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Norihiro Ito
Norihiro Ito, Koshi City JP
| Patent application number | Description | Published |
|---|---|---|
| 20100031980 | LIQUID TREATMENT APPARATUS - Disclosed is a liquid treatment apparatus capable of effectively exhausting processing liquid atmosphere around a target object. The liquid treatment apparatus includes a container, a support part located within the container that supports the target object, a rotation driving mechanism to rotate the target object supported by the support part, a processing liquid supply mechanism to supply a processing liquid to the target object, and a rotation cup, which is located outside of the outer circumference of the target object and is rotatable together with the support part. A rotation exhaust cup is arranged above the rotation cup and is rotatable together with the rotation cup. A discharge mechanism discharges processing liquid atmosphere guided by the rotation cup and the rotation exhaust cup. | 02-11-2010 |
| 20110089137 | SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING METHOD, AND STORAGE MEDIUM HAVING SUBSTRATE LIQUID PROCESSING PROGRAM STORED THEREIN - Provided are a substrate liquid processing apparatus, a substrate liquid processing method, and a computer readable storage medium having a substrate liquid processing program stored therein that can prevent the occurrence of the electrostatic breakdown caused by the discharge of electric charges in a substrate. The substrate liquid processing apparatus processes a circuit-forming surface of the substrate with a chemical liquid. Furthermore, prior to processing the substrate with the chemical liquid, the substrate liquid processing apparatus performs an anti-static process for an surface opposite to the circuit-forming surface of the substrate by an anti-static liquid, thereby emitting the electric charges on the substrate. | 04-21-2011 |
Norihiro Ito, Koshi-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090031948 | Substrate processing apparatus - A substrate processing apparatus includes a rotary cup disposed outside a substrate holding member to surround a substrate held on the substrate holding member and to rotate along with the substrate holding member, and having a wall portion that receives a process liquid thrown off from the substrate being rotated. Further, this apparatus includes an exhaust and drain cup disposed outside the rotary cup to surround the rotary cup and the substrate holding member, and including an annular liquid receptacle that receives the process liquid thrown off from the substrate being rotated and an inner annular space formed on an inward side from the annular liquid receptacle. An exhaust mechanism is connected to the inner annular space of the exhaust and drain cup. | 02-05-2009 |
| 20090056764 | Liquid processing apparatus, liquid processing method, and storage medium - A liquid processing apparatus | 03-05-2009 |
| 20110023909 | LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM - The liquid processing apparatus includes: a liquid supply mechanism; a supply line connected to the liquid supply mechanism, the supply line having a discharge opening for discharging a temperature-regulated liquid; a processing unit supporting the discharge opening of the supply line; a return line configured to return the liquid supplied to the supply line to the liquid supply mechanism; and a liquid-supply switching valve configured to switch between supply of the liquid, which is used in a processing of an object to be processed in the processing unit, and stoppage of the liquid supply. The liquid-supply switching valve is disposed on the supply line on a route of the liquid returning from the supply line to the liquid supply mechanism through the return line. | 02-03-2011 |
Norihiro Ito, Osaka-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20110024779 | ORGANIC EL DEVICE - An organic EL device in the present invention comprises a light-transmissive substrate | 02-03-2011 |
| 20110121267 | ORGANIC ELECTROLUMINESCENCE DEVICE - An organic electroluminescence device comprises a light transmissive substrate, a light scattering region which is disposed on the light transmissive substrate, and a light emissive layer having a luminescent point. The luminescent point is spaced from the light reflective electrode by a distance of d which satisfies the following equation: | 05-26-2011 |
Norihiro Ito, Kumamoto JP
| Patent application number | Description | Published |
|---|---|---|
| 20090056758 | TREATMENT APPARATUS, TREATMENT METHOD AND STORAGE MEDIUM - An apparatus and a method for accurately determining if a substrate is properly retained by a substrate-retaining mechanism, lowering the manufacturing cost, and instantly detecting any fracture of the substrate during treatment are disclosed. The apparatus includes a substrate-retaining mechanism to retain a wafer, a treatment liquid supply mechanism to supply a treatment liquid to the wafer, and a rotatable cup adapted to rotate as an integral unit with the substrate-retaining mechanism while covering the outer peripheral portion of the wafer. The substrate-retaining mechanism has a retaining member. A second end of the retaining member is in the upper position when a first end of the retaining member retains a wafer, or in the lower position when the first end is retaining no wafer. A touch sensor is arranged below the second end of the retaining member so that, when the second end is in the lower position, it can touch the second end. | 03-05-2009 |
| 20100144158 | Liquid Processing Apparatus and liquid Processing Method - A liquid treatment device having a substrate holding section ( | 06-10-2010 |
| 20100212701 | Substrate Processing Apparatus, Substrate Processing Method, and Drain Cup Cleaning Method - A substrate processing apparatus includes a substrate holding member configured to rotate along with a wafer (W) held thereon and a drain cup ( | 08-26-2010 |
Norihiro Ito, Kumamoto-Ken JP
| Patent application number | Description | Published |
|---|---|---|
| 20100083986 | LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM - A liquid processing apparatus includes: a hollow holding plate configured to hold an object to be processed; a hollow outer rotational shaft fixedly connected to the holding plate; a rotary drive part configured to rotate the outer rotational shaft; and a lift pin plate disposed in a hollow space of the holding plate, and having a lift pin configured to support the object to be processed. Inside the lift pin plate, a cleaning-liquid supply part configured to supply a cleaning liquid is extended. Connected to the lift pin plate is a lifting member configured to locate the lift pin plate on an upper position and a lower position. When located on the lower position, the lift pin plate receives a force of the rotary drive part for rotating the outer rotational shaft so that the lift pin plate is rotated. | 04-08-2010 |
| 20100147335 | LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM - A liquid processing apparatus includes: a hollow holding plate to hold an object to be processed; a hollow outer rotary shaft fixedly joined to the holding plate; a lift pin plate having a lift pin to support the object; an inner rotary shaft fixedly joined to the lift pin plate; and a lifting member to raise and lower the lift pin plate to locate the lift pin plate on an upper position and a lower position. Inside the inner rotary shaft, there is disposed a cleaning-liquid supply part to supply a cleaning liquid to the object to be processed. An outer rotary drive part is joined to the outer rotary shaft, the outer rotary drive part being configured to rotate the outer rotary shaft. An inner rotary drive part is joined to the inner rotary shaft, the inner rotary drive part being configured to rotate the inner rotary shaft. | 06-17-2010 |
Norihiro Ito, Hirakata-Shi, JP
| Patent application number | Description | Published |
|---|---|---|
| 20090301556 | MULTILAYER ORGANIC SOLAR CELL - Disclosed is a multilayer organic solar cell having a structure wherein an inter-layer ( | 12-10-2009 |
| 20100147385 | ORGANIC PHOTOVOLTAIC DEVICE - In an organic power generating device that generates electricity by receiving light, a positive electrode and a negative electrode, at least one of which has transparency, a power generating layer which is formed of a mixture of an electron donor material and a hole donor material and generates electricity upon reception of light and disposed between the positive electrode and the negative electrode, and an inorganic layer which has a work function larger than that of the positive electrode and is disposed between the power generating layer and the positive electrode, are provided. Accordingly, an efficiency to take off electric charges from the power generating layer can be increased, so that the organic power generating device with high efficiency and long life can be obtained. | 06-17-2010 |
Norihiro Ito, Suita-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20110127561 | ORGANIC ELECTROLUMINESCENCE DEVICE AND METHOD OF FABRICATING THE SAME - [Problem] The present invention aims to provide an electroluminescence device with an improved intermediate layer, for achieving a superior durability and sustainability performance thereof. | 06-02-2011 |
Norihiro Ito, Koshi JP
| Patent application number | Description | Published |
|---|---|---|
| 20110209560 | SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING PROGRAM FOR EXECUTING THE SAME, SUBSTRATE PROCESSING APPARATUS, AND FAULT DETECTION METHOD FOR DIFFERENTIAL PRESSURE FLOWMETER - There is provided a substrate processing method of supplying a processing solution to a substrate through a supply nozzle connected with a supply path via a differential pressure flowmeter provided on the supply path for supplying the processing solution and performing a process on the substrate by the processing solution. The substrate processing method includes measuring a pressure value in the supply path by a pressure measurement unit included in the differential pressure flowmeter when the processing solution is not supplied to the substrate; determining whether the pressure measurement unit is operated normally by comparing the pressure value measured in the measuring process with a predetermined pressure value; and supplying the processing solution to a substrate if it is determined that the pressure measurement unit is operated normally in the determining process. | 09-01-2011 |
Norihiro Ito, Osaka JP
| Patent application number | Description | Published |
|---|---|---|
| 20120256197 | ORGANIC ELECTROLUMINESCENCE ELEMENT - The organic electroluminescence device includes an anode, a cathode, a first electron injection layer, an electron transport layer, and a light emitting layer. The first electron injection layer is made of alkali metal and is formed between the anode and the cathode. The electron transport layer is formed between the first electron injection layer and the anode. The light emitting layer is formed between the electron transport layer and the anode. The organic electroluminescence element further includes a second electron injection layer. The second electron injection layer is formed between the first electron injection layer and the electron transport layer. The second electron injection layer is made of amorphous inorganic material. | 10-11-2012 |