Ooshima, Aichi JP
| Patent application number | Description | Published |
|---|---|---|
| 20100013170 | Tool holding force measuring system and tool holding force measuring method - A tool holding force measuring system | 01-21-2010 |
Hiromitsu Ooshima, Kariya-City JP
| Patent application number | Description | Published |
|---|---|---|
| 20110133954 | Vehicle approach warning system, portable warning terminal and in-vehicle communication apparatus - A vehicle approach warning system is disclosed. The vehicle approach warning system includes: an in-vehicle communication apparatus to be mounted to a vehicle, the in-vehicle communication apparatus being configured to wirelessly transmit vehicle travel data to surroundings of the vehicle; and a portable warning terminal to be carried by a pedestrian, the portable warning terminal being configured to give, in response to receiving the vehicle travel data wirelessly transmitted from the in-vehicle communication apparatus, a warning about approach of the vehicle to the pedestrian in a way other than auditory stimulation if electric field strength at a time of receiving the vehicle travel data is larger than a threshold. | 06-09-2011 |
Hiroshi Ooshima, Fujisawa JP
| Patent application number | Description | Published |
|---|---|---|
| 20090174869 | Projection display and optical aperture unit - A gear portion meshing with the first step of a pinion gear at the side of a motor, which is a driving unit of optical aperture mechanism, is designed to be a two-gears composition of a gear portion abutting on one side surface of the channel of the pinion gear, and a gear portion abutting on the other side surface of the channel of the pinion gear. | 07-09-2009 |
Hiroyoshi Ooshima, Yokohama-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20080307114 | NETWORK ASSIGNMENT METHOD AND APPARATUS - A network assignment apparatus receives a request of a client via the first network. The network assignment apparatus selects the second network to be assigned to the client, and assigns the second network to the client, in correspondence with one of a plurality of servers from which the client obtains contents. | 12-11-2008 |
| 20090164651 | COMMUNICATION APPARATUS, TIMER CONTROL APPARATUS, AND TIMER CONTROL METHOD - A communication apparatus comprises a processor, a memory configured to store timer information, a cache configured to store timer information, and a timer controller configured to store timer information regarding an established connection in the cache. The timer controller notifies the processor of a time-out of the timer information stored in the cache and a time-out of the timer information stored in the memory. | 06-25-2009 |
| 20100008380 | PROTOCOL PROCESSING APPARATUS AND PROCESSING METHOD THEREOF - A protocol processing apparatus determines a unit size of a bitmap table to be used in reassembly based on the size of a received fragmented IP datagram. A bitmap table is generated according to the determined unit size, and the received fragmented IP datagram is reassembled using the generated bitmap table. | 01-14-2010 |
| 20100014542 | NETWORK PROCESSING APPARATUS AND PROCESSING METHOD THEREOF - A network processing apparatus that receives a fragmented IP datagram to perform reassembling process of the received fragmented IP datagram. Information is held regarding the received IP datagram in which the reassembling process is terminated. Upon performing the reassembling process, in a case where an IP datagram specified by the held information is received, the reassembling process of the IP datagram is not performed. | 01-21-2010 |
Hiroyuki Ooshima, Kanagawa JP
| Patent application number | Description | Published |
|---|---|---|
| 20090011513 | METHOD OF DETECTING NUCLEIC ACID BY USING NUCLEIC ACID MICROARRAY - The present invention provides a method of detecting a nucleic acid which is not restricted by the design of the base sequence of a nucleic acid probe. By repeating washing and detection in multiple stages, the present invention can improve the precision of sequence-specific hybridization stepwise and also can ease restrictions in designing the nucleic acid probes, in particular, restrictions on the Tm value (the temperature at which the nucleic acid double strand is dissociated into single strands) or the sequence length of the nucleic acid probes. | 01-08-2009 |
| 20090247419 | METHOD FOR CONFIRMING POSITIONS ON WHICH PROBES ARE IMMOBILIZED IN NUCLEIC ACID ARRAY - The present invention provides a method for confirming immobilization conditions of nucleic acid probes immobilized on a nucleic acid array, comprising the steps of: | 10-01-2009 |
Hisayoshi Ooshima, Oobu-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20100278717 | Method and apparatus for manufacturing carbon nanotube - A carbon nanotube manufacturing method wherein a catalyst is heated in a reaction chamber while the reaction chamber is filled with argon gas containing hydrogen. When a predetermined temperature is reached in the reaction chamber, the reaction chamber is evacuated. Then a raw material gas as a carbon source is charged and sealed in the reaction chamber whereupon the synthesis of carbon nanotube begins. Subsequently, when a condition in which the synthesis of carbon nanotubes has proceeded to a predetermined level is detected, gases in the reaction chamber are exhausted. Then, the raw material gas is changed and sealed in the reaction tube again. Thereafter, the charging (synthesizing) operation and the exhausting operation are repeated until the carbon nanotube with a desired film thickness are synthesized. A carbon nanotube manufacturing apparatus is also disclosed | 11-04-2010 |
Kazuhiko Ooshima, Koshi-City JP
| Patent application number | Description | Published |
|---|---|---|
| 20120088203 | Heat Treatment Apparatus and Heat Treatment Method - Disclosed is a heat treatment apparatus which includes a plurality of first disposing support members having an extendable elastic member to provide a first gap distance between a substrate disposing surface of a heat treatment plate and the rear surface of the substrate; a plurality of second disposing support members providing a second gap distance, which is smaller than the first gap distance, between the substrate disposing surface and the rear surface of the substrate; and a plurality of suction holes disposed at the substrate disposing surface of the heat treatment plate and sucking a space of the gap between the substrate disposing surface and the rear surface of the substrate, in which the substrate supported on the first disposing support member is sucked by the suction holes, such that the first disposing support member is contracted and the substrate is supported on the second disposing support member. | 04-12-2012 |
Kazuhiko Ooshima, Anjo-City JP
| Patent application number | Description | Published |
|---|---|---|
| 20100211291 | ABNORMALITY DETECTION DEVICE - An abnormality detection device determines whether an injection correction amount of each cylinder at the time when maximum rotation numbers are equalized is outside a normal range if the equalization of the maximum rotation numbers among cylinders is completed in an idle stable state. The abnormality detection device determines that an abnormality exists on an injector side if the injection correction amount of a specific cylinder is outside the normal range and a rotation number fluctuation difference of the specific cylinder is in a normal range. The abnormality detection device determines that the abnormality exists on an engine side if the injection correction amount of a specific cylinder is outside the normal range and the rotation number fluctuation difference of the specific cylinder is outside the normal range. | 08-19-2010 |
Kazuhiko Ooshima, Koshi-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090020072 | Chemical solution vaporizing tank and chemical solution treating system - An object is to suppress differences in concentration between processing gases supplied to a plurality of works in a chemical solution vaporizing tank. The chemical solution vaporizing tank includes a tank body having a plurality of vaporizing chambers formed by laterally and airtightly partitioning an internal space of the tank body, a chemical solution passage located under a liquid level in each vaporizing chamber and formed at each partition member for passing the chemical solution between the vaporizing chambers, and a gas passage located above the liquid level in each vaporizing chamber and formed at the partition member to communicate the vaporizing chambers with each other for uniformizing pressures in the respective vaporizing chambers. A quantity of the channel layer in each vaporizing chamber is controlled by managing, e.g., the liquid level. | 01-22-2009 |
Keiji Ooshima, Aichi JP
| Patent application number | Description | Published |
|---|---|---|
| 20100006077 | Engine Torque Detection Means - An engine includes an angular velocity detecting means | 01-14-2010 |
| 20100030453 | Cetane Number Detection Means and Engine Having the Cetane Number Detection Means - A cetane number detection means in which an angular velocity detection means ( | 02-04-2010 |
Kenji Ooshima, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20120013678 | Porphyrazine Coloring Matter, Ink Composition Containing The Same And Colored Product - The present invention relates to a porphyrazine coloring matter or a salt thereof represented by the following formula (1) [wherein, the rings of A to D are each independently a benzene ring or a 6-membered nitrogen-containing heteroaromatic ring, E is alkylene, X is a sulfo-substituted anilino group or the like which may further have a substituent, R | 01-19-2012 |
| 20120081457 | PORPHYRAZINE COLORING MATTER, INK COMPOSITION, RECORDING METHOD, AND COLORED OBJECT - Provided is a porphyrazine dye suitable for use in ink-jet recording, the porphyrazine dye giving a cyan ink with a satisfactory hue, having various excellent fastness properties, in particular, ozone resistance, and attaining a high color density. Also provided is an ink composition containing the dye. The porphyrazine dye is a porphyrazine dye represented by formula (1) or a salt thereof. In formula (1), rings A to D each independently represents a benzene ring, a nitrogenous heteroaromatic ring, etc.; E represents an alkylene; X represents sulfoanilino, etc.; R represents a hydrogen atom, sulfo, carboxy, etc.; group F represents phenyl, a nitrogenous heteroaromatic ring, etc.; a is an integer of 1-6; b is 0.00-3.90, excluding 3.90, on average; c is 0.10-4.00, excluding 4.00, on average; and the sum of b and c is 1.00-4.00, excluding 4.00, on average. | 04-05-2012 |
Kiyomi Ooshima, Nasushiobara-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20080252292 | MAGNETIC RESONANCE DIAGNOSING APPARATUS AND MEDICAL IMAGE DISPLAY APPARATUS - A magnetic resonance diagnosing apparatus includes an imaging unit which images each slice image of a subject in relation to a plurality of different imaging slices, a measurement unit which measures a magnetic resonance spectrum of the subject in relation to a measurement slice, a selection unit which selects slice images corresponding to one or more imaging slices which at least partially overlap the measurement slice from the plurality of slice images, and a creation unit which creates a display image which simultaneously shows the selected one or more slice images and the spectral image. | 10-16-2008 |
Kiyoshi Ooshima, Anjo-City JP
| Patent application number | Description | Published |
|---|---|---|
| 20110011084 | EXHAUST GAS RECIRCULATION SYSTEM FOR INTERNAL COMBUSTION ENGINE - An EGR system includes an exhaust gas recirculation pipe recirculating exhaust gas flowing through an exhaust pipe into an intake pipe upstream of a compressor of a supercharger. A swirling flow generator generates a swirling flow of intake air and exhaust gas along an inner surface of the intake pipe in order to centrifugally separate foreign matters from the intake air and the exhaust gas. A foreign-matters-collecting chamber collects the centrifugally separated solid foreign matters therein. The separated solid foreign matters are discharged through a discharge opening and a discharge pipe. | 01-20-2011 |
| 20110030372 | EGR APPARATUS FOR INTERNAL COMBUSTION ENGINE - A mixing device of an EGR apparatus has a double pipe structure being composed of a first cylindrical member and a second cylindrical member, wherein the first and second cylindrical members are coaxially arranged with each other. Cyclone blades are provided between the first and second cylindrical members, so that EGR gas introduced from an inlet portion into an inside of the first cylindrical member flows along an cylindrical inner wall of the first cylindrical member. A swirl flow is generated in the EGR gas passing through the cyclone blades, so that the EGR gas spirally flows in a downstream side to remove foreign material, such as flocculated water from the EGR gas. | 02-10-2011 |
Masaharu Ooshima, Kanagawa-Ken JP
| Patent application number | Description | Published |
|---|---|---|
| 20100127698 | MAGNETOSTRICTIVE STRESS SENSOR - A magnetostrictive stress sensor ( | 05-27-2010 |
Nobuyuki Ooshima, Kyoto JP
| Patent application number | Description | Published |
|---|---|---|
| 20110039966 | POLYURETHANE FOAM AND POLISHING PAD - The present invention provides a polyurethane foam, which, despite having a low specific gravity, has a hardness and an elasticity favorable for a polishing pad, and a polishing pad made using the polyurethane foam. The polyurethane foam is obtained by reacting a blend composition containing (A) polyisocyanate, (B) a polyol, (C) a chain extender with a molecular weight of equal to or smaller than 400, and (D) water, and in the blend composition, MDI is blended as a main component of the component (A) and a blending amount of the MDI is 45 to 70 parts by weight when a total weight of the respective components (A), (B), and (C) is taken as 100 parts by weight. | 02-17-2011 |
Sansei Ooshima, Higashimurayama JP
| Patent application number | Description | Published |
|---|---|---|
| 20090013325 | RESOURCE ALLOCATION METHOD, RESOURCE ALLOCATION PROGRAM AND RESOURCE ALLOCATION APPARATUS - A resource allocation method, a resource allocation program, and a resource allocation apparatus in which a request reception server subjects an inputted SQL to a syntax analysis, extracts at least one SQL process from the SQL, calculates a resource cost of a database required by the BES to perform the SQL process for each of process types contained in the SQL process, decides an allocation ratio for allocating the resource of a request executing server to a virtualized server in accordance with a resource cost ratio required by each of the BES to execute the SQL process, and requests for execution of the respective BES on the virtualized server to which the resource has been allocated so as to execute the SQL process. | 01-08-2009 |
Satoru Ooshima, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090243685 | SIGNAL PROCESSING DEVICE - A signal processing device includes a correction circuit configured to correct the distortion of the duty cycle in a data signal having different occurrence probabilities of 0 and 1. | 10-01-2009 |
| 20090273418 | COMMUNICATION SYSTEM AND ANTENNA APPARATUS - An antenna apparatus for use in a transmitter or a receiver in a communication system. The antenna apparatus includes: a dielectric substrate having a conductor layer on one of surfaces; and a slot antenna including an antenna electrode formed on the one surface and disposed substantially at the center, a grounded conductive surface surrounding the antenna electrode, and a slot transmission line made by a gap between the antenna electrode and the grounded conductive surface. | 11-05-2009 |
Shunzou Ooshima, Shizuoka JP
| Patent application number | Description | Published |
|---|---|---|
| 20110110002 | ELECTRIC POWER SUPPLY DEVICE - An electric power supply device capable of miniaturizing an FET and wiring and reducing the amount of heat generation even when a motor load goes into a lock state is provided. It is determined whether or not a lock current flows in a motor M | 05-12-2011 |
Takashi Ooshima, Hyogo JP
| Patent application number | Description | Published |
|---|---|---|
| 20100077899 | CORE WIRE CONTACT DETECTION DEVICE - Provided is a core wire contact detection device which detects contact between a strip blade and a core wire when a sheath of an electric wire is stripped by the strip blade. The core wire contact detection device includes a vibration detection unit capable of detecting a vibration in a frequency range including a vibration frequency generated due to the contact between the core wire and the strip blade, and a contact state determination processing unit which determines that the strip blade and the core wire are in contact with each other when an amplitude of the detected vibration exceeds a predetermined threshold value. | 04-01-2010 |
Takashi Ooshima, Osaka JP
| Patent application number | Description | Published |
|---|---|---|
| 20090041782 | Novel serotype streptococcus mutans and utilization of the same - A polynucleotide encoding a polypeptide which lowers the glucose side chain amount in a serotype-specific polysaccharide antigen of | 02-12-2009 |
| 20110150790 | GLUCOSYLTRANSFERASE INHIBITOR CONTAINING EPIGALLOCATECHIN GALLATE POLYMER AS ACTIVE INGREDIENT - Provided is a highly palatable and safe glucosyltransferase inhibitor or anti-dental caries agent. A glucosyltransferase inhibitor or anti-dental caries agent having an epigallocatechin gallate polymer or a salt thereof. Particularly, the above agent containing an epigallocatechin gallate polymer, which is a compound in which chroman rings are bonded at position 6 and/or 8 via a methylene group. | 06-23-2011 |
| 20120028879 | HIGHLY SENSITIVE DETECTION METHOD FOR HIGHLY VIRULENT ORAL CAVITY BACTERIA - Provided is a method that involves the detection of protein antigen (PA) and/or collagen-binding protein (CBP) of oral cavity bacteria in a sample, and in which oral cavity bacteria that exacerbate hemolysis are detected for and/or subjects at high-risk for hemolysis aggravation are screened anchor the level of risk of the hemolysis aggravation in a subject is assessed if a PA is not detected anchor a CBP is detected in the sample. Also provided are a detection reagent and kit for use in the method. | 02-02-2012 |
Takashi Ooshima, Yokohama-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20100115674 | ATOMIC FORCE MICROSCOPE APPARATUS - An object of the present invention is to provide an atomic force microscope apparatus allowing tracking errors to be made as close to zero as possible to reduce images obtained through high-speed scanning from being degraded. To accomplish the object of the present invention, the present invention provides an atomic force microscope apparatus imaging a surface topography of a sample in a contact mode, the apparatus including a cantilever having a probe interacting with the sample surface via an atomic force and being subjected to a deflection by the atomic force, laser light provision means for allowing first laser light to enter the cantilever, light detection means, a controller estimating the surface topography of the sample surface, and data storage means for recording the estimated surface topography. | 05-06-2010 |
Takayuki Ooshima, Musashino-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20110062943 | TIMING DETECTION DEVICE - A timing detection device includes a draw back amount acquiring unit and a detecting unit. The draw back amount acquiring unit is configured to acquire a draw back amount of a received signal with respect to a peak value of the signal. The detecting unit is configured to detect the timing at which the draw back amount acquired by the draw back amount acquiring unit has exceeded a constant value as the timing at which a value of the signal is switched. | 03-17-2011 |
Toshiyuki Ooshima, Shizuoka JP
| Patent application number | Description | Published |
|---|---|---|
| 20080200662 | 9-Fatty Acid Hydroperoxide Lyase Genes - A 9-fatty acid hydroperoxide lyase gene consisting of the nucleotide sequence as set forth in SEQ ID No: 1, and a 9-fatty acid hydroperoxide lyase gene consisting of the nucleotide sequence as set forth in SEQ ID No: 5. | 08-21-2008 |
Yasuhiro Ooshima, Chiba JP
| Patent application number | Description | Published |
|---|---|---|
| 20090123751 | Method for Producing Fine Particles of Salt, Hydroxide or Oxide, and Fine Particles of Salt, Hydroxide or Oxide Produced by Such Method - The present invention provides a process for producing fine particles of a salt, hydroxide or oxide, wherein when producing the salt, hydroxide or oxide by electrodialysis using anion exchange membranes and cation exchange membranes, a conductive liquid acting as a poor solvent for the salt, hydroxide or oxide which is produced in a concentration chamber is used as a concentration chamber solution, as well as the fine particles of the salt, hydroxide or oxide which are produced by the above process. | 05-14-2009 |
Yoshihide Ooshima, Kirishima-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20100203414 | Fuel Cell Stack Device, Fuel Cell Stack Connection Device, and Fuel Cell Device - A fuel cell stack device that can suppress a damage to fuel cells is provided. A fuel cell stack device includes a fuel cell stack in which a plurality of columnar fuel cells are arranged upright, and are electrically connected via a current-collecting member interposed between adjacent fuel cells, fuel cells stack-supporting members disposed so as to hold the fuel cell stack via an end current-controlling member from both end sides, and a manifold that fixes lower ends of the fuel cells, and that supplies a reactant gas to the fuel cells. The fuel cell stack-supporting member has a lower end fixed to the manifold and is an elastically deformable member, and is disposed such that a fixed portion thereof fixed to the manifold is at a same or lower level than a fixed portion of the fuel cells. | 08-12-2010 |
Yoshimasa Ooshima, Yokohama JP
| Patent application number | Description | Published |
|---|---|---|
| 20080246964 | Method and Its Apparatus for Inspecting Particles or Defects of a Semiconductor Device - Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles. | 10-09-2008 |
| 20120062890 | Method and Its Apparatus for Inspecting Particles or Defects of a Semiconductor Device - Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles. | 03-15-2012 |