| Patent application number | Description | Published |
|---|
| 20080197749 | MEMS MICROMOTOR AND TIMEPIECE EQUIPPED WITH THIS MICROMOTOR - The invention proposes a MEMS micromotor produced in a plate made of crystalline or amorphous material, in particular based on silicon, which comprises a lower layer forming a substrate, and an upper layer in which at least one actuator and a rotor is etched, the actuator driving the rotor in rotation about a shaft ( | 08-21-2008 |
| 20080204879 | Miniature Lamellar Grating Interferometer Based on Silicon Technology - A lamellar grating interferometer is described, in which the light beams are collimated and focused onto the grating by means of mirror | 08-28-2008 |
| 20080303781 | Shutter Device For Pixel Element and Pixel Arrangement - A micro electromechanical shutter device and a pixel arrangement in which respective shutter elements are configured to controllably take a first geometrical state open and a second geometrical state closed by different degrees of actuation, and wherein the first geometrical state of the shutter element is configured to correspond to a non-actuated rest state of the shutter element. | 12-11-2008 |
| 20090059344 | MICROMIRROR DEVICE - A micromirror device ( | 03-05-2009 |
| 20100261120 | MIRROR FOR GUIDING A RADIATION BUNDLE - A mirror serves for guiding a radiation bundle. The mirror has a basic body and a coating of a reflective surface of the basic body, the coating increasing the reflectivity of the mirror. A heat dissipating device serves for dissipating heat deposited in the coating. The heat dissipating device has at least one Peltier element. The coating is applied directly on the Peltier element. A temperature setting apparatus has at least one temperature sensor for a temperature of the reflective surface. A regulating device of the Temperature setting apparatus can be connected to the at least one Peltier element and is signal-connected to the at least one temperature sensor. The result is a mirror in which a heat dissipating capacity of the heat dissipating device is improved. | 10-14-2010 |
| 20120044474 | OPTICAL MODULE FOR GUIDING A RADIATION BEAM - An optical module is used to guide an EUV radiation beam. The optical module has a chamber that can be evacuated and at least one mirror accommodated in the chamber. The mirror has a plurality of individual mirrors, the reflection faces of which complement one another to form an overall mirror reflection face. A support structure is in each case mechanically connected via a thermally conductive portion to a mirror body of the respective individual mirror. At least some of the mirror bodies have an associated actuator for the predetermined displacement of the mirror body relative to the support structure in at least one degree of freedom. The thermally conductive portions are configured to dissipate a thermal power density of at least 1 kW/m | 02-23-2012 |
