Patent application number | Description | Published |
20110084423 | IMPRINT APPARATUS AND MANUFACTURING METHOD OF COMMODITIES - The present invention provides an imprint apparatus including a mold and a stage that holds a substrate, the imprint apparatus executing a curing process of curing a resin while the mold and the resin applied to the substrate contact and a demolding process of releasing the mold from the resin cured in the curing process, the imprint apparatus including a structure that holds the mold, a pillar that supports the structure mechanically independently from the stage through an anti-vibration mount that reduces propagation of vibration, and a force providing unit that provides, to the structure, force in an opposite direction from a direction of force generated in the structure by providing demolding force to the mold during the demolding process. | 04-14-2011 |
20110159189 | IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE - An imprint apparatus is disclosed that forms, by pressing a resin applied onto a substrate and a mold against each other, a pattern on the substrate. The imprint apparatus includes a substrate stage that holds the substrate, and a control unit for controlling the position of the stage by outputting a manipulating variable on the basis of a position error between a position of the stage which has been measured by position measurement unit and a target position. The control unit reduces a ratio of the manipulating variable to the position error while the substrate and the mold are in contact with each other until mold release. | 06-30-2011 |
20110310366 | EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD - An apparatus for exposing a substrate to an energy in a vacuum includes a substrate stage having a mirror surface; a mirror configured to deflect a light into a Z axis direction; a measuring device configured to measure the stage position in the Z axis direction with the light in which the mirror surface is irradiated; a driving device configured to move the measuring device so that the mirror surface is irradiated with the light; an optical system configured to project the energy onto the substrate; and a cooling device including a radiation plate (arranged between the optical system and the stage in the Z axis direction and having a first opening which the energy passes and a second opening which the light passes), including a cooler configured to cool the first radiation plate, and configured to perform radiation cooling of the substrate. | 12-22-2011 |
20130011797 | CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD - The drawing apparatus of the present invention includes an optical system housing configured to emit a charged particle beam toward the substrate; a stage configured to hold the substrate and be moved at least in a direction perpendicular to an axis of the optical system housing; a detection device including a detector and a support for supporting the detector such that the detector faces a side surface of the stage, and configured for measuring a position of the stage; and a magnetic shield member provided to the stage and configured to shield an opening of the optical system housing that faces a top surface of the stage from a magnetic field. Here, the magnetic shield member is provided to the stage at a detection region, in a direction of the axis, other than a region where the detection device is provided. | 01-10-2013 |
20130171570 | DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a drawing apparatus including a stage having a reference mark, and configured to hold a substrate and to be moved, a charged particle optical system, a first measuring device having an optical axis spaced apart from an axis of the charged particle optical system by a first distance and configured to measure a position of an alignment mark formed on the substrate, a second measuring device having an optical axis spaced apart from the axis of the charged particle optical system by a second distance and configured to measure a position of the reference mark, and a processor configured to obtain a baseline of the first measuring device based on positions of the reference mark respectively measured by the first measuring device and the second measuring device. | 07-04-2013 |
20130271743 | DRIVING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a driving apparatus including an axis member supported on a base, and a movable member movable along the axis member, comprising a plurality of plate members each including a through-hole through which the axis member penetrates and surrounding the axis member, wherein the plurality of plate members are located apart from each other in a moving direction of the movable member. | 10-17-2013 |
20130273477 | GUIDE APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a guide apparatus including a guide member located on a base, and a moving member movable along the guide member. The guide apparatus comprising a plurality of plate members each including a portion facing the base and extending from the portion in a direction to separate from the base, wherein the plurality of plate members are located apart from each other in a direction to separate from the moving member. | 10-17-2013 |
20140036249 | STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The preset invention provides a stage apparatus which holds a substrate, the apparatus including a driving unit which includes a first coil arranged on a fixed portion, and a first magnet which is arranged on a movable portion and opposed to the first coil, and is configured to move the movable portion by a magnetic field generated by supplying a current to the first coil, and an attracting unit which includes a first yoke arranged on the fixed portion, and a second coil wound around the first yoke, and is configured to attract the movable portion to a side of the fixed portion by a magnetic field generated by supplying a current to the second coil. | 02-06-2014 |
20140111780 | PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME - A processing apparatus configured to conduct a prescribed processing on an object to be processed in a specific environment, the processing apparatus comprising: a chamber configured to have an aperture and an interior accommodated to a specific environment; a mechanism of which at least a portion is contained within the chamber interior, while a remaining portion passes through the aperture without contacting the chamber; at least one support member configured to support the mechanism; a sealing member that configures a boundary of the specific environment and an atmospheric environment by connecting one end to the aperture and connecting the other end to the support member; and a rotary member configured to allow relative rotation around a vertical axis between the support member and a structure that supports the support member. | 04-24-2014 |
20140118710 | STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD - A stage apparatus has a base; a movable portion including a stage movable relative to the base; a flexible utility line for supplying utility to the movable portion; and a cover for covering the utility line, the cover including: a housing member provided to one of the base and the movable portion, in which an opening is formed; and a sealing member provided to the other of the base and the movable portion, which is arranged opposite to a side, in which the opening is formed, of the housing member with a gap therebetween, and has a side for sealing the opening. | 05-01-2014 |
20150029484 | STAGE APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a stage apparatus which holds a substrate, including a first moving stage, a second moving stage supported by the first moving stage, a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil, a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil, a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil, and a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil. | 01-29-2015 |